11/11/2010	10:23:36 AM	Recipe started at 10:23 AM
11/11/2010	10:23:36 AM	Helium valve closed
11/11/2010	10:23:36 AM	BCl3 valve closed
11/11/2010	10:23:36 AM	PH3 valve closed
11/11/2010	10:23:36 AM	SiCl4 pre valve closed
11/11/2010	10:23:36 AM	SiCl4 post valve closed
11/11/2010	10:23:36 AM	Main Vac valve closed
11/11/2010	10:23:36 AM	Bypass valve closed
11/11/2010	10:23:36 AM	Bubbler valve closed
11/11/2010	10:23:36 AM	H2 valve opened
11/11/2010	10:23:36 AM	Helium MFC set to  0.000000
11/11/2010	10:23:36 AM	H2 MFC set to  500.000000
11/11/2010	10:23:36 AM	BCl3 MFC set to  0.000000
11/11/2010	10:23:36 AM	PHl3 MFC set to  0.000000
11/11/2010	10:23:36 AM	SiCl4 MFC set to  0.000000
11/11/2010	10:23:36 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:23:36 AM	Tube furnace set to 0
11/11/2010	10:25:00 AM	Helium valve closed
11/11/2010	10:25:00 AM	BCl3 valve closed
11/11/2010	10:25:00 AM	PH3 valve closed
11/11/2010	10:25:00 AM	SiCl4 pre valve closed
11/11/2010	10:25:00 AM	SiCl4 post valve closed
11/11/2010	10:25:00 AM	Main Vac valve closed
11/11/2010	10:25:00 AM	Bypass valve closed
11/11/2010	10:25:00 AM	H2 valve opened
11/11/2010	10:25:00 AM	Bubbler valve opened
11/11/2010	10:25:00 AM	Helium MFC set to  0.000000
11/11/2010	10:25:00 AM	H2 MFC set to  500.000000
11/11/2010	10:25:00 AM	BCl3 MFC set to  0.000000
11/11/2010	10:25:00 AM	PHl3 MFC set to  0.000000
11/11/2010	10:25:00 AM	SiCl4 MFC set to  0.000000
11/11/2010	10:25:00 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:25:00 AM	Tube furnace set to 1000
11/11/2010	10:45:00 AM	Helium valve closed
11/11/2010	10:45:00 AM	BCl3 valve closed
11/11/2010	10:45:00 AM	Main Vac valve closed
11/11/2010	10:45:00 AM	Bypass valve closed
11/11/2010	10:45:00 AM	H2 valve opened
11/11/2010	10:45:00 AM	PH3 valve opened
11/11/2010	10:45:00 AM	SiCl4 pre valve opened
11/11/2010	10:45:00 AM	SiCl4 post valve opened
11/11/2010	10:45:00 AM	Bubbler valve opened
11/11/2010	10:45:00 AM	Helium MFC set to  0.000000
11/11/2010	10:45:00 AM	H2 MFC set to  500.000000
11/11/2010	10:45:00 AM	BCl3 MFC set to  0.000000
11/11/2010	10:45:00 AM	PHl3 MFC set to  1.000000
11/11/2010	10:45:00 AM	SiCl4 MFC set to  50.000000
11/11/2010	10:45:00 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:45:00 AM	Tube furnace set to 1000
11/11/2010	11:15:00 AM	H2 valve closed
11/11/2010	11:15:00 AM	BCl3 valve closed
11/11/2010	11:15:00 AM	PH3 valve closed
11/11/2010	11:15:00 AM	SiCl4 pre valve closed
11/11/2010	11:15:00 AM	SiCl4 post valve closed
11/11/2010	11:15:00 AM	Main Vac valve closed
11/11/2010	11:15:00 AM	Bypass valve closed
11/11/2010	11:15:00 AM	Helium valve opened
11/11/2010	11:15:00 AM	Bubbler valve opened
11/11/2010	11:15:00 AM	Helium MFC set to  500.000000
11/11/2010	11:15:00 AM	H2 MFC set to  0.000000
11/11/2010	11:15:00 AM	BCl3 MFC set to  0.000000
11/11/2010	11:15:00 AM	PHl3 MFC set to  0.000000
11/11/2010	11:15:00 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:15:00 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:15:00 AM	Tube furnace set to 0
11/11/2010	11:35:00 AM	Helium valve closed
11/11/2010	11:35:00 AM	H2 valve closed
11/11/2010	11:35:00 AM	BCl3 valve closed
11/11/2010	11:35:00 AM	PH3 valve closed
11/11/2010	11:35:00 AM	SiCl4 pre valve closed
11/11/2010	11:35:00 AM	SiCl4 post valve closed
11/11/2010	11:35:00 AM	Main Vac valve closed
11/11/2010	11:35:00 AM	Bypass valve closed
11/11/2010	11:35:00 AM	Bubbler valve closed
11/11/2010	11:35:00 AM	Helium MFC set to  0.000000
11/11/2010	11:35:00 AM	H2 MFC set to  0.000000
11/11/2010	11:35:00 AM	BCl3 MFC set to  0.000000
11/11/2010	11:35:00 AM	PHl3 MFC set to  0.000000
11/11/2010	11:35:00 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:35:00 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:35:00 AM	Tube furnace set to 0
11/11/2010	11:35:01 AM	Run finished at 11:35 AM
11/11/2010	11:43:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	11:43:43 AM	Recipe started at 11:43 AM
11/11/2010	11:43:43 AM	H2 valve closed
11/11/2010	11:43:43 AM	BCl3 valve closed
11/11/2010	11:43:43 AM	PH3 valve closed
11/11/2010	11:43:43 AM	SiCl4 pre valve closed
11/11/2010	11:43:43 AM	SiCl4 post valve closed
11/11/2010	11:43:43 AM	Main Vac valve closed
11/11/2010	11:43:43 AM	Bypass valve closed
11/11/2010	11:43:43 AM	Bubbler valve closed
11/11/2010	11:43:43 AM	Helium valve opened
11/11/2010	11:43:43 AM	Helium MFC set to  500.000000
11/11/2010	11:43:43 AM	H2 MFC set to  0.000000
11/11/2010	11:43:43 AM	BCl3 MFC set to  0.000000
11/11/2010	11:43:43 AM	PHl3 MFC set to  0.000000
11/11/2010	11:43:43 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:43:43 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:43:43 AM	Tube furnace set to 0
11/11/2010	11:43:44 AM	Helium valve closed
11/11/2010	11:43:44 AM	H2 valve closed
11/11/2010	11:43:44 AM	BCl3 valve closed
11/11/2010	11:43:44 AM	PH3 valve closed
11/11/2010	11:43:44 AM	SiCl4 pre valve closed
11/11/2010	11:43:44 AM	SiCl4 post valve closed
11/11/2010	11:43:44 AM	Main Vac valve closed
11/11/2010	11:43:44 AM	Bypass valve closed
11/11/2010	11:43:44 AM	Bubbler valve closed
11/11/2010	11:43:44 AM	Helium MFC set to  0.000000
11/11/2010	11:43:44 AM	H2 MFC set to  0.000000
11/11/2010	11:43:44 AM	BCl3 MFC set to  0.000000
11/11/2010	11:43:44 AM	PHl3 MFC set to  0.000000
11/11/2010	11:43:44 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:43:44 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:43:44 AM	Tube furnace set to 0
11/11/2010	11:43:44 AM	Run finished at 11:43 AM
11/11/2010	11:43:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	11:50:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	11:51:00 AM	Recipe started at 11:50 AM
11/11/2010	11:51:00 AM	Helium valve closed
11/11/2010	11:51:00 AM	H2 valve closed
11/11/2010	11:51:00 AM	BCl3 valve closed
11/11/2010	11:51:00 AM	PH3 valve closed
11/11/2010	11:51:00 AM	SiCl4 pre valve closed
11/11/2010	11:51:00 AM	SiCl4 post valve closed
11/11/2010	11:51:00 AM	Main Vac valve closed
11/11/2010	11:51:00 AM	Bubbler valve closed
11/11/2010	11:51:00 AM	Bypass valve opened
11/11/2010	11:51:00 AM	Helium MFC set to  0.000000
11/11/2010	11:51:00 AM	H2 MFC set to  0.000000
11/11/2010	11:51:00 AM	BCl3 MFC set to  0.000000
11/11/2010	11:51:00 AM	PHl3 MFC set to  0.000000
11/11/2010	11:51:00 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:51:00 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:51:00 AM	Tube furnace set to 0
11/11/2010	11:51:52 AM	Helium valve closed
11/11/2010	11:51:52 AM	H2 valve closed
11/11/2010	11:51:52 AM	BCl3 valve closed
11/11/2010	11:51:52 AM	PH3 valve closed
11/11/2010	11:51:52 AM	SiCl4 pre valve closed
11/11/2010	11:51:52 AM	SiCl4 post valve closed
11/11/2010	11:51:52 AM	Bubbler valve closed
11/11/2010	11:51:52 AM	Main Vac valve opened
11/11/2010	11:51:52 AM	Bypass valve opened
11/11/2010	11:51:52 AM	Helium MFC set to  0.000000
11/11/2010	11:51:52 AM	H2 MFC set to  0.000000
11/11/2010	11:51:52 AM	BCl3 MFC set to  0.000000
11/11/2010	11:51:52 AM	PHl3 MFC set to  0.000000
11/11/2010	11:51:52 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:51:52 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:51:52 AM	Tube furnace set to 0
11/11/2010	11:51:52 AM	Run finished at 11:51 AM
11/11/2010	11:51:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	11:53:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:53:33 AM	Recipe started at 11:53 AM
11/11/2010	11:53:33 AM	Helium valve closed
11/11/2010	11:53:33 AM	H2 valve closed
11/11/2010	11:53:33 AM	BCl3 valve closed
11/11/2010	11:53:33 AM	PH3 valve closed
11/11/2010	11:53:33 AM	SiCl4 pre valve closed
11/11/2010	11:53:33 AM	SiCl4 post valve closed
11/11/2010	11:53:33 AM	Main Vac valve closed
11/11/2010	11:53:33 AM	Bubbler valve closed
11/11/2010	11:53:33 AM	Bypass valve opened
11/11/2010	11:53:33 AM	Helium MFC set to  0.000000
11/11/2010	11:53:33 AM	H2 MFC set to  0.000000
11/11/2010	11:53:33 AM	BCl3 MFC set to  0.000000
11/11/2010	11:53:33 AM	PHl3 MFC set to  0.000000
11/11/2010	11:53:33 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:53:33 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:53:33 AM	Tube furnace set to 0
11/11/2010	11:53:33 AM	Helium valve closed
11/11/2010	11:53:33 AM	H2 valve closed
11/11/2010	11:53:33 AM	BCl3 valve closed
11/11/2010	11:53:33 AM	PH3 valve closed
11/11/2010	11:53:33 AM	SiCl4 pre valve closed
11/11/2010	11:53:33 AM	SiCl4 post valve closed
11/11/2010	11:53:33 AM	Bubbler valve closed
11/11/2010	11:53:33 AM	Main Vac valve opened
11/11/2010	11:53:33 AM	Bypass valve opened
11/11/2010	11:53:33 AM	Helium MFC set to  0.000000
11/11/2010	11:53:33 AM	H2 MFC set to  0.000000
11/11/2010	11:53:33 AM	BCl3 MFC set to  0.000000
11/11/2010	11:53:33 AM	PHl3 MFC set to  0.000000
11/11/2010	11:53:33 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:53:33 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:53:33 AM	Tube furnace set to 0
11/11/2010	11:54:33 AM	H2 valve closed
11/11/2010	11:54:33 AM	BCl3 valve closed
11/11/2010	11:54:33 AM	PH3 valve closed
11/11/2010	11:54:33 AM	SiCl4 pre valve closed
11/11/2010	11:54:33 AM	SiCl4 post valve closed
11/11/2010	11:54:33 AM	Bubbler valve closed
11/11/2010	11:54:33 AM	Helium valve opened
11/11/2010	11:54:33 AM	Main Vac valve opened
11/11/2010	11:54:33 AM	Bypass valve opened
11/11/2010	11:54:33 AM	Helium MFC set to  100.000000
11/11/2010	11:54:33 AM	H2 MFC set to  0.000000
11/11/2010	11:54:33 AM	BCl3 MFC set to  0.000000
11/11/2010	11:54:33 AM	PHl3 MFC set to  0.000000
11/11/2010	11:54:33 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:54:33 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:54:34 AM	Tube furnace set to 0
11/11/2010	11:55:34 AM	Helium valve closed
11/11/2010	11:55:34 AM	H2 valve closed
11/11/2010	11:55:34 AM	BCl3 valve closed
11/11/2010	11:55:34 AM	PH3 valve closed
11/11/2010	11:55:34 AM	SiCl4 pre valve closed
11/11/2010	11:55:34 AM	SiCl4 post valve closed
11/11/2010	11:55:34 AM	Bubbler valve closed
11/11/2010	11:55:34 AM	Main Vac valve opened
11/11/2010	11:55:34 AM	Bypass valve opened
11/11/2010	11:55:34 AM	Helium MFC set to  0.000000
11/11/2010	11:55:34 AM	H2 MFC set to  0.000000
11/11/2010	11:55:34 AM	BCl3 MFC set to  0.000000
11/11/2010	11:55:34 AM	PHl3 MFC set to  0.000000
11/11/2010	11:55:34 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:55:34 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:55:34 AM	Tube furnace set to 0
11/11/2010	11:56:34 AM	H2 valve closed
11/11/2010	11:56:34 AM	BCl3 valve closed
11/11/2010	11:56:34 AM	PH3 valve closed
11/11/2010	11:56:34 AM	SiCl4 pre valve closed
11/11/2010	11:56:34 AM	SiCl4 post valve closed
11/11/2010	11:56:34 AM	Bubbler valve closed
11/11/2010	11:56:34 AM	Helium valve opened
11/11/2010	11:56:34 AM	Main Vac valve opened
11/11/2010	11:56:34 AM	Bypass valve opened
11/11/2010	11:56:34 AM	Helium MFC set to  100.000000
11/11/2010	11:56:34 AM	H2 MFC set to  0.000000
11/11/2010	11:56:34 AM	BCl3 MFC set to  0.000000
11/11/2010	11:56:34 AM	PHl3 MFC set to  0.000000
11/11/2010	11:56:34 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:56:34 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:56:34 AM	Tube furnace set to 0
11/11/2010	11:57:34 AM	Helium valve closed
11/11/2010	11:57:34 AM	H2 valve closed
11/11/2010	11:57:34 AM	BCl3 valve closed
11/11/2010	11:57:34 AM	PH3 valve closed
11/11/2010	11:57:34 AM	SiCl4 pre valve closed
11/11/2010	11:57:34 AM	SiCl4 post valve closed
11/11/2010	11:57:34 AM	Bubbler valve closed
11/11/2010	11:57:34 AM	Main Vac valve opened
11/11/2010	11:57:34 AM	Bypass valve opened
11/11/2010	11:57:34 AM	Helium MFC set to  0.000000
11/11/2010	11:57:34 AM	H2 MFC set to  0.000000
11/11/2010	11:57:34 AM	BCl3 MFC set to  0.000000
11/11/2010	11:57:34 AM	PHl3 MFC set to  0.000000
11/11/2010	11:57:34 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:57:34 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:57:34 AM	Tube furnace set to 0
11/11/2010	11:58:34 AM	H2 valve closed
11/11/2010	11:58:34 AM	BCl3 valve closed
11/11/2010	11:58:34 AM	PH3 valve closed
11/11/2010	11:58:34 AM	SiCl4 pre valve closed
11/11/2010	11:58:34 AM	SiCl4 post valve closed
11/11/2010	11:58:34 AM	Bubbler valve closed
11/11/2010	11:58:34 AM	Helium valve opened
11/11/2010	11:58:34 AM	Main Vac valve opened
11/11/2010	11:58:34 AM	Bypass valve opened
11/11/2010	11:58:34 AM	Helium MFC set to  100.000000
11/11/2010	11:58:34 AM	H2 MFC set to  0.000000
11/11/2010	11:58:34 AM	BCl3 MFC set to  0.000000
11/11/2010	11:58:34 AM	PHl3 MFC set to  0.000000
11/11/2010	11:58:34 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:58:34 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:58:34 AM	Tube furnace set to 0
11/11/2010	11:59:34 AM	Helium valve closed
11/11/2010	11:59:34 AM	H2 valve closed
11/11/2010	11:59:34 AM	BCl3 valve closed
11/11/2010	11:59:34 AM	PH3 valve closed
11/11/2010	11:59:34 AM	SiCl4 pre valve closed
11/11/2010	11:59:34 AM	SiCl4 post valve closed
11/11/2010	11:59:34 AM	Bubbler valve closed
11/11/2010	11:59:34 AM	Main Vac valve opened
11/11/2010	11:59:34 AM	Bypass valve opened
11/11/2010	11:59:34 AM	Helium MFC set to  0.000000
11/11/2010	11:59:34 AM	H2 MFC set to  0.000000
11/11/2010	11:59:34 AM	BCl3 MFC set to  0.000000
11/11/2010	11:59:34 AM	PHl3 MFC set to  0.000000
11/11/2010	11:59:34 AM	SiCl4 MFC set to  0.000000
11/11/2010	11:59:34 AM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:59:35 AM	Tube furnace set to 0
11/11/2010	12:00:35 PM	H2 valve closed
11/11/2010	12:00:35 PM	BCl3 valve closed
11/11/2010	12:00:35 PM	PH3 valve closed
11/11/2010	12:00:35 PM	SiCl4 pre valve closed
11/11/2010	12:00:35 PM	SiCl4 post valve closed
11/11/2010	12:00:35 PM	Bubbler valve closed
11/11/2010	12:00:35 PM	Helium valve opened
11/11/2010	12:00:35 PM	Main Vac valve opened
11/11/2010	12:00:35 PM	Bypass valve opened
11/11/2010	12:00:35 PM	Helium MFC set to  100.000000
11/11/2010	12:00:35 PM	H2 MFC set to  0.000000
11/11/2010	12:00:35 PM	BCl3 MFC set to  0.000000
11/11/2010	12:00:35 PM	PHl3 MFC set to  0.000000
11/11/2010	12:00:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:00:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:00:35 PM	Tube furnace set to 0
11/11/2010	12:01:35 PM	Helium valve closed
11/11/2010	12:01:35 PM	H2 valve closed
11/11/2010	12:01:35 PM	BCl3 valve closed
11/11/2010	12:01:35 PM	PH3 valve closed
11/11/2010	12:01:35 PM	SiCl4 pre valve closed
11/11/2010	12:01:35 PM	SiCl4 post valve closed
11/11/2010	12:01:35 PM	Bubbler valve closed
11/11/2010	12:01:35 PM	Main Vac valve opened
11/11/2010	12:01:35 PM	Bypass valve opened
11/11/2010	12:01:35 PM	Helium MFC set to  0.000000
11/11/2010	12:01:35 PM	H2 MFC set to  0.000000
11/11/2010	12:01:35 PM	BCl3 MFC set to  0.000000
11/11/2010	12:01:35 PM	PHl3 MFC set to  0.000000
11/11/2010	12:01:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:01:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:01:35 PM	Tube furnace set to 0
11/11/2010	12:02:35 PM	H2 valve closed
11/11/2010	12:02:35 PM	BCl3 valve closed
11/11/2010	12:02:35 PM	PH3 valve closed
11/11/2010	12:02:35 PM	SiCl4 pre valve closed
11/11/2010	12:02:35 PM	SiCl4 post valve closed
11/11/2010	12:02:35 PM	Bubbler valve closed
11/11/2010	12:02:35 PM	Helium valve opened
11/11/2010	12:02:35 PM	Main Vac valve opened
11/11/2010	12:02:35 PM	Bypass valve opened
11/11/2010	12:02:35 PM	Helium MFC set to  100.000000
11/11/2010	12:02:35 PM	H2 MFC set to  0.000000
11/11/2010	12:02:35 PM	BCl3 MFC set to  0.000000
11/11/2010	12:02:35 PM	PHl3 MFC set to  0.000000
11/11/2010	12:02:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:02:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:02:35 PM	Tube furnace set to 0
11/11/2010	12:03:35 PM	Helium valve closed
11/11/2010	12:03:35 PM	H2 valve closed
11/11/2010	12:03:35 PM	BCl3 valve closed
11/11/2010	12:03:35 PM	PH3 valve closed
11/11/2010	12:03:35 PM	SiCl4 pre valve closed
11/11/2010	12:03:35 PM	SiCl4 post valve closed
11/11/2010	12:03:35 PM	Bubbler valve closed
11/11/2010	12:03:35 PM	Main Vac valve opened
11/11/2010	12:03:35 PM	Bypass valve opened
11/11/2010	12:03:35 PM	Helium MFC set to  0.000000
11/11/2010	12:03:35 PM	H2 MFC set to  0.000000
11/11/2010	12:03:35 PM	BCl3 MFC set to  0.000000
11/11/2010	12:03:35 PM	PHl3 MFC set to  0.000000
11/11/2010	12:03:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:03:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:03:35 PM	Tube furnace set to 0
11/11/2010	12:04:35 PM	H2 valve closed
11/11/2010	12:04:35 PM	BCl3 valve closed
11/11/2010	12:04:35 PM	PH3 valve closed
11/11/2010	12:04:35 PM	SiCl4 pre valve closed
11/11/2010	12:04:35 PM	SiCl4 post valve closed
11/11/2010	12:04:35 PM	Bubbler valve closed
11/11/2010	12:04:35 PM	Helium valve opened
11/11/2010	12:04:35 PM	Main Vac valve opened
11/11/2010	12:04:35 PM	Bypass valve opened
11/11/2010	12:04:35 PM	Helium MFC set to  100.000000
11/11/2010	12:04:35 PM	H2 MFC set to  0.000000
11/11/2010	12:04:35 PM	BCl3 MFC set to  0.000000
11/11/2010	12:04:35 PM	PHl3 MFC set to  0.000000
11/11/2010	12:04:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:04:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:04:36 PM	Tube furnace set to 0
11/11/2010	12:05:36 PM	Helium valve closed
11/11/2010	12:05:36 PM	H2 valve closed
11/11/2010	12:05:36 PM	BCl3 valve closed
11/11/2010	12:05:36 PM	PH3 valve closed
11/11/2010	12:05:36 PM	SiCl4 pre valve closed
11/11/2010	12:05:36 PM	SiCl4 post valve closed
11/11/2010	12:05:36 PM	Bubbler valve closed
11/11/2010	12:05:36 PM	Main Vac valve opened
11/11/2010	12:05:36 PM	Bypass valve opened
11/11/2010	12:05:36 PM	Helium MFC set to  0.000000
11/11/2010	12:05:36 PM	H2 MFC set to  0.000000
11/11/2010	12:05:36 PM	BCl3 MFC set to  0.000000
11/11/2010	12:05:36 PM	PHl3 MFC set to  0.000000
11/11/2010	12:05:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:05:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:05:36 PM	Tube furnace set to 0
11/11/2010	12:06:36 PM	H2 valve closed
11/11/2010	12:06:36 PM	BCl3 valve closed
11/11/2010	12:06:36 PM	PH3 valve closed
11/11/2010	12:06:36 PM	SiCl4 pre valve closed
11/11/2010	12:06:36 PM	SiCl4 post valve closed
11/11/2010	12:06:36 PM	Bubbler valve closed
11/11/2010	12:06:36 PM	Helium valve opened
11/11/2010	12:06:36 PM	Main Vac valve opened
11/11/2010	12:06:36 PM	Bypass valve opened
11/11/2010	12:06:36 PM	Helium MFC set to  100.000000
11/11/2010	12:06:36 PM	H2 MFC set to  0.000000
11/11/2010	12:06:36 PM	BCl3 MFC set to  0.000000
11/11/2010	12:06:36 PM	PHl3 MFC set to  0.000000
11/11/2010	12:06:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:06:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:06:36 PM	Tube furnace set to 0
11/11/2010	12:07:36 PM	Helium valve closed
11/11/2010	12:07:36 PM	H2 valve closed
11/11/2010	12:07:36 PM	BCl3 valve closed
11/11/2010	12:07:36 PM	PH3 valve closed
11/11/2010	12:07:36 PM	SiCl4 pre valve closed
11/11/2010	12:07:36 PM	SiCl4 post valve closed
11/11/2010	12:07:36 PM	Bubbler valve closed
11/11/2010	12:07:36 PM	Main Vac valve opened
11/11/2010	12:07:36 PM	Bypass valve opened
11/11/2010	12:07:36 PM	Helium MFC set to  0.000000
11/11/2010	12:07:36 PM	H2 MFC set to  0.000000
11/11/2010	12:07:36 PM	BCl3 MFC set to  0.000000
11/11/2010	12:07:36 PM	PHl3 MFC set to  0.000000
11/11/2010	12:07:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:07:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:07:36 PM	Tube furnace set to 0
11/11/2010	12:08:36 PM	H2 valve closed
11/11/2010	12:08:36 PM	BCl3 valve closed
11/11/2010	12:08:36 PM	PH3 valve closed
11/11/2010	12:08:36 PM	SiCl4 pre valve closed
11/11/2010	12:08:36 PM	SiCl4 post valve closed
11/11/2010	12:08:36 PM	Bubbler valve closed
11/11/2010	12:08:36 PM	Helium valve opened
11/11/2010	12:08:36 PM	Main Vac valve opened
11/11/2010	12:08:36 PM	Bypass valve opened
11/11/2010	12:08:36 PM	Helium MFC set to  100.000000
11/11/2010	12:08:36 PM	H2 MFC set to  0.000000
11/11/2010	12:08:36 PM	BCl3 MFC set to  0.000000
11/11/2010	12:08:36 PM	PHl3 MFC set to  0.000000
11/11/2010	12:08:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:08:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:08:36 PM	Tube furnace set to 0
11/11/2010	12:09:36 PM	Helium valve closed
11/11/2010	12:09:36 PM	H2 valve closed
11/11/2010	12:09:36 PM	BCl3 valve closed
11/11/2010	12:09:36 PM	PH3 valve closed
11/11/2010	12:09:36 PM	SiCl4 pre valve closed
11/11/2010	12:09:36 PM	SiCl4 post valve closed
11/11/2010	12:09:36 PM	Bubbler valve closed
11/11/2010	12:09:36 PM	Main Vac valve opened
11/11/2010	12:09:36 PM	Bypass valve opened
11/11/2010	12:09:36 PM	Helium MFC set to  0.000000
11/11/2010	12:09:36 PM	H2 MFC set to  0.000000
11/11/2010	12:09:36 PM	BCl3 MFC set to  0.000000
11/11/2010	12:09:36 PM	PHl3 MFC set to  0.000000
11/11/2010	12:09:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:09:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:09:37 PM	Tube furnace set to 0
11/11/2010	12:10:37 PM	H2 valve closed
11/11/2010	12:10:37 PM	BCl3 valve closed
11/11/2010	12:10:37 PM	PH3 valve closed
11/11/2010	12:10:37 PM	SiCl4 pre valve closed
11/11/2010	12:10:37 PM	SiCl4 post valve closed
11/11/2010	12:10:37 PM	Bubbler valve closed
11/11/2010	12:10:37 PM	Helium valve opened
11/11/2010	12:10:37 PM	Main Vac valve opened
11/11/2010	12:10:37 PM	Bypass valve opened
11/11/2010	12:10:37 PM	Helium MFC set to  100.000000
11/11/2010	12:10:37 PM	H2 MFC set to  0.000000
11/11/2010	12:10:37 PM	BCl3 MFC set to  0.000000
11/11/2010	12:10:37 PM	PHl3 MFC set to  0.000000
11/11/2010	12:10:37 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:10:37 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:10:37 PM	Tube furnace set to 0
11/11/2010	12:11:37 PM	Helium valve closed
11/11/2010	12:11:37 PM	H2 valve closed
11/11/2010	12:11:37 PM	BCl3 valve closed
11/11/2010	12:11:37 PM	PH3 valve closed
11/11/2010	12:11:37 PM	SiCl4 pre valve closed
11/11/2010	12:11:37 PM	SiCl4 post valve closed
11/11/2010	12:11:37 PM	Bubbler valve closed
11/11/2010	12:11:37 PM	Main Vac valve opened
11/11/2010	12:11:37 PM	Bypass valve opened
11/11/2010	12:11:37 PM	Helium MFC set to  0.000000
11/11/2010	12:11:37 PM	H2 MFC set to  0.000000
11/11/2010	12:11:37 PM	BCl3 MFC set to  0.000000
11/11/2010	12:11:37 PM	PHl3 MFC set to  0.000000
11/11/2010	12:11:37 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:11:37 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:11:37 PM	Tube furnace set to 0
11/11/2010	12:12:37 PM	H2 valve closed
11/11/2010	12:12:37 PM	BCl3 valve closed
11/11/2010	12:12:37 PM	PH3 valve closed
11/11/2010	12:12:37 PM	SiCl4 pre valve closed
11/11/2010	12:12:37 PM	SiCl4 post valve closed
11/11/2010	12:12:37 PM	Bubbler valve closed
11/11/2010	12:12:37 PM	Helium valve opened
11/11/2010	12:12:37 PM	Main Vac valve opened
11/11/2010	12:12:37 PM	Bypass valve opened
11/11/2010	12:12:37 PM	Helium MFC set to  100.000000
11/11/2010	12:12:37 PM	H2 MFC set to  0.000000
11/11/2010	12:12:37 PM	BCl3 MFC set to  0.000000
11/11/2010	12:12:37 PM	PHl3 MFC set to  0.000000
11/11/2010	12:12:37 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:12:37 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:12:37 PM	Tube furnace set to 0
11/11/2010	12:13:37 PM	Helium valve closed
11/11/2010	12:13:37 PM	H2 valve closed
11/11/2010	12:13:37 PM	BCl3 valve closed
11/11/2010	12:13:37 PM	PH3 valve closed
11/11/2010	12:13:37 PM	SiCl4 pre valve closed
11/11/2010	12:13:37 PM	SiCl4 post valve closed
11/11/2010	12:13:37 PM	Bubbler valve closed
11/11/2010	12:13:37 PM	Main Vac valve opened
11/11/2010	12:13:37 PM	Bypass valve opened
11/11/2010	12:13:37 PM	Helium MFC set to  0.000000
11/11/2010	12:13:37 PM	H2 MFC set to  0.000000
11/11/2010	12:13:37 PM	BCl3 MFC set to  0.000000
11/11/2010	12:13:37 PM	PHl3 MFC set to  0.000000
11/11/2010	12:13:37 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:13:37 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:13:37 PM	Tube furnace set to 0
11/11/2010	12:13:38 PM	Run finished at 12:13 PM
11/11/2010	12:13:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	12:35:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	12:35:19 PM	Recipe started at 12:35 PM
11/11/2010	12:35:19 PM	Helium valve closed
11/11/2010	12:35:19 PM	H2 valve closed
11/11/2010	12:35:19 PM	BCl3 valve closed
11/11/2010	12:35:19 PM	PH3 valve closed
11/11/2010	12:35:19 PM	SiCl4 pre valve closed
11/11/2010	12:35:19 PM	SiCl4 post valve closed
11/11/2010	12:35:19 PM	Main Vac valve closed
11/11/2010	12:35:19 PM	Bubbler valve closed
11/11/2010	12:35:19 PM	Bypass valve opened
11/11/2010	12:35:19 PM	Helium MFC set to  0.000000
11/11/2010	12:35:19 PM	H2 MFC set to  0.000000
11/11/2010	12:35:19 PM	BCl3 MFC set to  0.000000
11/11/2010	12:35:19 PM	PHl3 MFC set to  0.000000
11/11/2010	12:35:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:35:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:35:19 PM	Tube furnace set to 0
11/11/2010	12:35:19 PM	Helium valve closed
11/11/2010	12:35:19 PM	H2 valve closed
11/11/2010	12:35:19 PM	BCl3 valve closed
11/11/2010	12:35:19 PM	PH3 valve closed
11/11/2010	12:35:19 PM	SiCl4 pre valve closed
11/11/2010	12:35:19 PM	SiCl4 post valve closed
11/11/2010	12:35:19 PM	Bubbler valve closed
11/11/2010	12:35:19 PM	Main Vac valve opened
11/11/2010	12:35:19 PM	Bypass valve opened
11/11/2010	12:35:19 PM	Helium MFC set to  0.000000
11/11/2010	12:35:19 PM	H2 MFC set to  0.000000
11/11/2010	12:35:19 PM	BCl3 MFC set to  0.000000
11/11/2010	12:35:19 PM	PHl3 MFC set to  0.000000
11/11/2010	12:35:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:35:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:35:19 PM	Tube furnace set to 0
11/11/2010	12:36:19 PM	H2 valve closed
11/11/2010	12:36:19 PM	BCl3 valve closed
11/11/2010	12:36:19 PM	PH3 valve closed
11/11/2010	12:36:19 PM	SiCl4 pre valve closed
11/11/2010	12:36:19 PM	SiCl4 post valve closed
11/11/2010	12:36:19 PM	Bubbler valve closed
11/11/2010	12:36:19 PM	Helium valve opened
11/11/2010	12:36:19 PM	Main Vac valve opened
11/11/2010	12:36:19 PM	Bypass valve opened
11/11/2010	12:36:19 PM	Helium MFC set to  100.000000
11/11/2010	12:36:19 PM	H2 MFC set to  0.000000
11/11/2010	12:36:19 PM	BCl3 MFC set to  0.000000
11/11/2010	12:36:19 PM	PHl3 MFC set to  0.000000
11/11/2010	12:36:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:36:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:36:19 PM	Tube furnace set to 0
11/11/2010	12:37:19 PM	Helium valve closed
11/11/2010	12:37:19 PM	H2 valve closed
11/11/2010	12:37:19 PM	BCl3 valve closed
11/11/2010	12:37:19 PM	PH3 valve closed
11/11/2010	12:37:19 PM	SiCl4 pre valve closed
11/11/2010	12:37:19 PM	SiCl4 post valve closed
11/11/2010	12:37:19 PM	Bubbler valve closed
11/11/2010	12:37:19 PM	Main Vac valve opened
11/11/2010	12:37:19 PM	Bypass valve opened
11/11/2010	12:37:19 PM	Helium MFC set to  0.000000
11/11/2010	12:37:19 PM	H2 MFC set to  0.000000
11/11/2010	12:37:19 PM	BCl3 MFC set to  0.000000
11/11/2010	12:37:19 PM	PHl3 MFC set to  0.000000
11/11/2010	12:37:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:37:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:37:20 PM	Tube furnace set to 0
11/11/2010	12:38:20 PM	H2 valve closed
11/11/2010	12:38:20 PM	BCl3 valve closed
11/11/2010	12:38:20 PM	PH3 valve closed
11/11/2010	12:38:20 PM	SiCl4 pre valve closed
11/11/2010	12:38:20 PM	SiCl4 post valve closed
11/11/2010	12:38:20 PM	Bubbler valve closed
11/11/2010	12:38:20 PM	Helium valve opened
11/11/2010	12:38:20 PM	Main Vac valve opened
11/11/2010	12:38:20 PM	Bypass valve opened
11/11/2010	12:38:20 PM	Helium MFC set to  100.000000
11/11/2010	12:38:20 PM	H2 MFC set to  0.000000
11/11/2010	12:38:20 PM	BCl3 MFC set to  0.000000
11/11/2010	12:38:20 PM	PHl3 MFC set to  0.000000
11/11/2010	12:38:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:38:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:38:20 PM	Tube furnace set to 0
11/11/2010	12:39:20 PM	Helium valve closed
11/11/2010	12:39:20 PM	H2 valve closed
11/11/2010	12:39:20 PM	BCl3 valve closed
11/11/2010	12:39:20 PM	PH3 valve closed
11/11/2010	12:39:20 PM	SiCl4 pre valve closed
11/11/2010	12:39:20 PM	SiCl4 post valve closed
11/11/2010	12:39:20 PM	Bubbler valve closed
11/11/2010	12:39:20 PM	Main Vac valve opened
11/11/2010	12:39:20 PM	Bypass valve opened
11/11/2010	12:39:20 PM	Helium MFC set to  0.000000
11/11/2010	12:39:20 PM	H2 MFC set to  0.000000
11/11/2010	12:39:20 PM	BCl3 MFC set to  0.000000
11/11/2010	12:39:20 PM	PHl3 MFC set to  0.000000
11/11/2010	12:39:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:39:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:39:20 PM	Tube furnace set to 0
11/11/2010	12:40:20 PM	H2 valve closed
11/11/2010	12:40:20 PM	BCl3 valve closed
11/11/2010	12:40:20 PM	PH3 valve closed
11/11/2010	12:40:20 PM	SiCl4 pre valve closed
11/11/2010	12:40:20 PM	SiCl4 post valve closed
11/11/2010	12:40:20 PM	Bubbler valve closed
11/11/2010	12:40:20 PM	Helium valve opened
11/11/2010	12:40:20 PM	Main Vac valve opened
11/11/2010	12:40:20 PM	Bypass valve opened
11/11/2010	12:40:20 PM	Helium MFC set to  100.000000
11/11/2010	12:40:20 PM	H2 MFC set to  0.000000
11/11/2010	12:40:20 PM	BCl3 MFC set to  0.000000
11/11/2010	12:40:20 PM	PHl3 MFC set to  0.000000
11/11/2010	12:40:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:40:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:40:20 PM	Tube furnace set to 0
11/11/2010	12:41:20 PM	Helium valve closed
11/11/2010	12:41:20 PM	H2 valve closed
11/11/2010	12:41:20 PM	BCl3 valve closed
11/11/2010	12:41:20 PM	PH3 valve closed
11/11/2010	12:41:20 PM	SiCl4 pre valve closed
11/11/2010	12:41:20 PM	SiCl4 post valve closed
11/11/2010	12:41:20 PM	Bubbler valve closed
11/11/2010	12:41:20 PM	Main Vac valve opened
11/11/2010	12:41:20 PM	Bypass valve opened
11/11/2010	12:41:20 PM	Helium MFC set to  0.000000
11/11/2010	12:41:20 PM	H2 MFC set to  0.000000
11/11/2010	12:41:20 PM	BCl3 MFC set to  0.000000
11/11/2010	12:41:20 PM	PHl3 MFC set to  0.000000
11/11/2010	12:41:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:41:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:41:20 PM	Tube furnace set to 0
11/11/2010	12:42:20 PM	H2 valve closed
11/11/2010	12:42:20 PM	BCl3 valve closed
11/11/2010	12:42:20 PM	PH3 valve closed
11/11/2010	12:42:20 PM	SiCl4 pre valve closed
11/11/2010	12:42:20 PM	SiCl4 post valve closed
11/11/2010	12:42:20 PM	Bubbler valve closed
11/11/2010	12:42:20 PM	Helium valve opened
11/11/2010	12:42:20 PM	Main Vac valve opened
11/11/2010	12:42:20 PM	Bypass valve opened
11/11/2010	12:42:20 PM	Helium MFC set to  100.000000
11/11/2010	12:42:20 PM	H2 MFC set to  0.000000
11/11/2010	12:42:20 PM	BCl3 MFC set to  0.000000
11/11/2010	12:42:20 PM	PHl3 MFC set to  0.000000
11/11/2010	12:42:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:42:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:42:21 PM	Tube furnace set to 0
11/11/2010	12:43:21 PM	Helium valve closed
11/11/2010	12:43:21 PM	H2 valve closed
11/11/2010	12:43:21 PM	BCl3 valve closed
11/11/2010	12:43:21 PM	PH3 valve closed
11/11/2010	12:43:21 PM	SiCl4 pre valve closed
11/11/2010	12:43:21 PM	SiCl4 post valve closed
11/11/2010	12:43:21 PM	Bubbler valve closed
11/11/2010	12:43:21 PM	Main Vac valve opened
11/11/2010	12:43:21 PM	Bypass valve opened
11/11/2010	12:43:21 PM	Helium MFC set to  0.000000
11/11/2010	12:43:21 PM	H2 MFC set to  0.000000
11/11/2010	12:43:21 PM	BCl3 MFC set to  0.000000
11/11/2010	12:43:21 PM	PHl3 MFC set to  0.000000
11/11/2010	12:43:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:43:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:43:21 PM	Tube furnace set to 0
11/11/2010	12:44:21 PM	H2 valve closed
11/11/2010	12:44:21 PM	BCl3 valve closed
11/11/2010	12:44:21 PM	PH3 valve closed
11/11/2010	12:44:21 PM	SiCl4 pre valve closed
11/11/2010	12:44:21 PM	SiCl4 post valve closed
11/11/2010	12:44:21 PM	Bubbler valve closed
11/11/2010	12:44:21 PM	Helium valve opened
11/11/2010	12:44:21 PM	Main Vac valve opened
11/11/2010	12:44:21 PM	Bypass valve opened
11/11/2010	12:44:21 PM	Helium MFC set to  100.000000
11/11/2010	12:44:21 PM	H2 MFC set to  0.000000
11/11/2010	12:44:21 PM	BCl3 MFC set to  0.000000
11/11/2010	12:44:21 PM	PHl3 MFC set to  0.000000
11/11/2010	12:44:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:44:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:44:21 PM	Tube furnace set to 0
11/11/2010	12:45:21 PM	Helium valve closed
11/11/2010	12:45:21 PM	H2 valve closed
11/11/2010	12:45:21 PM	BCl3 valve closed
11/11/2010	12:45:21 PM	PH3 valve closed
11/11/2010	12:45:21 PM	SiCl4 pre valve closed
11/11/2010	12:45:21 PM	SiCl4 post valve closed
11/11/2010	12:45:21 PM	Bubbler valve closed
11/11/2010	12:45:21 PM	Main Vac valve opened
11/11/2010	12:45:21 PM	Bypass valve opened
11/11/2010	12:45:21 PM	Helium MFC set to  0.000000
11/11/2010	12:45:21 PM	H2 MFC set to  0.000000
11/11/2010	12:45:21 PM	BCl3 MFC set to  0.000000
11/11/2010	12:45:21 PM	PHl3 MFC set to  0.000000
11/11/2010	12:45:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:45:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:45:21 PM	Tube furnace set to 0
11/11/2010	12:46:21 PM	H2 valve closed
11/11/2010	12:46:21 PM	BCl3 valve closed
11/11/2010	12:46:21 PM	PH3 valve closed
11/11/2010	12:46:21 PM	SiCl4 pre valve closed
11/11/2010	12:46:21 PM	SiCl4 post valve closed
11/11/2010	12:46:21 PM	Bubbler valve closed
11/11/2010	12:46:21 PM	Helium valve opened
11/11/2010	12:46:21 PM	Main Vac valve opened
11/11/2010	12:46:21 PM	Bypass valve opened
11/11/2010	12:46:21 PM	Helium MFC set to  100.000000
11/11/2010	12:46:21 PM	H2 MFC set to  0.000000
11/11/2010	12:46:21 PM	BCl3 MFC set to  0.000000
11/11/2010	12:46:21 PM	PHl3 MFC set to  0.000000
11/11/2010	12:46:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:46:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:46:21 PM	Tube furnace set to 0
11/11/2010	12:47:21 PM	Helium valve closed
11/11/2010	12:47:21 PM	H2 valve closed
11/11/2010	12:47:21 PM	BCl3 valve closed
11/11/2010	12:47:21 PM	PH3 valve closed
11/11/2010	12:47:21 PM	SiCl4 pre valve closed
11/11/2010	12:47:21 PM	SiCl4 post valve closed
11/11/2010	12:47:21 PM	Bubbler valve closed
11/11/2010	12:47:21 PM	Main Vac valve opened
11/11/2010	12:47:21 PM	Bypass valve opened
11/11/2010	12:47:21 PM	Helium MFC set to  0.000000
11/11/2010	12:47:21 PM	H2 MFC set to  0.000000
11/11/2010	12:47:21 PM	BCl3 MFC set to  0.000000
11/11/2010	12:47:21 PM	PHl3 MFC set to  0.000000
11/11/2010	12:47:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:47:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:47:22 PM	Tube furnace set to 0
11/11/2010	12:48:22 PM	H2 valve closed
11/11/2010	12:48:22 PM	BCl3 valve closed
11/11/2010	12:48:22 PM	PH3 valve closed
11/11/2010	12:48:22 PM	SiCl4 pre valve closed
11/11/2010	12:48:22 PM	SiCl4 post valve closed
11/11/2010	12:48:22 PM	Bubbler valve closed
11/11/2010	12:48:22 PM	Helium valve opened
11/11/2010	12:48:22 PM	Main Vac valve opened
11/11/2010	12:48:22 PM	Bypass valve opened
11/11/2010	12:48:22 PM	Helium MFC set to  100.000000
11/11/2010	12:48:22 PM	H2 MFC set to  0.000000
11/11/2010	12:48:22 PM	BCl3 MFC set to  0.000000
11/11/2010	12:48:22 PM	PHl3 MFC set to  0.000000
11/11/2010	12:48:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:48:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:48:22 PM	Tube furnace set to 0
11/11/2010	12:49:22 PM	Helium valve closed
11/11/2010	12:49:22 PM	H2 valve closed
11/11/2010	12:49:22 PM	BCl3 valve closed
11/11/2010	12:49:22 PM	PH3 valve closed
11/11/2010	12:49:22 PM	SiCl4 pre valve closed
11/11/2010	12:49:22 PM	SiCl4 post valve closed
11/11/2010	12:49:22 PM	Bubbler valve closed
11/11/2010	12:49:22 PM	Main Vac valve opened
11/11/2010	12:49:22 PM	Bypass valve opened
11/11/2010	12:49:22 PM	Helium MFC set to  0.000000
11/11/2010	12:49:22 PM	H2 MFC set to  0.000000
11/11/2010	12:49:22 PM	BCl3 MFC set to  0.000000
11/11/2010	12:49:22 PM	PHl3 MFC set to  0.000000
11/11/2010	12:49:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:49:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:49:22 PM	Tube furnace set to 0
11/11/2010	12:50:22 PM	H2 valve closed
11/11/2010	12:50:22 PM	BCl3 valve closed
11/11/2010	12:50:22 PM	PH3 valve closed
11/11/2010	12:50:22 PM	SiCl4 pre valve closed
11/11/2010	12:50:22 PM	SiCl4 post valve closed
11/11/2010	12:50:22 PM	Bubbler valve closed
11/11/2010	12:50:22 PM	Helium valve opened
11/11/2010	12:50:22 PM	Main Vac valve opened
11/11/2010	12:50:22 PM	Bypass valve opened
11/11/2010	12:50:22 PM	Helium MFC set to  100.000000
11/11/2010	12:50:22 PM	H2 MFC set to  0.000000
11/11/2010	12:50:22 PM	BCl3 MFC set to  0.000000
11/11/2010	12:50:22 PM	PHl3 MFC set to  0.000000
11/11/2010	12:50:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:50:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:50:22 PM	Tube furnace set to 0
11/11/2010	12:51:22 PM	Helium valve closed
11/11/2010	12:51:22 PM	H2 valve closed
11/11/2010	12:51:22 PM	BCl3 valve closed
11/11/2010	12:51:22 PM	PH3 valve closed
11/11/2010	12:51:22 PM	SiCl4 pre valve closed
11/11/2010	12:51:22 PM	SiCl4 post valve closed
11/11/2010	12:51:22 PM	Bubbler valve closed
11/11/2010	12:51:22 PM	Main Vac valve opened
11/11/2010	12:51:22 PM	Bypass valve opened
11/11/2010	12:51:22 PM	Helium MFC set to  0.000000
11/11/2010	12:51:22 PM	H2 MFC set to  0.000000
11/11/2010	12:51:22 PM	BCl3 MFC set to  0.000000
11/11/2010	12:51:22 PM	PHl3 MFC set to  0.000000
11/11/2010	12:51:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:51:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:51:22 PM	Tube furnace set to 0
11/11/2010	12:52:22 PM	H2 valve closed
11/11/2010	12:52:22 PM	BCl3 valve closed
11/11/2010	12:52:22 PM	PH3 valve closed
11/11/2010	12:52:22 PM	SiCl4 pre valve closed
11/11/2010	12:52:22 PM	SiCl4 post valve closed
11/11/2010	12:52:22 PM	Bubbler valve closed
11/11/2010	12:52:22 PM	Helium valve opened
11/11/2010	12:52:22 PM	Main Vac valve opened
11/11/2010	12:52:22 PM	Bypass valve opened
11/11/2010	12:52:22 PM	Helium MFC set to  100.000000
11/11/2010	12:52:22 PM	H2 MFC set to  0.000000
11/11/2010	12:52:22 PM	BCl3 MFC set to  0.000000
11/11/2010	12:52:22 PM	PHl3 MFC set to  0.000000
11/11/2010	12:52:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:52:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:52:23 PM	Tube furnace set to 0
11/11/2010	12:53:23 PM	Helium valve closed
11/11/2010	12:53:23 PM	H2 valve closed
11/11/2010	12:53:23 PM	BCl3 valve closed
11/11/2010	12:53:23 PM	PH3 valve closed
11/11/2010	12:53:23 PM	SiCl4 pre valve closed
11/11/2010	12:53:23 PM	SiCl4 post valve closed
11/11/2010	12:53:23 PM	Bubbler valve closed
11/11/2010	12:53:23 PM	Main Vac valve opened
11/11/2010	12:53:23 PM	Bypass valve opened
11/11/2010	12:53:23 PM	Helium MFC set to  0.000000
11/11/2010	12:53:23 PM	H2 MFC set to  0.000000
11/11/2010	12:53:23 PM	BCl3 MFC set to  0.000000
11/11/2010	12:53:23 PM	PHl3 MFC set to  0.000000
11/11/2010	12:53:23 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:53:23 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:53:23 PM	Tube furnace set to 0
11/11/2010	12:54:23 PM	H2 valve closed
11/11/2010	12:54:23 PM	BCl3 valve closed
11/11/2010	12:54:23 PM	PH3 valve closed
11/11/2010	12:54:23 PM	SiCl4 pre valve closed
11/11/2010	12:54:23 PM	SiCl4 post valve closed
11/11/2010	12:54:23 PM	Bubbler valve closed
11/11/2010	12:54:23 PM	Helium valve opened
11/11/2010	12:54:23 PM	Main Vac valve opened
11/11/2010	12:54:23 PM	Bypass valve opened
11/11/2010	12:54:23 PM	Helium MFC set to  100.000000
11/11/2010	12:54:23 PM	H2 MFC set to  0.000000
11/11/2010	12:54:23 PM	BCl3 MFC set to  0.000000
11/11/2010	12:54:23 PM	PHl3 MFC set to  0.000000
11/11/2010	12:54:23 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:54:23 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:54:23 PM	Tube furnace set to 0
11/11/2010	12:55:23 PM	Helium valve closed
11/11/2010	12:55:23 PM	H2 valve closed
11/11/2010	12:55:23 PM	BCl3 valve closed
11/11/2010	12:55:23 PM	PH3 valve closed
11/11/2010	12:55:23 PM	SiCl4 pre valve closed
11/11/2010	12:55:23 PM	SiCl4 post valve closed
11/11/2010	12:55:23 PM	Bubbler valve closed
11/11/2010	12:55:23 PM	Main Vac valve opened
11/11/2010	12:55:23 PM	Bypass valve opened
11/11/2010	12:55:23 PM	Helium MFC set to  0.000000
11/11/2010	12:55:23 PM	H2 MFC set to  0.000000
11/11/2010	12:55:23 PM	BCl3 MFC set to  0.000000
11/11/2010	12:55:23 PM	PHl3 MFC set to  0.000000
11/11/2010	12:55:23 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:55:23 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:55:23 PM	Tube furnace set to 0
11/11/2010	12:55:24 PM	Run finished at 12:55 PM
11/11/2010	12:55:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	12:56:06 PM	Bypass valve closed
11/11/2010	12:56:07 PM	Main Vac valve closed
11/11/2010	12:56:34 PM	Bypass valve opened
11/11/2010	12:56:35 PM	Main Vac valve opened
11/11/2010	12:57:13 PM	Recipe started at 12:57 PM
11/11/2010	12:57:13 PM	Helium valve closed
11/11/2010	12:57:13 PM	BCl3 valve closed
11/11/2010	12:57:13 PM	PH3 valve closed
11/11/2010	12:57:13 PM	SiCl4 pre valve closed
11/11/2010	12:57:13 PM	SiCl4 post valve closed
11/11/2010	12:57:13 PM	Main Vac valve closed
11/11/2010	12:57:13 PM	Bypass valve closed
11/11/2010	12:57:13 PM	Bubbler valve closed
11/11/2010	12:57:13 PM	H2 valve opened
11/11/2010	12:57:13 PM	Helium MFC set to  0.000000
11/11/2010	12:57:13 PM	H2 MFC set to  500.000000
11/11/2010	12:57:13 PM	BCl3 MFC set to  0.000000
11/11/2010	12:57:13 PM	PHl3 MFC set to  0.000000
11/11/2010	12:57:13 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:57:13 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:57:13 PM	Tube furnace set to 0
11/11/2010	12:58:33 PM	Helium valve closed
11/11/2010	12:58:33 PM	BCl3 valve closed
11/11/2010	12:58:33 PM	PH3 valve closed
11/11/2010	12:58:33 PM	SiCl4 pre valve closed
11/11/2010	12:58:33 PM	SiCl4 post valve closed
11/11/2010	12:58:33 PM	Main Vac valve closed
11/11/2010	12:58:33 PM	Bypass valve closed
11/11/2010	12:58:33 PM	H2 valve opened
11/11/2010	12:58:33 PM	Bubbler valve opened
11/11/2010	12:58:33 PM	Helium MFC set to  0.000000
11/11/2010	12:58:33 PM	H2 MFC set to  500.000000
11/11/2010	12:58:33 PM	BCl3 MFC set to  0.000000
11/11/2010	12:58:33 PM	PHl3 MFC set to  0.000000
11/11/2010	12:58:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	12:58:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	12:58:33 PM	Tube furnace set to 1000
11/11/2010	1:18:33 PM	Helium valve closed
11/11/2010	1:18:33 PM	BCl3 valve closed
11/11/2010	1:18:33 PM	Main Vac valve closed
11/11/2010	1:18:33 PM	Bypass valve closed
11/11/2010	1:18:33 PM	H2 valve opened
11/11/2010	1:18:33 PM	PH3 valve opened
11/11/2010	1:18:33 PM	SiCl4 pre valve opened
11/11/2010	1:18:33 PM	SiCl4 post valve opened
11/11/2010	1:18:33 PM	Bubbler valve opened
11/11/2010	1:18:33 PM	Helium MFC set to  0.000000
11/11/2010	1:18:33 PM	H2 MFC set to  500.000000
11/11/2010	1:18:33 PM	BCl3 MFC set to  0.000000
11/11/2010	1:18:33 PM	PHl3 MFC set to  1.000000
11/11/2010	1:18:33 PM	SiCl4 MFC set to  50.000000
11/11/2010	1:18:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	1:18:33 PM	Tube furnace set to 1000
11/11/2010	1:50:33 PM	H2 valve closed
11/11/2010	1:50:33 PM	BCl3 valve closed
11/11/2010	1:50:33 PM	PH3 valve closed
11/11/2010	1:50:33 PM	SiCl4 pre valve closed
11/11/2010	1:50:33 PM	SiCl4 post valve closed
11/11/2010	1:50:33 PM	Main Vac valve closed
11/11/2010	1:50:33 PM	Bypass valve closed
11/11/2010	1:50:33 PM	Helium valve opened
11/11/2010	1:50:33 PM	Bubbler valve opened
11/11/2010	1:50:33 PM	Helium MFC set to  500.000000
11/11/2010	1:50:33 PM	H2 MFC set to  0.000000
11/11/2010	1:50:33 PM	BCl3 MFC set to  0.000000
11/11/2010	1:50:33 PM	PHl3 MFC set to  0.000000
11/11/2010	1:50:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	1:50:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	1:50:33 PM	Tube furnace set to 0
11/11/2010	2:10:33 PM	Helium valve closed
11/11/2010	2:10:33 PM	H2 valve closed
11/11/2010	2:10:33 PM	BCl3 valve closed
11/11/2010	2:10:33 PM	PH3 valve closed
11/11/2010	2:10:33 PM	SiCl4 pre valve closed
11/11/2010	2:10:33 PM	SiCl4 post valve closed
11/11/2010	2:10:33 PM	Main Vac valve closed
11/11/2010	2:10:33 PM	Bypass valve closed
11/11/2010	2:10:33 PM	Bubbler valve closed
11/11/2010	2:10:33 PM	Helium MFC set to  0.000000
11/11/2010	2:10:33 PM	H2 MFC set to  0.000000
11/11/2010	2:10:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:10:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:10:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:10:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:10:34 PM	Tube furnace set to 0
11/11/2010	2:10:34 PM	Run finished at 2:10 PM
11/11/2010	2:34:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	2:34:13 PM	Recipe started at 2:34 PM
11/11/2010	2:34:13 PM	H2 valve closed
11/11/2010	2:34:13 PM	BCl3 valve closed
11/11/2010	2:34:13 PM	PH3 valve closed
11/11/2010	2:34:13 PM	SiCl4 pre valve closed
11/11/2010	2:34:13 PM	SiCl4 post valve closed
11/11/2010	2:34:13 PM	Main Vac valve closed
11/11/2010	2:34:13 PM	Bypass valve closed
11/11/2010	2:34:13 PM	Bubbler valve closed
11/11/2010	2:34:13 PM	Helium valve opened
11/11/2010	2:34:13 PM	Helium MFC set to  500.000000
11/11/2010	2:34:13 PM	H2 MFC set to  0.000000
11/11/2010	2:34:13 PM	BCl3 MFC set to  0.000000
11/11/2010	2:34:13 PM	PHl3 MFC set to  0.000000
11/11/2010	2:34:13 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:34:13 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:34:13 PM	Tube furnace set to 0
11/11/2010	2:34:14 PM	Helium valve closed
11/11/2010	2:34:14 PM	H2 valve closed
11/11/2010	2:34:14 PM	BCl3 valve closed
11/11/2010	2:34:14 PM	PH3 valve closed
11/11/2010	2:34:14 PM	SiCl4 pre valve closed
11/11/2010	2:34:14 PM	SiCl4 post valve closed
11/11/2010	2:34:14 PM	Main Vac valve closed
11/11/2010	2:34:14 PM	Bypass valve closed
11/11/2010	2:34:14 PM	Bubbler valve closed
11/11/2010	2:34:14 PM	Helium MFC set to  0.000000
11/11/2010	2:34:14 PM	H2 MFC set to  0.000000
11/11/2010	2:34:14 PM	BCl3 MFC set to  0.000000
11/11/2010	2:34:14 PM	PHl3 MFC set to  0.000000
11/11/2010	2:34:14 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:34:14 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:34:14 PM	Tube furnace set to 0
11/11/2010	2:34:14 PM	Run finished at 2:34 PM
11/11/2010	2:34:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	2:39:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	2:39:58 PM	Recipe started at 2:39 PM
11/11/2010	2:39:58 PM	Helium valve closed
11/11/2010	2:39:58 PM	H2 valve closed
11/11/2010	2:39:58 PM	BCl3 valve closed
11/11/2010	2:39:58 PM	PH3 valve closed
11/11/2010	2:39:58 PM	SiCl4 pre valve closed
11/11/2010	2:39:58 PM	SiCl4 post valve closed
11/11/2010	2:39:58 PM	Main Vac valve closed
11/11/2010	2:39:58 PM	Bubbler valve closed
11/11/2010	2:39:58 PM	Bypass valve opened
11/11/2010	2:39:58 PM	Helium MFC set to  0.000000
11/11/2010	2:39:58 PM	H2 MFC set to  0.000000
11/11/2010	2:39:58 PM	BCl3 MFC set to  0.000000
11/11/2010	2:39:58 PM	PHl3 MFC set to  0.000000
11/11/2010	2:39:58 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:39:58 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:39:58 PM	Tube furnace set to 0
11/11/2010	2:40:50 PM	Helium valve closed
11/11/2010	2:40:50 PM	H2 valve closed
11/11/2010	2:40:50 PM	BCl3 valve closed
11/11/2010	2:40:50 PM	PH3 valve closed
11/11/2010	2:40:50 PM	SiCl4 pre valve closed
11/11/2010	2:40:50 PM	SiCl4 post valve closed
11/11/2010	2:40:50 PM	Bubbler valve closed
11/11/2010	2:40:50 PM	Main Vac valve opened
11/11/2010	2:40:50 PM	Bypass valve opened
11/11/2010	2:40:50 PM	Helium MFC set to  0.000000
11/11/2010	2:40:50 PM	H2 MFC set to  0.000000
11/11/2010	2:40:50 PM	BCl3 MFC set to  0.000000
11/11/2010	2:40:50 PM	PHl3 MFC set to  0.000000
11/11/2010	2:40:50 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:40:50 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:40:51 PM	Tube furnace set to 0
11/11/2010	2:40:51 PM	Run finished at 2:40 PM
11/11/2010	2:40:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	2:41:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	2:41:30 PM	Recipe started at 2:41 PM
11/11/2010	2:41:30 PM	Helium valve closed
11/11/2010	2:41:30 PM	H2 valve closed
11/11/2010	2:41:30 PM	BCl3 valve closed
11/11/2010	2:41:30 PM	PH3 valve closed
11/11/2010	2:41:30 PM	SiCl4 pre valve closed
11/11/2010	2:41:30 PM	SiCl4 post valve closed
11/11/2010	2:41:30 PM	Main Vac valve closed
11/11/2010	2:41:30 PM	Bubbler valve closed
11/11/2010	2:41:30 PM	Bypass valve opened
11/11/2010	2:41:30 PM	Helium MFC set to  0.000000
11/11/2010	2:41:30 PM	H2 MFC set to  0.000000
11/11/2010	2:41:30 PM	BCl3 MFC set to  0.000000
11/11/2010	2:41:30 PM	PHl3 MFC set to  0.000000
11/11/2010	2:41:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:41:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:41:31 PM	Tube furnace set to 0
11/11/2010	2:41:31 PM	Helium valve closed
11/11/2010	2:41:31 PM	H2 valve closed
11/11/2010	2:41:31 PM	BCl3 valve closed
11/11/2010	2:41:31 PM	PH3 valve closed
11/11/2010	2:41:31 PM	SiCl4 pre valve closed
11/11/2010	2:41:31 PM	SiCl4 post valve closed
11/11/2010	2:41:31 PM	Bubbler valve closed
11/11/2010	2:41:31 PM	Main Vac valve opened
11/11/2010	2:41:31 PM	Bypass valve opened
11/11/2010	2:41:31 PM	Helium MFC set to  0.000000
11/11/2010	2:41:31 PM	H2 MFC set to  0.000000
11/11/2010	2:41:31 PM	BCl3 MFC set to  0.000000
11/11/2010	2:41:31 PM	PHl3 MFC set to  0.000000
11/11/2010	2:41:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:41:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:41:31 PM	Tube furnace set to 0
11/11/2010	2:42:31 PM	H2 valve closed
11/11/2010	2:42:31 PM	BCl3 valve closed
11/11/2010	2:42:31 PM	PH3 valve closed
11/11/2010	2:42:31 PM	SiCl4 pre valve closed
11/11/2010	2:42:31 PM	SiCl4 post valve closed
11/11/2010	2:42:31 PM	Bubbler valve closed
11/11/2010	2:42:31 PM	Helium valve opened
11/11/2010	2:42:31 PM	Main Vac valve opened
11/11/2010	2:42:31 PM	Bypass valve opened
11/11/2010	2:42:31 PM	Helium MFC set to  100.000000
11/11/2010	2:42:31 PM	H2 MFC set to  0.000000
11/11/2010	2:42:31 PM	BCl3 MFC set to  0.000000
11/11/2010	2:42:31 PM	PHl3 MFC set to  0.000000
11/11/2010	2:42:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:42:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:42:31 PM	Tube furnace set to 0
11/11/2010	2:43:31 PM	Helium valve closed
11/11/2010	2:43:31 PM	H2 valve closed
11/11/2010	2:43:31 PM	BCl3 valve closed
11/11/2010	2:43:31 PM	PH3 valve closed
11/11/2010	2:43:31 PM	SiCl4 pre valve closed
11/11/2010	2:43:31 PM	SiCl4 post valve closed
11/11/2010	2:43:31 PM	Bubbler valve closed
11/11/2010	2:43:31 PM	Main Vac valve opened
11/11/2010	2:43:31 PM	Bypass valve opened
11/11/2010	2:43:31 PM	Helium MFC set to  0.000000
11/11/2010	2:43:31 PM	H2 MFC set to  0.000000
11/11/2010	2:43:31 PM	BCl3 MFC set to  0.000000
11/11/2010	2:43:31 PM	PHl3 MFC set to  0.000000
11/11/2010	2:43:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:43:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:43:31 PM	Tube furnace set to 0
11/11/2010	2:44:31 PM	H2 valve closed
11/11/2010	2:44:31 PM	BCl3 valve closed
11/11/2010	2:44:31 PM	PH3 valve closed
11/11/2010	2:44:31 PM	SiCl4 pre valve closed
11/11/2010	2:44:31 PM	SiCl4 post valve closed
11/11/2010	2:44:31 PM	Bubbler valve closed
11/11/2010	2:44:31 PM	Helium valve opened
11/11/2010	2:44:32 PM	Main Vac valve opened
11/11/2010	2:44:32 PM	Bypass valve opened
11/11/2010	2:44:32 PM	Helium MFC set to  100.000000
11/11/2010	2:44:32 PM	H2 MFC set to  0.000000
11/11/2010	2:44:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:44:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:44:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:44:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:44:32 PM	Tube furnace set to 0
11/11/2010	2:45:32 PM	Helium valve closed
11/11/2010	2:45:32 PM	H2 valve closed
11/11/2010	2:45:32 PM	BCl3 valve closed
11/11/2010	2:45:32 PM	PH3 valve closed
11/11/2010	2:45:32 PM	SiCl4 pre valve closed
11/11/2010	2:45:32 PM	SiCl4 post valve closed
11/11/2010	2:45:32 PM	Bubbler valve closed
11/11/2010	2:45:32 PM	Main Vac valve opened
11/11/2010	2:45:32 PM	Bypass valve opened
11/11/2010	2:45:32 PM	Helium MFC set to  0.000000
11/11/2010	2:45:32 PM	H2 MFC set to  0.000000
11/11/2010	2:45:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:45:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:45:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:45:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:45:32 PM	Tube furnace set to 0
11/11/2010	2:46:32 PM	H2 valve closed
11/11/2010	2:46:32 PM	BCl3 valve closed
11/11/2010	2:46:32 PM	PH3 valve closed
11/11/2010	2:46:32 PM	SiCl4 pre valve closed
11/11/2010	2:46:32 PM	SiCl4 post valve closed
11/11/2010	2:46:32 PM	Bubbler valve closed
11/11/2010	2:46:32 PM	Helium valve opened
11/11/2010	2:46:32 PM	Main Vac valve opened
11/11/2010	2:46:32 PM	Bypass valve opened
11/11/2010	2:46:32 PM	Helium MFC set to  100.000000
11/11/2010	2:46:32 PM	H2 MFC set to  0.000000
11/11/2010	2:46:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:46:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:46:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:46:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:46:32 PM	Tube furnace set to 0
11/11/2010	2:47:32 PM	Helium valve closed
11/11/2010	2:47:32 PM	H2 valve closed
11/11/2010	2:47:32 PM	BCl3 valve closed
11/11/2010	2:47:32 PM	PH3 valve closed
11/11/2010	2:47:32 PM	SiCl4 pre valve closed
11/11/2010	2:47:32 PM	SiCl4 post valve closed
11/11/2010	2:47:32 PM	Bubbler valve closed
11/11/2010	2:47:32 PM	Main Vac valve opened
11/11/2010	2:47:32 PM	Bypass valve opened
11/11/2010	2:47:32 PM	Helium MFC set to  0.000000
11/11/2010	2:47:32 PM	H2 MFC set to  0.000000
11/11/2010	2:47:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:47:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:47:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:47:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:47:32 PM	Tube furnace set to 0
11/11/2010	2:48:32 PM	H2 valve closed
11/11/2010	2:48:32 PM	BCl3 valve closed
11/11/2010	2:48:32 PM	PH3 valve closed
11/11/2010	2:48:32 PM	SiCl4 pre valve closed
11/11/2010	2:48:32 PM	SiCl4 post valve closed
11/11/2010	2:48:32 PM	Bubbler valve closed
11/11/2010	2:48:32 PM	Helium valve opened
11/11/2010	2:48:32 PM	Main Vac valve opened
11/11/2010	2:48:32 PM	Bypass valve opened
11/11/2010	2:48:32 PM	Helium MFC set to  100.000000
11/11/2010	2:48:32 PM	H2 MFC set to  0.000000
11/11/2010	2:48:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:48:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:48:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:48:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:48:32 PM	Tube furnace set to 0
11/11/2010	2:49:32 PM	Helium valve closed
11/11/2010	2:49:32 PM	H2 valve closed
11/11/2010	2:49:32 PM	BCl3 valve closed
11/11/2010	2:49:32 PM	PH3 valve closed
11/11/2010	2:49:32 PM	SiCl4 pre valve closed
11/11/2010	2:49:32 PM	SiCl4 post valve closed
11/11/2010	2:49:32 PM	Bubbler valve closed
11/11/2010	2:49:32 PM	Main Vac valve opened
11/11/2010	2:49:32 PM	Bypass valve opened
11/11/2010	2:49:32 PM	Helium MFC set to  0.000000
11/11/2010	2:49:32 PM	H2 MFC set to  0.000000
11/11/2010	2:49:32 PM	BCl3 MFC set to  0.000000
11/11/2010	2:49:32 PM	PHl3 MFC set to  0.000000
11/11/2010	2:49:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:49:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:49:33 PM	Tube furnace set to 0
11/11/2010	2:50:33 PM	H2 valve closed
11/11/2010	2:50:33 PM	BCl3 valve closed
11/11/2010	2:50:33 PM	PH3 valve closed
11/11/2010	2:50:33 PM	SiCl4 pre valve closed
11/11/2010	2:50:33 PM	SiCl4 post valve closed
11/11/2010	2:50:33 PM	Bubbler valve closed
11/11/2010	2:50:33 PM	Helium valve opened
11/11/2010	2:50:33 PM	Main Vac valve opened
11/11/2010	2:50:33 PM	Bypass valve opened
11/11/2010	2:50:33 PM	Helium MFC set to  100.000000
11/11/2010	2:50:33 PM	H2 MFC set to  0.000000
11/11/2010	2:50:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:50:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:50:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:50:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:50:33 PM	Tube furnace set to 0
11/11/2010	2:51:33 PM	Helium valve closed
11/11/2010	2:51:33 PM	H2 valve closed
11/11/2010	2:51:33 PM	BCl3 valve closed
11/11/2010	2:51:33 PM	PH3 valve closed
11/11/2010	2:51:33 PM	SiCl4 pre valve closed
11/11/2010	2:51:33 PM	SiCl4 post valve closed
11/11/2010	2:51:33 PM	Bubbler valve closed
11/11/2010	2:51:33 PM	Main Vac valve opened
11/11/2010	2:51:33 PM	Bypass valve opened
11/11/2010	2:51:33 PM	Helium MFC set to  0.000000
11/11/2010	2:51:33 PM	H2 MFC set to  0.000000
11/11/2010	2:51:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:51:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:51:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:51:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:51:33 PM	Tube furnace set to 0
11/11/2010	2:52:33 PM	H2 valve closed
11/11/2010	2:52:33 PM	BCl3 valve closed
11/11/2010	2:52:33 PM	PH3 valve closed
11/11/2010	2:52:33 PM	SiCl4 pre valve closed
11/11/2010	2:52:33 PM	SiCl4 post valve closed
11/11/2010	2:52:33 PM	Bubbler valve closed
11/11/2010	2:52:33 PM	Helium valve opened
11/11/2010	2:52:33 PM	Main Vac valve opened
11/11/2010	2:52:33 PM	Bypass valve opened
11/11/2010	2:52:33 PM	Helium MFC set to  100.000000
11/11/2010	2:52:33 PM	H2 MFC set to  0.000000
11/11/2010	2:52:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:52:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:52:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:52:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:52:33 PM	Tube furnace set to 0
11/11/2010	2:53:33 PM	Helium valve closed
11/11/2010	2:53:33 PM	H2 valve closed
11/11/2010	2:53:33 PM	BCl3 valve closed
11/11/2010	2:53:33 PM	PH3 valve closed
11/11/2010	2:53:33 PM	SiCl4 pre valve closed
11/11/2010	2:53:33 PM	SiCl4 post valve closed
11/11/2010	2:53:33 PM	Bubbler valve closed
11/11/2010	2:53:33 PM	Main Vac valve opened
11/11/2010	2:53:33 PM	Bypass valve opened
11/11/2010	2:53:33 PM	Helium MFC set to  0.000000
11/11/2010	2:53:33 PM	H2 MFC set to  0.000000
11/11/2010	2:53:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:53:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:53:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:53:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:53:33 PM	Tube furnace set to 0
11/11/2010	2:54:33 PM	H2 valve closed
11/11/2010	2:54:33 PM	BCl3 valve closed
11/11/2010	2:54:33 PM	PH3 valve closed
11/11/2010	2:54:33 PM	SiCl4 pre valve closed
11/11/2010	2:54:33 PM	SiCl4 post valve closed
11/11/2010	2:54:33 PM	Bubbler valve closed
11/11/2010	2:54:33 PM	Helium valve opened
11/11/2010	2:54:33 PM	Main Vac valve opened
11/11/2010	2:54:33 PM	Bypass valve opened
11/11/2010	2:54:33 PM	Helium MFC set to  100.000000
11/11/2010	2:54:33 PM	H2 MFC set to  0.000000
11/11/2010	2:54:33 PM	BCl3 MFC set to  0.000000
11/11/2010	2:54:33 PM	PHl3 MFC set to  0.000000
11/11/2010	2:54:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:54:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:54:34 PM	Tube furnace set to 0
11/11/2010	2:55:34 PM	Helium valve closed
11/11/2010	2:55:34 PM	H2 valve closed
11/11/2010	2:55:34 PM	BCl3 valve closed
11/11/2010	2:55:34 PM	PH3 valve closed
11/11/2010	2:55:34 PM	SiCl4 pre valve closed
11/11/2010	2:55:34 PM	SiCl4 post valve closed
11/11/2010	2:55:34 PM	Bubbler valve closed
11/11/2010	2:55:34 PM	Main Vac valve opened
11/11/2010	2:55:34 PM	Bypass valve opened
11/11/2010	2:55:34 PM	Helium MFC set to  0.000000
11/11/2010	2:55:34 PM	H2 MFC set to  0.000000
11/11/2010	2:55:34 PM	BCl3 MFC set to  0.000000
11/11/2010	2:55:34 PM	PHl3 MFC set to  0.000000
11/11/2010	2:55:34 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:55:34 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:55:34 PM	Tube furnace set to 0
11/11/2010	2:56:34 PM	H2 valve closed
11/11/2010	2:56:34 PM	BCl3 valve closed
11/11/2010	2:56:34 PM	PH3 valve closed
11/11/2010	2:56:34 PM	SiCl4 pre valve closed
11/11/2010	2:56:34 PM	SiCl4 post valve closed
11/11/2010	2:56:34 PM	Bubbler valve closed
11/11/2010	2:56:34 PM	Helium valve opened
11/11/2010	2:56:34 PM	Main Vac valve opened
11/11/2010	2:56:34 PM	Bypass valve opened
11/11/2010	2:56:34 PM	Helium MFC set to  100.000000
11/11/2010	2:56:34 PM	H2 MFC set to  0.000000
11/11/2010	2:56:34 PM	BCl3 MFC set to  0.000000
11/11/2010	2:56:34 PM	PHl3 MFC set to  0.000000
11/11/2010	2:56:34 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:56:34 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:56:34 PM	Tube furnace set to 0
11/11/2010	2:57:34 PM	Helium valve closed
11/11/2010	2:57:34 PM	H2 valve closed
11/11/2010	2:57:34 PM	BCl3 valve closed
11/11/2010	2:57:34 PM	PH3 valve closed
11/11/2010	2:57:34 PM	SiCl4 pre valve closed
11/11/2010	2:57:34 PM	SiCl4 post valve closed
11/11/2010	2:57:34 PM	Bubbler valve closed
11/11/2010	2:57:34 PM	Main Vac valve opened
11/11/2010	2:57:34 PM	Bypass valve opened
11/11/2010	2:57:34 PM	Helium MFC set to  0.000000
11/11/2010	2:57:34 PM	H2 MFC set to  0.000000
11/11/2010	2:57:34 PM	BCl3 MFC set to  0.000000
11/11/2010	2:57:34 PM	PHl3 MFC set to  0.000000
11/11/2010	2:57:34 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:57:34 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:57:34 PM	Tube furnace set to 0
11/11/2010	2:58:34 PM	H2 valve closed
11/11/2010	2:58:34 PM	BCl3 valve closed
11/11/2010	2:58:34 PM	PH3 valve closed
11/11/2010	2:58:34 PM	SiCl4 pre valve closed
11/11/2010	2:58:34 PM	SiCl4 post valve closed
11/11/2010	2:58:34 PM	Bubbler valve closed
11/11/2010	2:58:34 PM	Helium valve opened
11/11/2010	2:58:34 PM	Main Vac valve opened
11/11/2010	2:58:34 PM	Bypass valve opened
11/11/2010	2:58:34 PM	Helium MFC set to  100.000000
11/11/2010	2:58:34 PM	H2 MFC set to  0.000000
11/11/2010	2:58:34 PM	BCl3 MFC set to  0.000000
11/11/2010	2:58:34 PM	PHl3 MFC set to  0.000000
11/11/2010	2:58:34 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:58:34 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:58:34 PM	Tube furnace set to 0
11/11/2010	2:59:34 PM	Helium valve closed
11/11/2010	2:59:34 PM	H2 valve closed
11/11/2010	2:59:34 PM	BCl3 valve closed
11/11/2010	2:59:34 PM	PH3 valve closed
11/11/2010	2:59:34 PM	SiCl4 pre valve closed
11/11/2010	2:59:34 PM	SiCl4 post valve closed
11/11/2010	2:59:34 PM	Bubbler valve closed
11/11/2010	2:59:34 PM	Main Vac valve opened
11/11/2010	2:59:34 PM	Bypass valve opened
11/11/2010	2:59:34 PM	Helium MFC set to  0.000000
11/11/2010	2:59:34 PM	H2 MFC set to  0.000000
11/11/2010	2:59:34 PM	BCl3 MFC set to  0.000000
11/11/2010	2:59:34 PM	PHl3 MFC set to  0.000000
11/11/2010	2:59:34 PM	SiCl4 MFC set to  0.000000
11/11/2010	2:59:34 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	2:59:35 PM	Tube furnace set to 0
11/11/2010	3:00:35 PM	H2 valve closed
11/11/2010	3:00:35 PM	BCl3 valve closed
11/11/2010	3:00:35 PM	PH3 valve closed
11/11/2010	3:00:35 PM	SiCl4 pre valve closed
11/11/2010	3:00:35 PM	SiCl4 post valve closed
11/11/2010	3:00:35 PM	Bubbler valve closed
11/11/2010	3:00:35 PM	Helium valve opened
11/11/2010	3:00:35 PM	Main Vac valve opened
11/11/2010	3:00:35 PM	Bypass valve opened
11/11/2010	3:00:35 PM	Helium MFC set to  100.000000
11/11/2010	3:00:35 PM	H2 MFC set to  0.000000
11/11/2010	3:00:35 PM	BCl3 MFC set to  0.000000
11/11/2010	3:00:35 PM	PHl3 MFC set to  0.000000
11/11/2010	3:00:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:00:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:00:35 PM	Tube furnace set to 0
11/11/2010	3:01:35 PM	Helium valve closed
11/11/2010	3:01:35 PM	H2 valve closed
11/11/2010	3:01:35 PM	BCl3 valve closed
11/11/2010	3:01:35 PM	PH3 valve closed
11/11/2010	3:01:35 PM	SiCl4 pre valve closed
11/11/2010	3:01:35 PM	SiCl4 post valve closed
11/11/2010	3:01:35 PM	Bubbler valve closed
11/11/2010	3:01:35 PM	Main Vac valve opened
11/11/2010	3:01:35 PM	Bypass valve opened
11/11/2010	3:01:35 PM	Helium MFC set to  0.000000
11/11/2010	3:01:35 PM	H2 MFC set to  0.000000
11/11/2010	3:01:35 PM	BCl3 MFC set to  0.000000
11/11/2010	3:01:35 PM	PHl3 MFC set to  0.000000
11/11/2010	3:01:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:01:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:01:35 PM	Tube furnace set to 0
11/11/2010	3:01:36 PM	Run finished at 3:01 PM
11/11/2010	3:01:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	3:54:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	3:54:44 PM	Recipe started at 3:54 PM
11/11/2010	3:54:44 PM	Helium valve closed
11/11/2010	3:54:44 PM	H2 valve closed
11/11/2010	3:54:44 PM	BCl3 valve closed
11/11/2010	3:54:44 PM	PH3 valve closed
11/11/2010	3:54:44 PM	SiCl4 pre valve closed
11/11/2010	3:54:44 PM	SiCl4 post valve closed
11/11/2010	3:54:44 PM	Main Vac valve closed
11/11/2010	3:54:44 PM	Bubbler valve closed
11/11/2010	3:54:44 PM	Bypass valve opened
11/11/2010	3:54:44 PM	Helium MFC set to  0.000000
11/11/2010	3:54:44 PM	H2 MFC set to  0.000000
11/11/2010	3:54:44 PM	BCl3 MFC set to  0.000000
11/11/2010	3:54:44 PM	PHl3 MFC set to  0.000000
11/11/2010	3:54:44 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:54:44 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:54:44 PM	Tube furnace set to 0
11/11/2010	3:54:44 PM	Helium valve closed
11/11/2010	3:54:44 PM	H2 valve closed
11/11/2010	3:54:44 PM	BCl3 valve closed
11/11/2010	3:54:44 PM	PH3 valve closed
11/11/2010	3:54:44 PM	SiCl4 pre valve closed
11/11/2010	3:54:44 PM	SiCl4 post valve closed
11/11/2010	3:54:44 PM	Bubbler valve closed
11/11/2010	3:54:44 PM	Main Vac valve opened
11/11/2010	3:54:44 PM	Bypass valve opened
11/11/2010	3:54:44 PM	Helium MFC set to  0.000000
11/11/2010	3:54:44 PM	H2 MFC set to  0.000000
11/11/2010	3:54:44 PM	BCl3 MFC set to  0.000000
11/11/2010	3:54:44 PM	PHl3 MFC set to  0.000000
11/11/2010	3:54:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:54:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:54:45 PM	Tube furnace set to 0
11/11/2010	3:55:45 PM	H2 valve closed
11/11/2010	3:55:45 PM	BCl3 valve closed
11/11/2010	3:55:45 PM	PH3 valve closed
11/11/2010	3:55:45 PM	SiCl4 pre valve closed
11/11/2010	3:55:45 PM	SiCl4 post valve closed
11/11/2010	3:55:45 PM	Bubbler valve closed
11/11/2010	3:55:45 PM	Helium valve opened
11/11/2010	3:55:45 PM	Main Vac valve opened
11/11/2010	3:55:45 PM	Bypass valve opened
11/11/2010	3:55:45 PM	Helium MFC set to  100.000000
11/11/2010	3:55:45 PM	H2 MFC set to  0.000000
11/11/2010	3:55:45 PM	BCl3 MFC set to  0.000000
11/11/2010	3:55:45 PM	PHl3 MFC set to  0.000000
11/11/2010	3:55:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:55:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:55:45 PM	Tube furnace set to 0
11/11/2010	3:56:45 PM	Helium valve closed
11/11/2010	3:56:45 PM	H2 valve closed
11/11/2010	3:56:45 PM	BCl3 valve closed
11/11/2010	3:56:45 PM	PH3 valve closed
11/11/2010	3:56:45 PM	SiCl4 pre valve closed
11/11/2010	3:56:45 PM	SiCl4 post valve closed
11/11/2010	3:56:45 PM	Bubbler valve closed
11/11/2010	3:56:45 PM	Main Vac valve opened
11/11/2010	3:56:45 PM	Bypass valve opened
11/11/2010	3:56:45 PM	Helium MFC set to  0.000000
11/11/2010	3:56:45 PM	H2 MFC set to  0.000000
11/11/2010	3:56:45 PM	BCl3 MFC set to  0.000000
11/11/2010	3:56:45 PM	PHl3 MFC set to  0.000000
11/11/2010	3:56:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:56:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:56:45 PM	Tube furnace set to 0
11/11/2010	3:57:45 PM	H2 valve closed
11/11/2010	3:57:45 PM	BCl3 valve closed
11/11/2010	3:57:45 PM	PH3 valve closed
11/11/2010	3:57:45 PM	SiCl4 pre valve closed
11/11/2010	3:57:45 PM	SiCl4 post valve closed
11/11/2010	3:57:45 PM	Bubbler valve closed
11/11/2010	3:57:45 PM	Helium valve opened
11/11/2010	3:57:45 PM	Main Vac valve opened
11/11/2010	3:57:45 PM	Bypass valve opened
11/11/2010	3:57:45 PM	Helium MFC set to  100.000000
11/11/2010	3:57:45 PM	H2 MFC set to  0.000000
11/11/2010	3:57:45 PM	BCl3 MFC set to  0.000000
11/11/2010	3:57:45 PM	PHl3 MFC set to  0.000000
11/11/2010	3:57:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:57:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:57:45 PM	Tube furnace set to 0
11/11/2010	3:58:45 PM	Helium valve closed
11/11/2010	3:58:45 PM	H2 valve closed
11/11/2010	3:58:45 PM	BCl3 valve closed
11/11/2010	3:58:45 PM	PH3 valve closed
11/11/2010	3:58:45 PM	SiCl4 pre valve closed
11/11/2010	3:58:45 PM	SiCl4 post valve closed
11/11/2010	3:58:45 PM	Bubbler valve closed
11/11/2010	3:58:45 PM	Main Vac valve opened
11/11/2010	3:58:45 PM	Bypass valve opened
11/11/2010	3:58:45 PM	Helium MFC set to  0.000000
11/11/2010	3:58:45 PM	H2 MFC set to  0.000000
11/11/2010	3:58:45 PM	BCl3 MFC set to  0.000000
11/11/2010	3:58:45 PM	PHl3 MFC set to  0.000000
11/11/2010	3:58:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:58:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:58:45 PM	Tube furnace set to 0
11/11/2010	3:59:45 PM	H2 valve closed
11/11/2010	3:59:45 PM	BCl3 valve closed
11/11/2010	3:59:45 PM	PH3 valve closed
11/11/2010	3:59:45 PM	SiCl4 pre valve closed
11/11/2010	3:59:45 PM	SiCl4 post valve closed
11/11/2010	3:59:45 PM	Bubbler valve closed
11/11/2010	3:59:45 PM	Helium valve opened
11/11/2010	3:59:45 PM	Main Vac valve opened
11/11/2010	3:59:45 PM	Bypass valve opened
11/11/2010	3:59:45 PM	Helium MFC set to  100.000000
11/11/2010	3:59:45 PM	H2 MFC set to  0.000000
11/11/2010	3:59:45 PM	BCl3 MFC set to  0.000000
11/11/2010	3:59:45 PM	PHl3 MFC set to  0.000000
11/11/2010	3:59:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	3:59:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	3:59:46 PM	Tube furnace set to 0
11/11/2010	4:00:46 PM	Helium valve closed
11/11/2010	4:00:46 PM	H2 valve closed
11/11/2010	4:00:46 PM	BCl3 valve closed
11/11/2010	4:00:46 PM	PH3 valve closed
11/11/2010	4:00:46 PM	SiCl4 pre valve closed
11/11/2010	4:00:46 PM	SiCl4 post valve closed
11/11/2010	4:00:46 PM	Bubbler valve closed
11/11/2010	4:00:46 PM	Main Vac valve opened
11/11/2010	4:00:46 PM	Bypass valve opened
11/11/2010	4:00:46 PM	Helium MFC set to  0.000000
11/11/2010	4:00:46 PM	H2 MFC set to  0.000000
11/11/2010	4:00:46 PM	BCl3 MFC set to  0.000000
11/11/2010	4:00:46 PM	PHl3 MFC set to  0.000000
11/11/2010	4:00:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:00:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:00:46 PM	Tube furnace set to 0
11/11/2010	4:01:46 PM	H2 valve closed
11/11/2010	4:01:46 PM	BCl3 valve closed
11/11/2010	4:01:46 PM	PH3 valve closed
11/11/2010	4:01:46 PM	SiCl4 pre valve closed
11/11/2010	4:01:46 PM	SiCl4 post valve closed
11/11/2010	4:01:46 PM	Bubbler valve closed
11/11/2010	4:01:46 PM	Helium valve opened
11/11/2010	4:01:46 PM	Main Vac valve opened
11/11/2010	4:01:46 PM	Bypass valve opened
11/11/2010	4:01:46 PM	Helium MFC set to  100.000000
11/11/2010	4:01:46 PM	H2 MFC set to  0.000000
11/11/2010	4:01:46 PM	BCl3 MFC set to  0.000000
11/11/2010	4:01:46 PM	PHl3 MFC set to  0.000000
11/11/2010	4:01:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:01:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:01:46 PM	Tube furnace set to 0
11/11/2010	4:02:46 PM	Helium valve closed
11/11/2010	4:02:46 PM	H2 valve closed
11/11/2010	4:02:46 PM	BCl3 valve closed
11/11/2010	4:02:46 PM	PH3 valve closed
11/11/2010	4:02:46 PM	SiCl4 pre valve closed
11/11/2010	4:02:46 PM	SiCl4 post valve closed
11/11/2010	4:02:46 PM	Bubbler valve closed
11/11/2010	4:02:46 PM	Main Vac valve opened
11/11/2010	4:02:46 PM	Bypass valve opened
11/11/2010	4:02:46 PM	Helium MFC set to  0.000000
11/11/2010	4:02:46 PM	H2 MFC set to  0.000000
11/11/2010	4:02:46 PM	BCl3 MFC set to  0.000000
11/11/2010	4:02:46 PM	PHl3 MFC set to  0.000000
11/11/2010	4:02:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:02:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:02:46 PM	Tube furnace set to 0
11/11/2010	4:03:46 PM	H2 valve closed
11/11/2010	4:03:46 PM	BCl3 valve closed
11/11/2010	4:03:46 PM	PH3 valve closed
11/11/2010	4:03:46 PM	SiCl4 pre valve closed
11/11/2010	4:03:46 PM	SiCl4 post valve closed
11/11/2010	4:03:46 PM	Bubbler valve closed
11/11/2010	4:03:46 PM	Helium valve opened
11/11/2010	4:03:46 PM	Main Vac valve opened
11/11/2010	4:03:46 PM	Bypass valve opened
11/11/2010	4:03:46 PM	Helium MFC set to  100.000000
11/11/2010	4:03:46 PM	H2 MFC set to  0.000000
11/11/2010	4:03:46 PM	BCl3 MFC set to  0.000000
11/11/2010	4:03:46 PM	PHl3 MFC set to  0.000000
11/11/2010	4:03:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:03:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:03:46 PM	Tube furnace set to 0
11/11/2010	4:04:46 PM	Helium valve closed
11/11/2010	4:04:46 PM	H2 valve closed
11/11/2010	4:04:46 PM	BCl3 valve closed
11/11/2010	4:04:46 PM	PH3 valve closed
11/11/2010	4:04:46 PM	SiCl4 pre valve closed
11/11/2010	4:04:46 PM	SiCl4 post valve closed
11/11/2010	4:04:46 PM	Bubbler valve closed
11/11/2010	4:04:46 PM	Main Vac valve opened
11/11/2010	4:04:46 PM	Bypass valve opened
11/11/2010	4:04:46 PM	Helium MFC set to  0.000000
11/11/2010	4:04:46 PM	H2 MFC set to  0.000000
11/11/2010	4:04:46 PM	BCl3 MFC set to  0.000000
11/11/2010	4:04:46 PM	PHl3 MFC set to  0.000000
11/11/2010	4:04:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:04:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:04:47 PM	Tube furnace set to 0
11/11/2010	4:05:47 PM	H2 valve closed
11/11/2010	4:05:47 PM	BCl3 valve closed
11/11/2010	4:05:47 PM	PH3 valve closed
11/11/2010	4:05:47 PM	SiCl4 pre valve closed
11/11/2010	4:05:47 PM	SiCl4 post valve closed
11/11/2010	4:05:47 PM	Bubbler valve closed
11/11/2010	4:05:47 PM	Helium valve opened
11/11/2010	4:05:47 PM	Main Vac valve opened
11/11/2010	4:05:47 PM	Bypass valve opened
11/11/2010	4:05:47 PM	Helium MFC set to  100.000000
11/11/2010	4:05:47 PM	H2 MFC set to  0.000000
11/11/2010	4:05:47 PM	BCl3 MFC set to  0.000000
11/11/2010	4:05:47 PM	PHl3 MFC set to  0.000000
11/11/2010	4:05:47 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:05:47 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:05:47 PM	Tube furnace set to 0
11/11/2010	4:06:47 PM	Helium valve closed
11/11/2010	4:06:47 PM	H2 valve closed
11/11/2010	4:06:47 PM	BCl3 valve closed
11/11/2010	4:06:47 PM	PH3 valve closed
11/11/2010	4:06:47 PM	SiCl4 pre valve closed
11/11/2010	4:06:47 PM	SiCl4 post valve closed
11/11/2010	4:06:47 PM	Bubbler valve closed
11/11/2010	4:06:47 PM	Main Vac valve opened
11/11/2010	4:06:47 PM	Bypass valve opened
11/11/2010	4:06:47 PM	Helium MFC set to  0.000000
11/11/2010	4:06:47 PM	H2 MFC set to  0.000000
11/11/2010	4:06:47 PM	BCl3 MFC set to  0.000000
11/11/2010	4:06:47 PM	PHl3 MFC set to  0.000000
11/11/2010	4:06:47 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:06:47 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:06:47 PM	Tube furnace set to 0
11/11/2010	4:07:47 PM	H2 valve closed
11/11/2010	4:07:47 PM	BCl3 valve closed
11/11/2010	4:07:47 PM	PH3 valve closed
11/11/2010	4:07:47 PM	SiCl4 pre valve closed
11/11/2010	4:07:47 PM	SiCl4 post valve closed
11/11/2010	4:07:47 PM	Bubbler valve closed
11/11/2010	4:07:47 PM	Helium valve opened
11/11/2010	4:07:47 PM	Main Vac valve opened
11/11/2010	4:07:47 PM	Bypass valve opened
11/11/2010	4:07:47 PM	Helium MFC set to  100.000000
11/11/2010	4:07:47 PM	H2 MFC set to  0.000000
11/11/2010	4:07:47 PM	BCl3 MFC set to  0.000000
11/11/2010	4:07:47 PM	PHl3 MFC set to  0.000000
11/11/2010	4:07:47 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:07:47 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:07:47 PM	Tube furnace set to 0
11/11/2010	4:08:47 PM	Helium valve closed
11/11/2010	4:08:47 PM	H2 valve closed
11/11/2010	4:08:47 PM	BCl3 valve closed
11/11/2010	4:08:47 PM	PH3 valve closed
11/11/2010	4:08:47 PM	SiCl4 pre valve closed
11/11/2010	4:08:47 PM	SiCl4 post valve closed
11/11/2010	4:08:47 PM	Bubbler valve closed
11/11/2010	4:08:47 PM	Main Vac valve opened
11/11/2010	4:08:47 PM	Bypass valve opened
11/11/2010	4:08:47 PM	Helium MFC set to  0.000000
11/11/2010	4:08:47 PM	H2 MFC set to  0.000000
11/11/2010	4:08:47 PM	BCl3 MFC set to  0.000000
11/11/2010	4:08:47 PM	PHl3 MFC set to  0.000000
11/11/2010	4:08:47 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:08:47 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:08:47 PM	Tube furnace set to 0
11/11/2010	4:08:57 PM	Run aborted at 4:08 PM
11/11/2010	4:08:57 PM	Helium valve closed
11/11/2010	4:08:57 PM	H2 valve closed
11/11/2010	4:08:57 PM	BCl3 valve closed
11/11/2010	4:08:57 PM	PH3 valve closed
11/11/2010	4:08:57 PM	SiCl4 pre valve closed
11/11/2010	4:08:57 PM	SiCl4 post valve closed
11/11/2010	4:08:57 PM	Bypass valve closed
11/11/2010	4:08:57 PM	Main Vac valve closed
11/11/2010	4:08:57 PM	Bubbler valve closed
11/11/2010	4:08:57 PM	Helium MFC set to  0.000000
11/11/2010	4:08:57 PM	H2 MFC set to  0.000000
11/11/2010	4:08:57 PM	BCl3 MFC set to  0.000000
11/11/2010	4:08:57 PM	PHl3 MFC set to  0.000000
11/11/2010	4:08:57 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:08:58 PM	Tube furnace set to 0
11/11/2010	4:08:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	4:09:25 PM	Bypass valve opened
11/11/2010	4:09:26 PM	Main Vac valve opened
11/11/2010	4:11:31 PM	Bypass valve closed
11/11/2010	4:11:32 PM	Main Vac valve closed
11/11/2010	4:11:51 PM	Bypass valve opened
11/11/2010	4:11:52 PM	Main Vac valve opened
11/11/2010	4:12:40 PM	Recipe started at 4:12 PM
11/11/2010	4:12:40 PM	Helium valve closed
11/11/2010	4:12:40 PM	BCl3 valve closed
11/11/2010	4:12:40 PM	PH3 valve closed
11/11/2010	4:12:40 PM	SiCl4 pre valve closed
11/11/2010	4:12:40 PM	SiCl4 post valve closed
11/11/2010	4:12:40 PM	Main Vac valve closed
11/11/2010	4:12:40 PM	Bypass valve closed
11/11/2010	4:12:40 PM	Bubbler valve closed
11/11/2010	4:12:40 PM	H2 valve opened
11/11/2010	4:12:40 PM	Helium MFC set to  0.000000
11/11/2010	4:12:40 PM	H2 MFC set to  500.000000
11/11/2010	4:12:40 PM	BCl3 MFC set to  0.000000
11/11/2010	4:12:40 PM	PHl3 MFC set to  0.000000
11/11/2010	4:12:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:12:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:12:40 PM	Tube furnace set to 0
11/11/2010	4:14:02 PM	Helium valve closed
11/11/2010	4:14:02 PM	BCl3 valve closed
11/11/2010	4:14:02 PM	PH3 valve closed
11/11/2010	4:14:02 PM	SiCl4 pre valve closed
11/11/2010	4:14:02 PM	SiCl4 post valve closed
11/11/2010	4:14:02 PM	Main Vac valve closed
11/11/2010	4:14:02 PM	Bypass valve closed
11/11/2010	4:14:02 PM	H2 valve opened
11/11/2010	4:14:02 PM	Bubbler valve opened
11/11/2010	4:14:02 PM	Helium MFC set to  0.000000
11/11/2010	4:14:02 PM	H2 MFC set to  500.000000
11/11/2010	4:14:02 PM	BCl3 MFC set to  0.000000
11/11/2010	4:14:02 PM	PHl3 MFC set to  0.000000
11/11/2010	4:14:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	4:14:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:14:02 PM	Tube furnace set to 1000
11/11/2010	4:34:02 PM	Helium valve closed
11/11/2010	4:34:02 PM	BCl3 valve closed
11/11/2010	4:34:02 PM	Main Vac valve closed
11/11/2010	4:34:02 PM	Bypass valve closed
11/11/2010	4:34:02 PM	H2 valve opened
11/11/2010	4:34:02 PM	PH3 valve opened
11/11/2010	4:34:02 PM	SiCl4 pre valve opened
11/11/2010	4:34:02 PM	SiCl4 post valve opened
11/11/2010	4:34:02 PM	Bubbler valve opened
11/11/2010	4:34:02 PM	Helium MFC set to  0.000000
11/11/2010	4:34:02 PM	H2 MFC set to  500.000000
11/11/2010	4:34:02 PM	BCl3 MFC set to  0.000000
11/11/2010	4:34:02 PM	PHl3 MFC set to  1.000000
11/11/2010	4:34:02 PM	SiCl4 MFC set to  50.000000
11/11/2010	4:34:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	4:34:02 PM	Tube furnace set to 1000
11/11/2010	5:04:02 PM	H2 valve closed
11/11/2010	5:04:02 PM	BCl3 valve closed
11/11/2010	5:04:02 PM	PH3 valve closed
11/11/2010	5:04:02 PM	SiCl4 pre valve closed
11/11/2010	5:04:02 PM	SiCl4 post valve closed
11/11/2010	5:04:02 PM	Main Vac valve closed
11/11/2010	5:04:02 PM	Bypass valve closed
11/11/2010	5:04:02 PM	Helium valve opened
11/11/2010	5:04:02 PM	Bubbler valve opened
11/11/2010	5:04:02 PM	Helium MFC set to  500.000000
11/11/2010	5:04:02 PM	H2 MFC set to  0.000000
11/11/2010	5:04:02 PM	BCl3 MFC set to  0.000000
11/11/2010	5:04:02 PM	PHl3 MFC set to  0.000000
11/11/2010	5:04:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:04:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:04:02 PM	Tube furnace set to 0
11/11/2010	5:24:02 PM	Helium valve closed
11/11/2010	5:24:02 PM	H2 valve closed
11/11/2010	5:24:02 PM	BCl3 valve closed
11/11/2010	5:24:02 PM	PH3 valve closed
11/11/2010	5:24:02 PM	SiCl4 pre valve closed
11/11/2010	5:24:02 PM	SiCl4 post valve closed
11/11/2010	5:24:02 PM	Main Vac valve closed
11/11/2010	5:24:02 PM	Bypass valve closed
11/11/2010	5:24:02 PM	Bubbler valve closed
11/11/2010	5:24:02 PM	Helium MFC set to  0.000000
11/11/2010	5:24:02 PM	H2 MFC set to  0.000000
11/11/2010	5:24:02 PM	BCl3 MFC set to  0.000000
11/11/2010	5:24:02 PM	PHl3 MFC set to  0.000000
11/11/2010	5:24:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:24:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:24:02 PM	Tube furnace set to 0
11/11/2010	5:24:03 PM	Run finished at 5:24 PM
11/11/2010	5:27:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	5:27:36 PM	Recipe started at 5:27 PM
11/11/2010	5:27:36 PM	H2 valve closed
11/11/2010	5:27:36 PM	BCl3 valve closed
11/11/2010	5:27:36 PM	PH3 valve closed
11/11/2010	5:27:36 PM	SiCl4 pre valve closed
11/11/2010	5:27:36 PM	SiCl4 post valve closed
11/11/2010	5:27:36 PM	Main Vac valve closed
11/11/2010	5:27:36 PM	Bypass valve closed
11/11/2010	5:27:36 PM	Bubbler valve closed
11/11/2010	5:27:36 PM	Helium valve opened
11/11/2010	5:27:36 PM	Helium MFC set to  500.000000
11/11/2010	5:27:36 PM	H2 MFC set to  0.000000
11/11/2010	5:27:36 PM	BCl3 MFC set to  0.000000
11/11/2010	5:27:36 PM	PHl3 MFC set to  0.000000
11/11/2010	5:27:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:27:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:27:36 PM	Tube furnace set to 0
11/11/2010	5:27:36 PM	Helium valve closed
11/11/2010	5:27:36 PM	H2 valve closed
11/11/2010	5:27:36 PM	BCl3 valve closed
11/11/2010	5:27:36 PM	PH3 valve closed
11/11/2010	5:27:36 PM	SiCl4 pre valve closed
11/11/2010	5:27:36 PM	SiCl4 post valve closed
11/11/2010	5:27:36 PM	Main Vac valve closed
11/11/2010	5:27:36 PM	Bypass valve closed
11/11/2010	5:27:36 PM	Bubbler valve closed
11/11/2010	5:27:36 PM	Helium MFC set to  0.000000
11/11/2010	5:27:36 PM	H2 MFC set to  0.000000
11/11/2010	5:27:36 PM	BCl3 MFC set to  0.000000
11/11/2010	5:27:36 PM	PHl3 MFC set to  0.000000
11/11/2010	5:27:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:27:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:27:36 PM	Tube furnace set to 0
11/11/2010	5:27:37 PM	Run finished at 5:27 PM
11/11/2010	5:27:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	5:29:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	5:29:45 PM	Recipe started at 5:29 PM
11/11/2010	5:29:45 PM	Helium valve closed
11/11/2010	5:29:45 PM	H2 valve closed
11/11/2010	5:29:45 PM	BCl3 valve closed
11/11/2010	5:29:45 PM	PH3 valve closed
11/11/2010	5:29:45 PM	SiCl4 pre valve closed
11/11/2010	5:29:45 PM	SiCl4 post valve closed
11/11/2010	5:29:45 PM	Main Vac valve closed
11/11/2010	5:29:45 PM	Bubbler valve closed
11/11/2010	5:29:45 PM	Bypass valve opened
11/11/2010	5:29:45 PM	Helium MFC set to  0.000000
11/11/2010	5:29:45 PM	H2 MFC set to  0.000000
11/11/2010	5:29:45 PM	BCl3 MFC set to  0.000000
11/11/2010	5:29:45 PM	PHl3 MFC set to  0.000000
11/11/2010	5:29:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:29:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:29:45 PM	Tube furnace set to 0
11/11/2010	5:30:35 PM	Helium valve closed
11/11/2010	5:30:35 PM	H2 valve closed
11/11/2010	5:30:35 PM	BCl3 valve closed
11/11/2010	5:30:35 PM	PH3 valve closed
11/11/2010	5:30:35 PM	SiCl4 pre valve closed
11/11/2010	5:30:35 PM	SiCl4 post valve closed
11/11/2010	5:30:35 PM	Bubbler valve closed
11/11/2010	5:30:35 PM	Main Vac valve opened
11/11/2010	5:30:35 PM	Bypass valve opened
11/11/2010	5:30:35 PM	Helium MFC set to  0.000000
11/11/2010	5:30:35 PM	H2 MFC set to  0.000000
11/11/2010	5:30:35 PM	BCl3 MFC set to  0.000000
11/11/2010	5:30:35 PM	PHl3 MFC set to  0.000000
11/11/2010	5:30:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	5:30:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	5:30:35 PM	Tube furnace set to 0
11/11/2010	5:30:36 PM	Run finished at 5:30 PM
11/11/2010	5:30:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	6:19:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	6:19:50 PM	Recipe started at 6:19 PM
11/11/2010	6:19:50 PM	H2 valve closed
11/11/2010	6:19:50 PM	BCl3 valve closed
11/11/2010	6:19:50 PM	PH3 valve closed
11/11/2010	6:19:50 PM	SiCl4 pre valve closed
11/11/2010	6:19:50 PM	SiCl4 post valve closed
11/11/2010	6:19:50 PM	Main Vac valve closed
11/11/2010	6:19:50 PM	Bypass valve closed
11/11/2010	6:19:50 PM	Bubbler valve closed
11/11/2010	6:19:50 PM	Helium valve opened
11/11/2010	6:19:50 PM	Helium MFC set to  500.000000
11/11/2010	6:19:50 PM	H2 MFC set to  0.000000
11/11/2010	6:19:50 PM	BCl3 MFC set to  0.000000
11/11/2010	6:19:50 PM	PHl3 MFC set to  0.000000
11/11/2010	6:19:50 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:19:50 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:19:50 PM	Tube furnace set to 0
11/11/2010	6:21:10 PM	Helium valve closed
11/11/2010	6:21:10 PM	H2 valve closed
11/11/2010	6:21:10 PM	BCl3 valve closed
11/11/2010	6:21:10 PM	PH3 valve closed
11/11/2010	6:21:10 PM	SiCl4 pre valve closed
11/11/2010	6:21:10 PM	SiCl4 post valve closed
11/11/2010	6:21:10 PM	Main Vac valve closed
11/11/2010	6:21:10 PM	Bypass valve closed
11/11/2010	6:21:10 PM	Bubbler valve closed
11/11/2010	6:21:10 PM	Helium MFC set to  0.000000
11/11/2010	6:21:10 PM	H2 MFC set to  0.000000
11/11/2010	6:21:10 PM	BCl3 MFC set to  0.000000
11/11/2010	6:21:10 PM	PHl3 MFC set to  0.000000
11/11/2010	6:21:10 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:21:10 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:21:10 PM	Tube furnace set to 0
11/11/2010	6:21:10 PM	Run finished at 6:21 PM
11/11/2010	6:21:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	6:54:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	6:54:52 PM	Recipe started at 6:54 PM
11/11/2010	6:54:52 PM	Helium valve closed
11/11/2010	6:54:52 PM	H2 valve closed
11/11/2010	6:54:52 PM	BCl3 valve closed
11/11/2010	6:54:52 PM	PH3 valve closed
11/11/2010	6:54:52 PM	SiCl4 pre valve closed
11/11/2010	6:54:52 PM	SiCl4 post valve closed
11/11/2010	6:54:52 PM	Main Vac valve closed
11/11/2010	6:54:52 PM	Bubbler valve closed
11/11/2010	6:54:52 PM	Bypass valve opened
11/11/2010	6:54:52 PM	Helium MFC set to  0.000000
11/11/2010	6:54:52 PM	H2 MFC set to  0.000000
11/11/2010	6:54:52 PM	BCl3 MFC set to  0.000000
11/11/2010	6:54:52 PM	PHl3 MFC set to  0.000000
11/11/2010	6:54:52 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:54:52 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:54:53 PM	Tube furnace set to 0
11/11/2010	6:55:46 PM	Helium valve closed
11/11/2010	6:55:46 PM	H2 valve closed
11/11/2010	6:55:46 PM	BCl3 valve closed
11/11/2010	6:55:46 PM	PH3 valve closed
11/11/2010	6:55:46 PM	SiCl4 pre valve closed
11/11/2010	6:55:46 PM	SiCl4 post valve closed
11/11/2010	6:55:46 PM	Bubbler valve closed
11/11/2010	6:55:46 PM	Main Vac valve opened
11/11/2010	6:55:46 PM	Bypass valve opened
11/11/2010	6:55:46 PM	Helium MFC set to  0.000000
11/11/2010	6:55:46 PM	H2 MFC set to  0.000000
11/11/2010	6:55:46 PM	BCl3 MFC set to  0.000000
11/11/2010	6:55:46 PM	PHl3 MFC set to  0.000000
11/11/2010	6:55:46 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:55:46 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:55:47 PM	Tube furnace set to 0
11/11/2010	6:55:47 PM	Run finished at 6:55 PM
11/11/2010	6:55:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	6:57:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	6:57:12 PM	Recipe started at 6:57 PM
11/11/2010	6:57:12 PM	Helium valve closed
11/11/2010	6:57:12 PM	H2 valve closed
11/11/2010	6:57:12 PM	BCl3 valve closed
11/11/2010	6:57:12 PM	PH3 valve closed
11/11/2010	6:57:12 PM	SiCl4 pre valve closed
11/11/2010	6:57:12 PM	SiCl4 post valve closed
11/11/2010	6:57:12 PM	Main Vac valve closed
11/11/2010	6:57:12 PM	Bubbler valve closed
11/11/2010	6:57:12 PM	Bypass valve opened
11/11/2010	6:57:12 PM	Helium MFC set to  0.000000
11/11/2010	6:57:12 PM	H2 MFC set to  0.000000
11/11/2010	6:57:12 PM	BCl3 MFC set to  0.000000
11/11/2010	6:57:12 PM	PHl3 MFC set to  0.000000
11/11/2010	6:57:12 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:57:12 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:57:12 PM	Tube furnace set to 0
11/11/2010	6:57:12 PM	Helium valve closed
11/11/2010	6:57:12 PM	H2 valve closed
11/11/2010	6:57:12 PM	BCl3 valve closed
11/11/2010	6:57:12 PM	PH3 valve closed
11/11/2010	6:57:12 PM	SiCl4 pre valve closed
11/11/2010	6:57:12 PM	SiCl4 post valve closed
11/11/2010	6:57:12 PM	Bubbler valve closed
11/11/2010	6:57:12 PM	Main Vac valve opened
11/11/2010	6:57:12 PM	Bypass valve opened
11/11/2010	6:57:12 PM	Helium MFC set to  0.000000
11/11/2010	6:57:12 PM	H2 MFC set to  0.000000
11/11/2010	6:57:12 PM	BCl3 MFC set to  0.000000
11/11/2010	6:57:12 PM	PHl3 MFC set to  0.000000
11/11/2010	6:57:13 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:57:13 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:57:13 PM	Tube furnace set to 0
11/11/2010	6:57:13 PM	Run finished at 6:57 PM
11/11/2010	6:57:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	6:57:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	6:57:28 PM	Recipe started at 6:57 PM
11/11/2010	6:57:28 PM	Helium valve closed
11/11/2010	6:57:28 PM	H2 valve closed
11/11/2010	6:57:28 PM	BCl3 valve closed
11/11/2010	6:57:28 PM	PH3 valve closed
11/11/2010	6:57:28 PM	SiCl4 pre valve closed
11/11/2010	6:57:28 PM	SiCl4 post valve closed
11/11/2010	6:57:28 PM	Main Vac valve closed
11/11/2010	6:57:28 PM	Bubbler valve closed
11/11/2010	6:57:28 PM	Bypass valve opened
11/11/2010	6:57:28 PM	Helium MFC set to  0.000000
11/11/2010	6:57:28 PM	H2 MFC set to  0.000000
11/11/2010	6:57:28 PM	BCl3 MFC set to  0.000000
11/11/2010	6:57:28 PM	PHl3 MFC set to  0.000000
11/11/2010	6:57:28 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:57:28 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:57:28 PM	Tube furnace set to 0
11/11/2010	6:57:29 PM	Helium valve closed
11/11/2010	6:57:29 PM	H2 valve closed
11/11/2010	6:57:29 PM	BCl3 valve closed
11/11/2010	6:57:29 PM	PH3 valve closed
11/11/2010	6:57:29 PM	SiCl4 pre valve closed
11/11/2010	6:57:29 PM	SiCl4 post valve closed
11/11/2010	6:57:29 PM	Bubbler valve closed
11/11/2010	6:57:29 PM	Main Vac valve opened
11/11/2010	6:57:29 PM	Bypass valve opened
11/11/2010	6:57:29 PM	Helium MFC set to  0.000000
11/11/2010	6:57:29 PM	H2 MFC set to  0.000000
11/11/2010	6:57:29 PM	BCl3 MFC set to  0.000000
11/11/2010	6:57:29 PM	PHl3 MFC set to  0.000000
11/11/2010	6:57:29 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:57:29 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:57:29 PM	Tube furnace set to 0
11/11/2010	6:58:29 PM	H2 valve closed
11/11/2010	6:58:29 PM	BCl3 valve closed
11/11/2010	6:58:29 PM	PH3 valve closed
11/11/2010	6:58:29 PM	SiCl4 pre valve closed
11/11/2010	6:58:29 PM	SiCl4 post valve closed
11/11/2010	6:58:29 PM	Bubbler valve closed
11/11/2010	6:58:29 PM	Helium valve opened
11/11/2010	6:58:29 PM	Main Vac valve opened
11/11/2010	6:58:29 PM	Bypass valve opened
11/11/2010	6:58:29 PM	Helium MFC set to  100.000000
11/11/2010	6:58:29 PM	H2 MFC set to  0.000000
11/11/2010	6:58:29 PM	BCl3 MFC set to  0.000000
11/11/2010	6:58:29 PM	PHl3 MFC set to  0.000000
11/11/2010	6:58:29 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:58:29 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:58:29 PM	Tube furnace set to 0
11/11/2010	6:59:29 PM	Helium valve closed
11/11/2010	6:59:29 PM	H2 valve closed
11/11/2010	6:59:29 PM	BCl3 valve closed
11/11/2010	6:59:29 PM	PH3 valve closed
11/11/2010	6:59:29 PM	SiCl4 pre valve closed
11/11/2010	6:59:29 PM	SiCl4 post valve closed
11/11/2010	6:59:29 PM	Bubbler valve closed
11/11/2010	6:59:29 PM	Main Vac valve opened
11/11/2010	6:59:29 PM	Bypass valve opened
11/11/2010	6:59:29 PM	Helium MFC set to  0.000000
11/11/2010	6:59:29 PM	H2 MFC set to  0.000000
11/11/2010	6:59:29 PM	BCl3 MFC set to  0.000000
11/11/2010	6:59:29 PM	PHl3 MFC set to  0.000000
11/11/2010	6:59:29 PM	SiCl4 MFC set to  0.000000
11/11/2010	6:59:29 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	6:59:29 PM	Tube furnace set to 0
11/11/2010	7:00:29 PM	H2 valve closed
11/11/2010	7:00:29 PM	BCl3 valve closed
11/11/2010	7:00:29 PM	PH3 valve closed
11/11/2010	7:00:29 PM	SiCl4 pre valve closed
11/11/2010	7:00:29 PM	SiCl4 post valve closed
11/11/2010	7:00:29 PM	Bubbler valve closed
11/11/2010	7:00:29 PM	Helium valve opened
11/11/2010	7:00:29 PM	Main Vac valve opened
11/11/2010	7:00:29 PM	Bypass valve opened
11/11/2010	7:00:29 PM	Helium MFC set to  100.000000
11/11/2010	7:00:29 PM	H2 MFC set to  0.000000
11/11/2010	7:00:29 PM	BCl3 MFC set to  0.000000
11/11/2010	7:00:29 PM	PHl3 MFC set to  0.000000
11/11/2010	7:00:29 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:00:29 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:00:29 PM	Tube furnace set to 0
11/11/2010	7:01:29 PM	Helium valve closed
11/11/2010	7:01:29 PM	H2 valve closed
11/11/2010	7:01:29 PM	BCl3 valve closed
11/11/2010	7:01:30 PM	PH3 valve closed
11/11/2010	7:01:30 PM	SiCl4 pre valve closed
11/11/2010	7:01:30 PM	SiCl4 post valve closed
11/11/2010	7:01:30 PM	Bubbler valve closed
11/11/2010	7:01:30 PM	Main Vac valve opened
11/11/2010	7:01:30 PM	Bypass valve opened
11/11/2010	7:01:30 PM	Helium MFC set to  0.000000
11/11/2010	7:01:30 PM	H2 MFC set to  0.000000
11/11/2010	7:01:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:01:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:01:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:01:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:01:30 PM	Tube furnace set to 0
11/11/2010	7:02:30 PM	H2 valve closed
11/11/2010	7:02:30 PM	BCl3 valve closed
11/11/2010	7:02:30 PM	PH3 valve closed
11/11/2010	7:02:30 PM	SiCl4 pre valve closed
11/11/2010	7:02:30 PM	SiCl4 post valve closed
11/11/2010	7:02:30 PM	Bubbler valve closed
11/11/2010	7:02:30 PM	Helium valve opened
11/11/2010	7:02:30 PM	Main Vac valve opened
11/11/2010	7:02:30 PM	Bypass valve opened
11/11/2010	7:02:30 PM	Helium MFC set to  100.000000
11/11/2010	7:02:30 PM	H2 MFC set to  0.000000
11/11/2010	7:02:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:02:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:02:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:02:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:02:30 PM	Tube furnace set to 0
11/11/2010	7:03:30 PM	Helium valve closed
11/11/2010	7:03:30 PM	H2 valve closed
11/11/2010	7:03:30 PM	BCl3 valve closed
11/11/2010	7:03:30 PM	PH3 valve closed
11/11/2010	7:03:30 PM	SiCl4 pre valve closed
11/11/2010	7:03:30 PM	SiCl4 post valve closed
11/11/2010	7:03:30 PM	Bubbler valve closed
11/11/2010	7:03:30 PM	Main Vac valve opened
11/11/2010	7:03:30 PM	Bypass valve opened
11/11/2010	7:03:30 PM	Helium MFC set to  0.000000
11/11/2010	7:03:30 PM	H2 MFC set to  0.000000
11/11/2010	7:03:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:03:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:03:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:03:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:03:30 PM	Tube furnace set to 0
11/11/2010	7:04:30 PM	H2 valve closed
11/11/2010	7:04:30 PM	BCl3 valve closed
11/11/2010	7:04:30 PM	PH3 valve closed
11/11/2010	7:04:30 PM	SiCl4 pre valve closed
11/11/2010	7:04:30 PM	SiCl4 post valve closed
11/11/2010	7:04:30 PM	Bubbler valve closed
11/11/2010	7:04:30 PM	Helium valve opened
11/11/2010	7:04:30 PM	Main Vac valve opened
11/11/2010	7:04:30 PM	Bypass valve opened
11/11/2010	7:04:30 PM	Helium MFC set to  100.000000
11/11/2010	7:04:30 PM	H2 MFC set to  0.000000
11/11/2010	7:04:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:04:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:04:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:04:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:04:30 PM	Tube furnace set to 0
11/11/2010	7:05:30 PM	Helium valve closed
11/11/2010	7:05:30 PM	H2 valve closed
11/11/2010	7:05:30 PM	BCl3 valve closed
11/11/2010	7:05:30 PM	PH3 valve closed
11/11/2010	7:05:30 PM	SiCl4 pre valve closed
11/11/2010	7:05:30 PM	SiCl4 post valve closed
11/11/2010	7:05:30 PM	Bubbler valve closed
11/11/2010	7:05:30 PM	Main Vac valve opened
11/11/2010	7:05:30 PM	Bypass valve opened
11/11/2010	7:05:30 PM	Helium MFC set to  0.000000
11/11/2010	7:05:30 PM	H2 MFC set to  0.000000
11/11/2010	7:05:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:05:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:05:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:05:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:05:30 PM	Tube furnace set to 0
11/11/2010	7:06:30 PM	H2 valve closed
11/11/2010	7:06:30 PM	BCl3 valve closed
11/11/2010	7:06:30 PM	PH3 valve closed
11/11/2010	7:06:30 PM	SiCl4 pre valve closed
11/11/2010	7:06:30 PM	SiCl4 post valve closed
11/11/2010	7:06:30 PM	Bubbler valve closed
11/11/2010	7:06:30 PM	Helium valve opened
11/11/2010	7:06:30 PM	Main Vac valve opened
11/11/2010	7:06:30 PM	Bypass valve opened
11/11/2010	7:06:30 PM	Helium MFC set to  100.000000
11/11/2010	7:06:30 PM	H2 MFC set to  0.000000
11/11/2010	7:06:30 PM	BCl3 MFC set to  0.000000
11/11/2010	7:06:30 PM	PHl3 MFC set to  0.000000
11/11/2010	7:06:30 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:06:30 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:06:31 PM	Tube furnace set to 0
11/11/2010	7:07:31 PM	Helium valve closed
11/11/2010	7:07:31 PM	H2 valve closed
11/11/2010	7:07:31 PM	BCl3 valve closed
11/11/2010	7:07:31 PM	PH3 valve closed
11/11/2010	7:07:31 PM	SiCl4 pre valve closed
11/11/2010	7:07:31 PM	SiCl4 post valve closed
11/11/2010	7:07:31 PM	Bubbler valve closed
11/11/2010	7:07:31 PM	Main Vac valve opened
11/11/2010	7:07:31 PM	Bypass valve opened
11/11/2010	7:07:31 PM	Helium MFC set to  0.000000
11/11/2010	7:07:31 PM	H2 MFC set to  0.000000
11/11/2010	7:07:31 PM	BCl3 MFC set to  0.000000
11/11/2010	7:07:31 PM	PHl3 MFC set to  0.000000
11/11/2010	7:07:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:07:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:07:31 PM	Tube furnace set to 0
11/11/2010	7:08:31 PM	H2 valve closed
11/11/2010	7:08:31 PM	BCl3 valve closed
11/11/2010	7:08:31 PM	PH3 valve closed
11/11/2010	7:08:31 PM	SiCl4 pre valve closed
11/11/2010	7:08:31 PM	SiCl4 post valve closed
11/11/2010	7:08:31 PM	Bubbler valve closed
11/11/2010	7:08:31 PM	Helium valve opened
11/11/2010	7:08:31 PM	Main Vac valve opened
11/11/2010	7:08:31 PM	Bypass valve opened
11/11/2010	7:08:31 PM	Helium MFC set to  100.000000
11/11/2010	7:08:31 PM	H2 MFC set to  0.000000
11/11/2010	7:08:31 PM	BCl3 MFC set to  0.000000
11/11/2010	7:08:31 PM	PHl3 MFC set to  0.000000
11/11/2010	7:08:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:08:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:08:31 PM	Tube furnace set to 0
11/11/2010	7:09:31 PM	Helium valve closed
11/11/2010	7:09:31 PM	H2 valve closed
11/11/2010	7:09:31 PM	BCl3 valve closed
11/11/2010	7:09:31 PM	PH3 valve closed
11/11/2010	7:09:31 PM	SiCl4 pre valve closed
11/11/2010	7:09:31 PM	SiCl4 post valve closed
11/11/2010	7:09:31 PM	Bubbler valve closed
11/11/2010	7:09:31 PM	Main Vac valve opened
11/11/2010	7:09:31 PM	Bypass valve opened
11/11/2010	7:09:31 PM	Helium MFC set to  0.000000
11/11/2010	7:09:31 PM	H2 MFC set to  0.000000
11/11/2010	7:09:31 PM	BCl3 MFC set to  0.000000
11/11/2010	7:09:31 PM	PHl3 MFC set to  0.000000
11/11/2010	7:09:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:09:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:09:31 PM	Tube furnace set to 0
11/11/2010	7:10:31 PM	H2 valve closed
11/11/2010	7:10:31 PM	BCl3 valve closed
11/11/2010	7:10:31 PM	PH3 valve closed
11/11/2010	7:10:31 PM	SiCl4 pre valve closed
11/11/2010	7:10:31 PM	SiCl4 post valve closed
11/11/2010	7:10:31 PM	Bubbler valve closed
11/11/2010	7:10:31 PM	Helium valve opened
11/11/2010	7:10:31 PM	Main Vac valve opened
11/11/2010	7:10:31 PM	Bypass valve opened
11/11/2010	7:10:31 PM	Helium MFC set to  100.000000
11/11/2010	7:10:31 PM	H2 MFC set to  0.000000
11/11/2010	7:10:31 PM	BCl3 MFC set to  0.000000
11/11/2010	7:10:31 PM	PHl3 MFC set to  0.000000
11/11/2010	7:10:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:10:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:10:31 PM	Tube furnace set to 0
11/11/2010	7:11:31 PM	Helium valve closed
11/11/2010	7:11:31 PM	H2 valve closed
11/11/2010	7:11:31 PM	BCl3 valve closed
11/11/2010	7:11:31 PM	PH3 valve closed
11/11/2010	7:11:31 PM	SiCl4 pre valve closed
11/11/2010	7:11:31 PM	SiCl4 post valve closed
11/11/2010	7:11:31 PM	Bubbler valve closed
11/11/2010	7:11:31 PM	Main Vac valve opened
11/11/2010	7:11:31 PM	Bypass valve opened
11/11/2010	7:11:31 PM	Helium MFC set to  0.000000
11/11/2010	7:11:31 PM	H2 MFC set to  0.000000
11/11/2010	7:11:31 PM	BCl3 MFC set to  0.000000
11/11/2010	7:11:31 PM	PHl3 MFC set to  0.000000
11/11/2010	7:11:31 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:11:31 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:11:32 PM	Tube furnace set to 0
11/11/2010	7:12:32 PM	H2 valve closed
11/11/2010	7:12:32 PM	BCl3 valve closed
11/11/2010	7:12:32 PM	PH3 valve closed
11/11/2010	7:12:32 PM	SiCl4 pre valve closed
11/11/2010	7:12:32 PM	SiCl4 post valve closed
11/11/2010	7:12:32 PM	Bubbler valve closed
11/11/2010	7:12:32 PM	Helium valve opened
11/11/2010	7:12:32 PM	Main Vac valve opened
11/11/2010	7:12:32 PM	Bypass valve opened
11/11/2010	7:12:32 PM	Helium MFC set to  100.000000
11/11/2010	7:12:32 PM	H2 MFC set to  0.000000
11/11/2010	7:12:32 PM	BCl3 MFC set to  0.000000
11/11/2010	7:12:32 PM	PHl3 MFC set to  0.000000
11/11/2010	7:12:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:12:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:12:32 PM	Tube furnace set to 0
11/11/2010	7:13:32 PM	Helium valve closed
11/11/2010	7:13:32 PM	H2 valve closed
11/11/2010	7:13:32 PM	BCl3 valve closed
11/11/2010	7:13:32 PM	PH3 valve closed
11/11/2010	7:13:32 PM	SiCl4 pre valve closed
11/11/2010	7:13:32 PM	SiCl4 post valve closed
11/11/2010	7:13:32 PM	Bubbler valve closed
11/11/2010	7:13:32 PM	Main Vac valve opened
11/11/2010	7:13:32 PM	Bypass valve opened
11/11/2010	7:13:32 PM	Helium MFC set to  0.000000
11/11/2010	7:13:32 PM	H2 MFC set to  0.000000
11/11/2010	7:13:32 PM	BCl3 MFC set to  0.000000
11/11/2010	7:13:32 PM	PHl3 MFC set to  0.000000
11/11/2010	7:13:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:13:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:13:32 PM	Tube furnace set to 0
11/11/2010	7:14:32 PM	H2 valve closed
11/11/2010	7:14:32 PM	BCl3 valve closed
11/11/2010	7:14:32 PM	PH3 valve closed
11/11/2010	7:14:32 PM	SiCl4 pre valve closed
11/11/2010	7:14:32 PM	SiCl4 post valve closed
11/11/2010	7:14:32 PM	Bubbler valve closed
11/11/2010	7:14:32 PM	Helium valve opened
11/11/2010	7:14:32 PM	Main Vac valve opened
11/11/2010	7:14:32 PM	Bypass valve opened
11/11/2010	7:14:32 PM	Helium MFC set to  100.000000
11/11/2010	7:14:32 PM	H2 MFC set to  0.000000
11/11/2010	7:14:32 PM	BCl3 MFC set to  0.000000
11/11/2010	7:14:32 PM	PHl3 MFC set to  0.000000
11/11/2010	7:14:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:14:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:14:32 PM	Tube furnace set to 0
11/11/2010	7:15:32 PM	Helium valve closed
11/11/2010	7:15:32 PM	H2 valve closed
11/11/2010	7:15:32 PM	BCl3 valve closed
11/11/2010	7:15:32 PM	PH3 valve closed
11/11/2010	7:15:32 PM	SiCl4 pre valve closed
11/11/2010	7:15:32 PM	SiCl4 post valve closed
11/11/2010	7:15:32 PM	Bubbler valve closed
11/11/2010	7:15:32 PM	Main Vac valve opened
11/11/2010	7:15:32 PM	Bypass valve opened
11/11/2010	7:15:32 PM	Helium MFC set to  0.000000
11/11/2010	7:15:32 PM	H2 MFC set to  0.000000
11/11/2010	7:15:32 PM	BCl3 MFC set to  0.000000
11/11/2010	7:15:32 PM	PHl3 MFC set to  0.000000
11/11/2010	7:15:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:15:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:15:32 PM	Tube furnace set to 0
11/11/2010	7:16:32 PM	H2 valve closed
11/11/2010	7:16:32 PM	BCl3 valve closed
11/11/2010	7:16:32 PM	PH3 valve closed
11/11/2010	7:16:32 PM	SiCl4 pre valve closed
11/11/2010	7:16:32 PM	SiCl4 post valve closed
11/11/2010	7:16:32 PM	Bubbler valve closed
11/11/2010	7:16:32 PM	Helium valve opened
11/11/2010	7:16:32 PM	Main Vac valve opened
11/11/2010	7:16:32 PM	Bypass valve opened
11/11/2010	7:16:32 PM	Helium MFC set to  100.000000
11/11/2010	7:16:32 PM	H2 MFC set to  0.000000
11/11/2010	7:16:32 PM	BCl3 MFC set to  0.000000
11/11/2010	7:16:32 PM	PHl3 MFC set to  0.000000
11/11/2010	7:16:32 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:16:32 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:16:33 PM	Tube furnace set to 0
11/11/2010	7:17:33 PM	Helium valve closed
11/11/2010	7:17:33 PM	H2 valve closed
11/11/2010	7:17:33 PM	BCl3 valve closed
11/11/2010	7:17:33 PM	PH3 valve closed
11/11/2010	7:17:33 PM	SiCl4 pre valve closed
11/11/2010	7:17:33 PM	SiCl4 post valve closed
11/11/2010	7:17:33 PM	Bubbler valve closed
11/11/2010	7:17:33 PM	Main Vac valve opened
11/11/2010	7:17:33 PM	Bypass valve opened
11/11/2010	7:17:33 PM	Helium MFC set to  0.000000
11/11/2010	7:17:33 PM	H2 MFC set to  0.000000
11/11/2010	7:17:33 PM	BCl3 MFC set to  0.000000
11/11/2010	7:17:33 PM	PHl3 MFC set to  0.000000
11/11/2010	7:17:33 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:17:33 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:17:33 PM	Tube furnace set to 0
11/11/2010	7:17:34 PM	Run finished at 7:17 PM
11/11/2010	7:17:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	7:20:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	7:20:59 PM	Recipe started at 7:20 PM
11/11/2010	7:20:59 PM	Helium valve closed
11/11/2010	7:20:59 PM	H2 valve closed
11/11/2010	7:20:59 PM	BCl3 valve closed
11/11/2010	7:20:59 PM	PH3 valve closed
11/11/2010	7:20:59 PM	SiCl4 pre valve closed
11/11/2010	7:20:59 PM	SiCl4 post valve closed
11/11/2010	7:20:59 PM	Main Vac valve closed
11/11/2010	7:20:59 PM	Bubbler valve closed
11/11/2010	7:20:59 PM	Bypass valve opened
11/11/2010	7:20:59 PM	Helium MFC set to  0.000000
11/11/2010	7:20:59 PM	H2 MFC set to  0.000000
11/11/2010	7:20:59 PM	BCl3 MFC set to  0.000000
11/11/2010	7:20:59 PM	PHl3 MFC set to  0.000000
11/11/2010	7:20:59 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:20:59 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:20:59 PM	Tube furnace set to 0
11/11/2010	7:20:59 PM	Helium valve closed
11/11/2010	7:20:59 PM	H2 valve closed
11/11/2010	7:20:59 PM	BCl3 valve closed
11/11/2010	7:20:59 PM	PH3 valve closed
11/11/2010	7:20:59 PM	SiCl4 pre valve closed
11/11/2010	7:20:59 PM	SiCl4 post valve closed
11/11/2010	7:20:59 PM	Bubbler valve closed
11/11/2010	7:20:59 PM	Main Vac valve opened
11/11/2010	7:20:59 PM	Bypass valve opened
11/11/2010	7:20:59 PM	Helium MFC set to  0.000000
11/11/2010	7:20:59 PM	H2 MFC set to  0.000000
11/11/2010	7:20:59 PM	BCl3 MFC set to  0.000000
11/11/2010	7:20:59 PM	PHl3 MFC set to  0.000000
11/11/2010	7:20:59 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:20:59 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:20:59 PM	Tube furnace set to 0
11/11/2010	7:21:59 PM	H2 valve closed
11/11/2010	7:21:59 PM	BCl3 valve closed
11/11/2010	7:21:59 PM	PH3 valve closed
11/11/2010	7:21:59 PM	SiCl4 pre valve closed
11/11/2010	7:21:59 PM	SiCl4 post valve closed
11/11/2010	7:21:59 PM	Bubbler valve closed
11/11/2010	7:21:59 PM	Helium valve opened
11/11/2010	7:21:59 PM	Main Vac valve opened
11/11/2010	7:21:59 PM	Bypass valve opened
11/11/2010	7:21:59 PM	Helium MFC set to  100.000000
11/11/2010	7:21:59 PM	H2 MFC set to  0.000000
11/11/2010	7:21:59 PM	BCl3 MFC set to  0.000000
11/11/2010	7:21:59 PM	PHl3 MFC set to  0.000000
11/11/2010	7:21:59 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:21:59 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:21:59 PM	Tube furnace set to 0
11/11/2010	7:22:59 PM	Helium valve closed
11/11/2010	7:22:59 PM	H2 valve closed
11/11/2010	7:22:59 PM	BCl3 valve closed
11/11/2010	7:22:59 PM	PH3 valve closed
11/11/2010	7:22:59 PM	SiCl4 pre valve closed
11/11/2010	7:22:59 PM	SiCl4 post valve closed
11/11/2010	7:22:59 PM	Bubbler valve closed
11/11/2010	7:22:59 PM	Main Vac valve opened
11/11/2010	7:22:59 PM	Bypass valve opened
11/11/2010	7:22:59 PM	Helium MFC set to  0.000000
11/11/2010	7:22:59 PM	H2 MFC set to  0.000000
11/11/2010	7:22:59 PM	BCl3 MFC set to  0.000000
11/11/2010	7:22:59 PM	PHl3 MFC set to  0.000000
11/11/2010	7:22:59 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:22:59 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:23:00 PM	Tube furnace set to 0
11/11/2010	7:24:00 PM	H2 valve closed
11/11/2010	7:24:00 PM	BCl3 valve closed
11/11/2010	7:24:00 PM	PH3 valve closed
11/11/2010	7:24:00 PM	SiCl4 pre valve closed
11/11/2010	7:24:00 PM	SiCl4 post valve closed
11/11/2010	7:24:00 PM	Bubbler valve closed
11/11/2010	7:24:00 PM	Helium valve opened
11/11/2010	7:24:00 PM	Main Vac valve opened
11/11/2010	7:24:00 PM	Bypass valve opened
11/11/2010	7:24:00 PM	Helium MFC set to  100.000000
11/11/2010	7:24:00 PM	H2 MFC set to  0.000000
11/11/2010	7:24:00 PM	BCl3 MFC set to  0.000000
11/11/2010	7:24:00 PM	PHl3 MFC set to  0.000000
11/11/2010	7:24:00 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:24:00 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:24:00 PM	Tube furnace set to 0
11/11/2010	7:25:00 PM	Helium valve closed
11/11/2010	7:25:00 PM	H2 valve closed
11/11/2010	7:25:00 PM	BCl3 valve closed
11/11/2010	7:25:00 PM	PH3 valve closed
11/11/2010	7:25:00 PM	SiCl4 pre valve closed
11/11/2010	7:25:00 PM	SiCl4 post valve closed
11/11/2010	7:25:00 PM	Bubbler valve closed
11/11/2010	7:25:00 PM	Main Vac valve opened
11/11/2010	7:25:00 PM	Bypass valve opened
11/11/2010	7:25:00 PM	Helium MFC set to  0.000000
11/11/2010	7:25:00 PM	H2 MFC set to  0.000000
11/11/2010	7:25:00 PM	BCl3 MFC set to  0.000000
11/11/2010	7:25:00 PM	PHl3 MFC set to  0.000000
11/11/2010	7:25:00 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:25:00 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:25:00 PM	Tube furnace set to 0
11/11/2010	7:26:00 PM	H2 valve closed
11/11/2010	7:26:00 PM	BCl3 valve closed
11/11/2010	7:26:00 PM	PH3 valve closed
11/11/2010	7:26:00 PM	SiCl4 pre valve closed
11/11/2010	7:26:00 PM	SiCl4 post valve closed
11/11/2010	7:26:00 PM	Bubbler valve closed
11/11/2010	7:26:00 PM	Helium valve opened
11/11/2010	7:26:00 PM	Main Vac valve opened
11/11/2010	7:26:00 PM	Bypass valve opened
11/11/2010	7:26:00 PM	Helium MFC set to  100.000000
11/11/2010	7:26:00 PM	H2 MFC set to  0.000000
11/11/2010	7:26:00 PM	BCl3 MFC set to  0.000000
11/11/2010	7:26:00 PM	PHl3 MFC set to  0.000000
11/11/2010	7:26:00 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:26:00 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:26:00 PM	Tube furnace set to 0
11/11/2010	7:27:00 PM	Helium valve closed
11/11/2010	7:27:00 PM	H2 valve closed
11/11/2010	7:27:00 PM	BCl3 valve closed
11/11/2010	7:27:00 PM	PH3 valve closed
11/11/2010	7:27:00 PM	SiCl4 pre valve closed
11/11/2010	7:27:00 PM	SiCl4 post valve closed
11/11/2010	7:27:00 PM	Bubbler valve closed
11/11/2010	7:27:00 PM	Main Vac valve opened
11/11/2010	7:27:00 PM	Bypass valve opened
11/11/2010	7:27:00 PM	Helium MFC set to  0.000000
11/11/2010	7:27:00 PM	H2 MFC set to  0.000000
11/11/2010	7:27:00 PM	BCl3 MFC set to  0.000000
11/11/2010	7:27:00 PM	PHl3 MFC set to  0.000000
11/11/2010	7:27:00 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:27:00 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:27:00 PM	Tube furnace set to 0
11/11/2010	7:28:00 PM	H2 valve closed
11/11/2010	7:28:00 PM	BCl3 valve closed
11/11/2010	7:28:00 PM	PH3 valve closed
11/11/2010	7:28:00 PM	SiCl4 pre valve closed
11/11/2010	7:28:00 PM	SiCl4 post valve closed
11/11/2010	7:28:00 PM	Bubbler valve closed
11/11/2010	7:28:00 PM	Helium valve opened
11/11/2010	7:28:00 PM	Main Vac valve opened
11/11/2010	7:28:00 PM	Bypass valve opened
11/11/2010	7:28:00 PM	Helium MFC set to  100.000000
11/11/2010	7:28:00 PM	H2 MFC set to  0.000000
11/11/2010	7:28:00 PM	BCl3 MFC set to  0.000000
11/11/2010	7:28:00 PM	PHl3 MFC set to  0.000000
11/11/2010	7:28:00 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:28:00 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:28:01 PM	Tube furnace set to 0
11/11/2010	7:29:01 PM	Helium valve closed
11/11/2010	7:29:01 PM	H2 valve closed
11/11/2010	7:29:01 PM	BCl3 valve closed
11/11/2010	7:29:01 PM	PH3 valve closed
11/11/2010	7:29:01 PM	SiCl4 pre valve closed
11/11/2010	7:29:01 PM	SiCl4 post valve closed
11/11/2010	7:29:01 PM	Bubbler valve closed
11/11/2010	7:29:01 PM	Main Vac valve opened
11/11/2010	7:29:01 PM	Bypass valve opened
11/11/2010	7:29:01 PM	Helium MFC set to  0.000000
11/11/2010	7:29:01 PM	H2 MFC set to  0.000000
11/11/2010	7:29:01 PM	BCl3 MFC set to  0.000000
11/11/2010	7:29:01 PM	PHl3 MFC set to  0.000000
11/11/2010	7:29:01 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:29:01 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:29:01 PM	Tube furnace set to 0
11/11/2010	7:30:01 PM	H2 valve closed
11/11/2010	7:30:01 PM	BCl3 valve closed
11/11/2010	7:30:01 PM	PH3 valve closed
11/11/2010	7:30:01 PM	SiCl4 pre valve closed
11/11/2010	7:30:01 PM	SiCl4 post valve closed
11/11/2010	7:30:01 PM	Bubbler valve closed
11/11/2010	7:30:01 PM	Helium valve opened
11/11/2010	7:30:01 PM	Main Vac valve opened
11/11/2010	7:30:01 PM	Bypass valve opened
11/11/2010	7:30:01 PM	Helium MFC set to  100.000000
11/11/2010	7:30:01 PM	H2 MFC set to  0.000000
11/11/2010	7:30:01 PM	BCl3 MFC set to  0.000000
11/11/2010	7:30:01 PM	PHl3 MFC set to  0.000000
11/11/2010	7:30:01 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:30:01 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:30:01 PM	Tube furnace set to 0
11/11/2010	7:31:01 PM	Helium valve closed
11/11/2010	7:31:01 PM	H2 valve closed
11/11/2010	7:31:01 PM	BCl3 valve closed
11/11/2010	7:31:01 PM	PH3 valve closed
11/11/2010	7:31:01 PM	SiCl4 pre valve closed
11/11/2010	7:31:01 PM	SiCl4 post valve closed
11/11/2010	7:31:01 PM	Bubbler valve closed
11/11/2010	7:31:01 PM	Main Vac valve opened
11/11/2010	7:31:01 PM	Bypass valve opened
11/11/2010	7:31:01 PM	Helium MFC set to  0.000000
11/11/2010	7:31:01 PM	H2 MFC set to  0.000000
11/11/2010	7:31:01 PM	BCl3 MFC set to  0.000000
11/11/2010	7:31:01 PM	PHl3 MFC set to  0.000000
11/11/2010	7:31:01 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:31:01 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:31:01 PM	Tube furnace set to 0
11/11/2010	7:32:01 PM	H2 valve closed
11/11/2010	7:32:01 PM	BCl3 valve closed
11/11/2010	7:32:01 PM	PH3 valve closed
11/11/2010	7:32:01 PM	SiCl4 pre valve closed
11/11/2010	7:32:01 PM	SiCl4 post valve closed
11/11/2010	7:32:01 PM	Bubbler valve closed
11/11/2010	7:32:01 PM	Helium valve opened
11/11/2010	7:32:01 PM	Main Vac valve opened
11/11/2010	7:32:01 PM	Bypass valve opened
11/11/2010	7:32:01 PM	Helium MFC set to  100.000000
11/11/2010	7:32:01 PM	H2 MFC set to  0.000000
11/11/2010	7:32:01 PM	BCl3 MFC set to  0.000000
11/11/2010	7:32:01 PM	PHl3 MFC set to  0.000000
11/11/2010	7:32:01 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:32:01 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:32:01 PM	Tube furnace set to 0
11/11/2010	7:33:01 PM	Helium valve closed
11/11/2010	7:33:01 PM	H2 valve closed
11/11/2010	7:33:01 PM	BCl3 valve closed
11/11/2010	7:33:01 PM	PH3 valve closed
11/11/2010	7:33:01 PM	SiCl4 pre valve closed
11/11/2010	7:33:01 PM	SiCl4 post valve closed
11/11/2010	7:33:01 PM	Bubbler valve closed
11/11/2010	7:33:01 PM	Main Vac valve opened
11/11/2010	7:33:01 PM	Bypass valve opened
11/11/2010	7:33:01 PM	Helium MFC set to  0.000000
11/11/2010	7:33:01 PM	H2 MFC set to  0.000000
11/11/2010	7:33:01 PM	BCl3 MFC set to  0.000000
11/11/2010	7:33:01 PM	PHl3 MFC set to  0.000000
11/11/2010	7:33:01 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:33:01 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:33:02 PM	Tube furnace set to 0
11/11/2010	7:34:02 PM	H2 valve closed
11/11/2010	7:34:02 PM	BCl3 valve closed
11/11/2010	7:34:02 PM	PH3 valve closed
11/11/2010	7:34:02 PM	SiCl4 pre valve closed
11/11/2010	7:34:02 PM	SiCl4 post valve closed
11/11/2010	7:34:02 PM	Bubbler valve closed
11/11/2010	7:34:02 PM	Helium valve opened
11/11/2010	7:34:02 PM	Main Vac valve opened
11/11/2010	7:34:02 PM	Bypass valve opened
11/11/2010	7:34:02 PM	Helium MFC set to  100.000000
11/11/2010	7:34:02 PM	H2 MFC set to  0.000000
11/11/2010	7:34:02 PM	BCl3 MFC set to  0.000000
11/11/2010	7:34:02 PM	PHl3 MFC set to  0.000000
11/11/2010	7:34:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:34:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:34:02 PM	Tube furnace set to 0
11/11/2010	7:35:02 PM	Helium valve closed
11/11/2010	7:35:02 PM	H2 valve closed
11/11/2010	7:35:02 PM	BCl3 valve closed
11/11/2010	7:35:02 PM	PH3 valve closed
11/11/2010	7:35:02 PM	SiCl4 pre valve closed
11/11/2010	7:35:02 PM	SiCl4 post valve closed
11/11/2010	7:35:02 PM	Bubbler valve closed
11/11/2010	7:35:02 PM	Main Vac valve opened
11/11/2010	7:35:02 PM	Bypass valve opened
11/11/2010	7:35:02 PM	Helium MFC set to  0.000000
11/11/2010	7:35:02 PM	H2 MFC set to  0.000000
11/11/2010	7:35:02 PM	BCl3 MFC set to  0.000000
11/11/2010	7:35:02 PM	PHl3 MFC set to  0.000000
11/11/2010	7:35:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:35:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:35:02 PM	Tube furnace set to 0
11/11/2010	7:36:02 PM	H2 valve closed
11/11/2010	7:36:02 PM	BCl3 valve closed
11/11/2010	7:36:02 PM	PH3 valve closed
11/11/2010	7:36:02 PM	SiCl4 pre valve closed
11/11/2010	7:36:02 PM	SiCl4 post valve closed
11/11/2010	7:36:02 PM	Bubbler valve closed
11/11/2010	7:36:02 PM	Helium valve opened
11/11/2010	7:36:02 PM	Main Vac valve opened
11/11/2010	7:36:02 PM	Bypass valve opened
11/11/2010	7:36:02 PM	Helium MFC set to  100.000000
11/11/2010	7:36:02 PM	H2 MFC set to  0.000000
11/11/2010	7:36:02 PM	BCl3 MFC set to  0.000000
11/11/2010	7:36:02 PM	PHl3 MFC set to  0.000000
11/11/2010	7:36:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:36:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:36:02 PM	Tube furnace set to 0
11/11/2010	7:37:02 PM	Helium valve closed
11/11/2010	7:37:02 PM	H2 valve closed
11/11/2010	7:37:02 PM	BCl3 valve closed
11/11/2010	7:37:02 PM	PH3 valve closed
11/11/2010	7:37:02 PM	SiCl4 pre valve closed
11/11/2010	7:37:02 PM	SiCl4 post valve closed
11/11/2010	7:37:02 PM	Bubbler valve closed
11/11/2010	7:37:02 PM	Main Vac valve opened
11/11/2010	7:37:02 PM	Bypass valve opened
11/11/2010	7:37:02 PM	Helium MFC set to  0.000000
11/11/2010	7:37:02 PM	H2 MFC set to  0.000000
11/11/2010	7:37:02 PM	BCl3 MFC set to  0.000000
11/11/2010	7:37:02 PM	PHl3 MFC set to  0.000000
11/11/2010	7:37:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:37:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:37:02 PM	Tube furnace set to 0
11/11/2010	7:38:02 PM	H2 valve closed
11/11/2010	7:38:02 PM	BCl3 valve closed
11/11/2010	7:38:02 PM	PH3 valve closed
11/11/2010	7:38:02 PM	SiCl4 pre valve closed
11/11/2010	7:38:02 PM	SiCl4 post valve closed
11/11/2010	7:38:02 PM	Bubbler valve closed
11/11/2010	7:38:02 PM	Helium valve opened
11/11/2010	7:38:02 PM	Main Vac valve opened
11/11/2010	7:38:02 PM	Bypass valve opened
11/11/2010	7:38:02 PM	Helium MFC set to  100.000000
11/11/2010	7:38:02 PM	H2 MFC set to  0.000000
11/11/2010	7:38:02 PM	BCl3 MFC set to  0.000000
11/11/2010	7:38:02 PM	PHl3 MFC set to  0.000000
11/11/2010	7:38:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:38:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:38:03 PM	Tube furnace set to 0
11/11/2010	7:39:03 PM	Helium valve closed
11/11/2010	7:39:03 PM	H2 valve closed
11/11/2010	7:39:03 PM	BCl3 valve closed
11/11/2010	7:39:03 PM	PH3 valve closed
11/11/2010	7:39:03 PM	SiCl4 pre valve closed
11/11/2010	7:39:03 PM	SiCl4 post valve closed
11/11/2010	7:39:03 PM	Bubbler valve closed
11/11/2010	7:39:03 PM	Main Vac valve opened
11/11/2010	7:39:03 PM	Bypass valve opened
11/11/2010	7:39:03 PM	Helium MFC set to  0.000000
11/11/2010	7:39:03 PM	H2 MFC set to  0.000000
11/11/2010	7:39:03 PM	BCl3 MFC set to  0.000000
11/11/2010	7:39:03 PM	PHl3 MFC set to  0.000000
11/11/2010	7:39:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:39:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:39:03 PM	Tube furnace set to 0
11/11/2010	7:40:03 PM	H2 valve closed
11/11/2010	7:40:03 PM	BCl3 valve closed
11/11/2010	7:40:03 PM	PH3 valve closed
11/11/2010	7:40:03 PM	SiCl4 pre valve closed
11/11/2010	7:40:03 PM	SiCl4 post valve closed
11/11/2010	7:40:03 PM	Bubbler valve closed
11/11/2010	7:40:03 PM	Helium valve opened
11/11/2010	7:40:03 PM	Main Vac valve opened
11/11/2010	7:40:03 PM	Bypass valve opened
11/11/2010	7:40:03 PM	Helium MFC set to  100.000000
11/11/2010	7:40:03 PM	H2 MFC set to  0.000000
11/11/2010	7:40:03 PM	BCl3 MFC set to  0.000000
11/11/2010	7:40:03 PM	PHl3 MFC set to  0.000000
11/11/2010	7:40:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:40:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:40:03 PM	Tube furnace set to 0
11/11/2010	7:41:03 PM	Helium valve closed
11/11/2010	7:41:03 PM	H2 valve closed
11/11/2010	7:41:03 PM	BCl3 valve closed
11/11/2010	7:41:03 PM	PH3 valve closed
11/11/2010	7:41:03 PM	SiCl4 pre valve closed
11/11/2010	7:41:03 PM	SiCl4 post valve closed
11/11/2010	7:41:03 PM	Bubbler valve closed
11/11/2010	7:41:03 PM	Main Vac valve opened
11/11/2010	7:41:03 PM	Bypass valve opened
11/11/2010	7:41:03 PM	Helium MFC set to  0.000000
11/11/2010	7:41:03 PM	H2 MFC set to  0.000000
11/11/2010	7:41:03 PM	BCl3 MFC set to  0.000000
11/11/2010	7:41:03 PM	PHl3 MFC set to  0.000000
11/11/2010	7:41:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:41:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:41:03 PM	Tube furnace set to 0
11/11/2010	7:41:04 PM	Run finished at 7:41 PM
11/11/2010	7:41:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	7:47:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	7:47:18 PM	Recipe started at 7:47 PM
11/11/2010	7:47:18 PM	Helium valve closed
11/11/2010	7:47:18 PM	H2 valve closed
11/11/2010	7:47:18 PM	BCl3 valve closed
11/11/2010	7:47:18 PM	PH3 valve closed
11/11/2010	7:47:18 PM	SiCl4 pre valve closed
11/11/2010	7:47:18 PM	SiCl4 post valve closed
11/11/2010	7:47:18 PM	Main Vac valve closed
11/11/2010	7:47:18 PM	Bubbler valve closed
11/11/2010	7:47:18 PM	Bypass valve opened
11/11/2010	7:47:19 PM	Helium MFC set to  0.000000
11/11/2010	7:47:19 PM	H2 MFC set to  0.000000
11/11/2010	7:47:19 PM	BCl3 MFC set to  0.000000
11/11/2010	7:47:19 PM	PHl3 MFC set to  0.000000
11/11/2010	7:47:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:47:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:47:19 PM	Tube furnace set to 0
11/11/2010	7:47:19 PM	Helium valve closed
11/11/2010	7:47:19 PM	H2 valve closed
11/11/2010	7:47:19 PM	BCl3 valve closed
11/11/2010	7:47:19 PM	PH3 valve closed
11/11/2010	7:47:19 PM	SiCl4 pre valve closed
11/11/2010	7:47:19 PM	SiCl4 post valve closed
11/11/2010	7:47:19 PM	Bubbler valve closed
11/11/2010	7:47:19 PM	Main Vac valve opened
11/11/2010	7:47:19 PM	Bypass valve opened
11/11/2010	7:47:19 PM	Helium MFC set to  0.000000
11/11/2010	7:47:19 PM	H2 MFC set to  0.000000
11/11/2010	7:47:19 PM	BCl3 MFC set to  0.000000
11/11/2010	7:47:19 PM	PHl3 MFC set to  0.000000
11/11/2010	7:47:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:47:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:47:19 PM	Tube furnace set to 0
11/11/2010	7:48:19 PM	H2 valve closed
11/11/2010	7:48:19 PM	BCl3 valve closed
11/11/2010	7:48:19 PM	PH3 valve closed
11/11/2010	7:48:19 PM	SiCl4 pre valve closed
11/11/2010	7:48:19 PM	SiCl4 post valve closed
11/11/2010	7:48:19 PM	Bubbler valve closed
11/11/2010	7:48:19 PM	Helium valve opened
11/11/2010	7:48:19 PM	Main Vac valve opened
11/11/2010	7:48:19 PM	Bypass valve opened
11/11/2010	7:48:19 PM	Helium MFC set to  100.000000
11/11/2010	7:48:19 PM	H2 MFC set to  0.000000
11/11/2010	7:48:19 PM	BCl3 MFC set to  0.000000
11/11/2010	7:48:19 PM	PHl3 MFC set to  0.000000
11/11/2010	7:48:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:48:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:48:19 PM	Tube furnace set to 0
11/11/2010	7:49:19 PM	Helium valve closed
11/11/2010	7:49:19 PM	H2 valve closed
11/11/2010	7:49:19 PM	BCl3 valve closed
11/11/2010	7:49:19 PM	PH3 valve closed
11/11/2010	7:49:19 PM	SiCl4 pre valve closed
11/11/2010	7:49:19 PM	SiCl4 post valve closed
11/11/2010	7:49:19 PM	Bubbler valve closed
11/11/2010	7:49:19 PM	Main Vac valve opened
11/11/2010	7:49:19 PM	Bypass valve opened
11/11/2010	7:49:19 PM	Helium MFC set to  0.000000
11/11/2010	7:49:19 PM	H2 MFC set to  0.000000
11/11/2010	7:49:19 PM	BCl3 MFC set to  0.000000
11/11/2010	7:49:19 PM	PHl3 MFC set to  0.000000
11/11/2010	7:49:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:49:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:49:19 PM	Tube furnace set to 0
11/11/2010	7:50:20 PM	H2 valve closed
11/11/2010	7:50:20 PM	BCl3 valve closed
11/11/2010	7:50:20 PM	PH3 valve closed
11/11/2010	7:50:20 PM	SiCl4 pre valve closed
11/11/2010	7:50:20 PM	SiCl4 post valve closed
11/11/2010	7:50:20 PM	Bubbler valve closed
11/11/2010	7:50:20 PM	Helium valve opened
11/11/2010	7:50:20 PM	Main Vac valve opened
11/11/2010	7:50:20 PM	Bypass valve opened
11/11/2010	7:50:20 PM	Helium MFC set to  100.000000
11/11/2010	7:50:20 PM	H2 MFC set to  0.000000
11/11/2010	7:50:20 PM	BCl3 MFC set to  0.000000
11/11/2010	7:50:20 PM	PHl3 MFC set to  0.000000
11/11/2010	7:50:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:50:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:50:20 PM	Tube furnace set to 0
11/11/2010	7:51:20 PM	Helium valve closed
11/11/2010	7:51:20 PM	H2 valve closed
11/11/2010	7:51:20 PM	BCl3 valve closed
11/11/2010	7:51:20 PM	PH3 valve closed
11/11/2010	7:51:20 PM	SiCl4 pre valve closed
11/11/2010	7:51:20 PM	SiCl4 post valve closed
11/11/2010	7:51:20 PM	Bubbler valve closed
11/11/2010	7:51:20 PM	Main Vac valve opened
11/11/2010	7:51:20 PM	Bypass valve opened
11/11/2010	7:51:20 PM	Helium MFC set to  0.000000
11/11/2010	7:51:20 PM	H2 MFC set to  0.000000
11/11/2010	7:51:20 PM	BCl3 MFC set to  0.000000
11/11/2010	7:51:20 PM	PHl3 MFC set to  0.000000
11/11/2010	7:51:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:51:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:51:20 PM	Tube furnace set to 0
11/11/2010	7:52:20 PM	H2 valve closed
11/11/2010	7:52:20 PM	BCl3 valve closed
11/11/2010	7:52:20 PM	PH3 valve closed
11/11/2010	7:52:20 PM	SiCl4 pre valve closed
11/11/2010	7:52:20 PM	SiCl4 post valve closed
11/11/2010	7:52:20 PM	Bubbler valve closed
11/11/2010	7:52:20 PM	Helium valve opened
11/11/2010	7:52:20 PM	Main Vac valve opened
11/11/2010	7:52:20 PM	Bypass valve opened
11/11/2010	7:52:20 PM	Helium MFC set to  100.000000
11/11/2010	7:52:20 PM	H2 MFC set to  0.000000
11/11/2010	7:52:20 PM	BCl3 MFC set to  0.000000
11/11/2010	7:52:20 PM	PHl3 MFC set to  0.000000
11/11/2010	7:52:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:52:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:52:20 PM	Tube furnace set to 0
11/11/2010	7:53:20 PM	Helium valve closed
11/11/2010	7:53:20 PM	H2 valve closed
11/11/2010	7:53:20 PM	BCl3 valve closed
11/11/2010	7:53:20 PM	PH3 valve closed
11/11/2010	7:53:20 PM	SiCl4 pre valve closed
11/11/2010	7:53:20 PM	SiCl4 post valve closed
11/11/2010	7:53:20 PM	Bubbler valve closed
11/11/2010	7:53:20 PM	Main Vac valve opened
11/11/2010	7:53:20 PM	Bypass valve opened
11/11/2010	7:53:20 PM	Helium MFC set to  0.000000
11/11/2010	7:53:20 PM	H2 MFC set to  0.000000
11/11/2010	7:53:20 PM	BCl3 MFC set to  0.000000
11/11/2010	7:53:20 PM	PHl3 MFC set to  0.000000
11/11/2010	7:53:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:53:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:53:20 PM	Tube furnace set to 0
11/11/2010	7:54:20 PM	H2 valve closed
11/11/2010	7:54:20 PM	BCl3 valve closed
11/11/2010	7:54:20 PM	PH3 valve closed
11/11/2010	7:54:20 PM	SiCl4 pre valve closed
11/11/2010	7:54:20 PM	SiCl4 post valve closed
11/11/2010	7:54:20 PM	Bubbler valve closed
11/11/2010	7:54:20 PM	Helium valve opened
11/11/2010	7:54:20 PM	Main Vac valve opened
11/11/2010	7:54:20 PM	Bypass valve opened
11/11/2010	7:54:20 PM	Helium MFC set to  100.000000
11/11/2010	7:54:20 PM	H2 MFC set to  0.000000
11/11/2010	7:54:20 PM	BCl3 MFC set to  0.000000
11/11/2010	7:54:20 PM	PHl3 MFC set to  0.000000
11/11/2010	7:54:20 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:54:20 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:54:20 PM	Tube furnace set to 0
11/11/2010	7:55:20 PM	Helium valve closed
11/11/2010	7:55:20 PM	H2 valve closed
11/11/2010	7:55:20 PM	BCl3 valve closed
11/11/2010	7:55:20 PM	PH3 valve closed
11/11/2010	7:55:21 PM	SiCl4 pre valve closed
11/11/2010	7:55:21 PM	SiCl4 post valve closed
11/11/2010	7:55:21 PM	Bubbler valve closed
11/11/2010	7:55:21 PM	Main Vac valve opened
11/11/2010	7:55:21 PM	Bypass valve opened
11/11/2010	7:55:21 PM	Helium MFC set to  0.000000
11/11/2010	7:55:21 PM	H2 MFC set to  0.000000
11/11/2010	7:55:21 PM	BCl3 MFC set to  0.000000
11/11/2010	7:55:21 PM	PHl3 MFC set to  0.000000
11/11/2010	7:55:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:55:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:55:21 PM	Tube furnace set to 0
11/11/2010	7:56:21 PM	H2 valve closed
11/11/2010	7:56:21 PM	BCl3 valve closed
11/11/2010	7:56:21 PM	PH3 valve closed
11/11/2010	7:56:21 PM	SiCl4 pre valve closed
11/11/2010	7:56:21 PM	SiCl4 post valve closed
11/11/2010	7:56:21 PM	Bubbler valve closed
11/11/2010	7:56:21 PM	Helium valve opened
11/11/2010	7:56:21 PM	Main Vac valve opened
11/11/2010	7:56:21 PM	Bypass valve opened
11/11/2010	7:56:21 PM	Helium MFC set to  100.000000
11/11/2010	7:56:21 PM	H2 MFC set to  0.000000
11/11/2010	7:56:21 PM	BCl3 MFC set to  0.000000
11/11/2010	7:56:21 PM	PHl3 MFC set to  0.000000
11/11/2010	7:56:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:56:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:56:21 PM	Tube furnace set to 0
11/11/2010	7:57:21 PM	Helium valve closed
11/11/2010	7:57:21 PM	H2 valve closed
11/11/2010	7:57:21 PM	BCl3 valve closed
11/11/2010	7:57:21 PM	PH3 valve closed
11/11/2010	7:57:21 PM	SiCl4 pre valve closed
11/11/2010	7:57:21 PM	SiCl4 post valve closed
11/11/2010	7:57:21 PM	Bubbler valve closed
11/11/2010	7:57:21 PM	Main Vac valve opened
11/11/2010	7:57:21 PM	Bypass valve opened
11/11/2010	7:57:21 PM	Helium MFC set to  0.000000
11/11/2010	7:57:21 PM	H2 MFC set to  0.000000
11/11/2010	7:57:21 PM	BCl3 MFC set to  0.000000
11/11/2010	7:57:21 PM	PHl3 MFC set to  0.000000
11/11/2010	7:57:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:57:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:57:21 PM	Tube furnace set to 0
11/11/2010	7:58:21 PM	H2 valve closed
11/11/2010	7:58:21 PM	BCl3 valve closed
11/11/2010	7:58:21 PM	PH3 valve closed
11/11/2010	7:58:21 PM	SiCl4 pre valve closed
11/11/2010	7:58:21 PM	SiCl4 post valve closed
11/11/2010	7:58:21 PM	Bubbler valve closed
11/11/2010	7:58:21 PM	Helium valve opened
11/11/2010	7:58:21 PM	Main Vac valve opened
11/11/2010	7:58:21 PM	Bypass valve opened
11/11/2010	7:58:21 PM	Helium MFC set to  100.000000
11/11/2010	7:58:21 PM	H2 MFC set to  0.000000
11/11/2010	7:58:21 PM	BCl3 MFC set to  0.000000
11/11/2010	7:58:21 PM	PHl3 MFC set to  0.000000
11/11/2010	7:58:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:58:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:58:21 PM	Tube furnace set to 0
11/11/2010	7:59:21 PM	Helium valve closed
11/11/2010	7:59:21 PM	H2 valve closed
11/11/2010	7:59:21 PM	BCl3 valve closed
11/11/2010	7:59:21 PM	PH3 valve closed
11/11/2010	7:59:21 PM	SiCl4 pre valve closed
11/11/2010	7:59:21 PM	SiCl4 post valve closed
11/11/2010	7:59:21 PM	Bubbler valve closed
11/11/2010	7:59:21 PM	Main Vac valve opened
11/11/2010	7:59:21 PM	Bypass valve opened
11/11/2010	7:59:21 PM	Helium MFC set to  0.000000
11/11/2010	7:59:21 PM	H2 MFC set to  0.000000
11/11/2010	7:59:21 PM	BCl3 MFC set to  0.000000
11/11/2010	7:59:21 PM	PHl3 MFC set to  0.000000
11/11/2010	7:59:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	7:59:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	7:59:21 PM	Tube furnace set to 0
11/11/2010	8:00:21 PM	H2 valve closed
11/11/2010	8:00:21 PM	BCl3 valve closed
11/11/2010	8:00:21 PM	PH3 valve closed
11/11/2010	8:00:21 PM	SiCl4 pre valve closed
11/11/2010	8:00:21 PM	SiCl4 post valve closed
11/11/2010	8:00:21 PM	Bubbler valve closed
11/11/2010	8:00:21 PM	Helium valve opened
11/11/2010	8:00:21 PM	Main Vac valve opened
11/11/2010	8:00:21 PM	Bypass valve opened
11/11/2010	8:00:21 PM	Helium MFC set to  100.000000
11/11/2010	8:00:21 PM	H2 MFC set to  0.000000
11/11/2010	8:00:21 PM	BCl3 MFC set to  0.000000
11/11/2010	8:00:21 PM	PHl3 MFC set to  0.000000
11/11/2010	8:00:21 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:00:21 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:00:22 PM	Tube furnace set to 0
11/11/2010	8:01:22 PM	Helium valve closed
11/11/2010	8:01:22 PM	H2 valve closed
11/11/2010	8:01:22 PM	BCl3 valve closed
11/11/2010	8:01:22 PM	PH3 valve closed
11/11/2010	8:01:22 PM	SiCl4 pre valve closed
11/11/2010	8:01:22 PM	SiCl4 post valve closed
11/11/2010	8:01:22 PM	Bubbler valve closed
11/11/2010	8:01:22 PM	Main Vac valve opened
11/11/2010	8:01:22 PM	Bypass valve opened
11/11/2010	8:01:22 PM	Helium MFC set to  0.000000
11/11/2010	8:01:22 PM	H2 MFC set to  0.000000
11/11/2010	8:01:22 PM	BCl3 MFC set to  0.000000
11/11/2010	8:01:22 PM	PHl3 MFC set to  0.000000
11/11/2010	8:01:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:01:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:01:22 PM	Tube furnace set to 0
11/11/2010	8:02:22 PM	H2 valve closed
11/11/2010	8:02:22 PM	BCl3 valve closed
11/11/2010	8:02:22 PM	PH3 valve closed
11/11/2010	8:02:22 PM	SiCl4 pre valve closed
11/11/2010	8:02:22 PM	SiCl4 post valve closed
11/11/2010	8:02:22 PM	Bubbler valve closed
11/11/2010	8:02:22 PM	Helium valve opened
11/11/2010	8:02:22 PM	Main Vac valve opened
11/11/2010	8:02:22 PM	Bypass valve opened
11/11/2010	8:02:22 PM	Helium MFC set to  100.000000
11/11/2010	8:02:22 PM	H2 MFC set to  0.000000
11/11/2010	8:02:22 PM	BCl3 MFC set to  0.000000
11/11/2010	8:02:22 PM	PHl3 MFC set to  0.000000
11/11/2010	8:02:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:02:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:02:22 PM	Tube furnace set to 0
11/11/2010	8:03:22 PM	Helium valve closed
11/11/2010	8:03:22 PM	H2 valve closed
11/11/2010	8:03:22 PM	BCl3 valve closed
11/11/2010	8:03:22 PM	PH3 valve closed
11/11/2010	8:03:22 PM	SiCl4 pre valve closed
11/11/2010	8:03:22 PM	SiCl4 post valve closed
11/11/2010	8:03:22 PM	Bubbler valve closed
11/11/2010	8:03:22 PM	Main Vac valve opened
11/11/2010	8:03:22 PM	Bypass valve opened
11/11/2010	8:03:22 PM	Helium MFC set to  0.000000
11/11/2010	8:03:22 PM	H2 MFC set to  0.000000
11/11/2010	8:03:22 PM	BCl3 MFC set to  0.000000
11/11/2010	8:03:22 PM	PHl3 MFC set to  0.000000
11/11/2010	8:03:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:03:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:03:22 PM	Tube furnace set to 0
11/11/2010	8:04:22 PM	H2 valve closed
11/11/2010	8:04:22 PM	BCl3 valve closed
11/11/2010	8:04:22 PM	PH3 valve closed
11/11/2010	8:04:22 PM	SiCl4 pre valve closed
11/11/2010	8:04:22 PM	SiCl4 post valve closed
11/11/2010	8:04:22 PM	Bubbler valve closed
11/11/2010	8:04:22 PM	Helium valve opened
11/11/2010	8:04:22 PM	Main Vac valve opened
11/11/2010	8:04:22 PM	Bypass valve opened
11/11/2010	8:04:22 PM	Helium MFC set to  100.000000
11/11/2010	8:04:22 PM	H2 MFC set to  0.000000
11/11/2010	8:04:22 PM	BCl3 MFC set to  0.000000
11/11/2010	8:04:22 PM	PHl3 MFC set to  0.000000
11/11/2010	8:04:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:04:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:04:22 PM	Tube furnace set to 0
11/11/2010	8:05:22 PM	Helium valve closed
11/11/2010	8:05:22 PM	H2 valve closed
11/11/2010	8:05:22 PM	BCl3 valve closed
11/11/2010	8:05:22 PM	PH3 valve closed
11/11/2010	8:05:22 PM	SiCl4 pre valve closed
11/11/2010	8:05:22 PM	SiCl4 post valve closed
11/11/2010	8:05:22 PM	Bubbler valve closed
11/11/2010	8:05:22 PM	Main Vac valve opened
11/11/2010	8:05:22 PM	Bypass valve opened
11/11/2010	8:05:22 PM	Helium MFC set to  0.000000
11/11/2010	8:05:22 PM	H2 MFC set to  0.000000
11/11/2010	8:05:22 PM	BCl3 MFC set to  0.000000
11/11/2010	8:05:22 PM	PHl3 MFC set to  0.000000
11/11/2010	8:05:22 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:05:22 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:05:23 PM	Tube furnace set to 0
11/11/2010	8:06:23 PM	H2 valve closed
11/11/2010	8:06:23 PM	BCl3 valve closed
11/11/2010	8:06:23 PM	PH3 valve closed
11/11/2010	8:06:23 PM	SiCl4 pre valve closed
11/11/2010	8:06:23 PM	SiCl4 post valve closed
11/11/2010	8:06:23 PM	Bubbler valve closed
11/11/2010	8:06:23 PM	Helium valve opened
11/11/2010	8:06:23 PM	Main Vac valve opened
11/11/2010	8:06:23 PM	Bypass valve opened
11/11/2010	8:06:23 PM	Helium MFC set to  100.000000
11/11/2010	8:06:23 PM	H2 MFC set to  0.000000
11/11/2010	8:06:23 PM	BCl3 MFC set to  0.000000
11/11/2010	8:06:23 PM	PHl3 MFC set to  0.000000
11/11/2010	8:06:23 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:06:23 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:06:23 PM	Tube furnace set to 0
11/11/2010	8:07:23 PM	Helium valve closed
11/11/2010	8:07:23 PM	H2 valve closed
11/11/2010	8:07:23 PM	BCl3 valve closed
11/11/2010	8:07:23 PM	PH3 valve closed
11/11/2010	8:07:23 PM	SiCl4 pre valve closed
11/11/2010	8:07:23 PM	SiCl4 post valve closed
11/11/2010	8:07:23 PM	Bubbler valve closed
11/11/2010	8:07:23 PM	Main Vac valve opened
11/11/2010	8:07:23 PM	Bypass valve opened
11/11/2010	8:07:23 PM	Helium MFC set to  0.000000
11/11/2010	8:07:23 PM	H2 MFC set to  0.000000
11/11/2010	8:07:23 PM	BCl3 MFC set to  0.000000
11/11/2010	8:07:23 PM	PHl3 MFC set to  0.000000
11/11/2010	8:07:23 PM	SiCl4 MFC set to  0.000000
11/11/2010	8:07:23 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	8:07:23 PM	Tube furnace set to 0
11/11/2010	8:07:24 PM	Run finished at 8:07 PM
11/11/2010	8:07:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	9:18:23 PM	Bypass valve closed
11/11/2010	9:18:24 PM	Main Vac valve closed
11/11/2010	9:18:43 PM	Bypass valve opened
11/11/2010	9:18:44 PM	Main Vac valve opened
11/11/2010	9:19:10 PM	Recipe started at 9:19 PM
11/11/2010	9:19:10 PM	Helium valve closed
11/11/2010	9:19:10 PM	BCl3 valve closed
11/11/2010	9:19:10 PM	PH3 valve closed
11/11/2010	9:19:10 PM	SiCl4 pre valve closed
11/11/2010	9:19:10 PM	SiCl4 post valve closed
11/11/2010	9:19:10 PM	Main Vac valve closed
11/11/2010	9:19:10 PM	Bypass valve closed
11/11/2010	9:19:10 PM	Bubbler valve closed
11/11/2010	9:19:10 PM	H2 valve opened
11/11/2010	9:19:10 PM	Helium MFC set to  0.000000
11/11/2010	9:19:10 PM	H2 MFC set to  500.000000
11/11/2010	9:19:10 PM	BCl3 MFC set to  0.000000
11/11/2010	9:19:10 PM	PHl3 MFC set to  0.000000
11/11/2010	9:19:10 PM	SiCl4 MFC set to  0.000000
11/11/2010	9:19:10 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	9:19:10 PM	Tube furnace set to 0
11/11/2010	9:20:35 PM	Helium valve closed
11/11/2010	9:20:35 PM	BCl3 valve closed
11/11/2010	9:20:35 PM	PH3 valve closed
11/11/2010	9:20:35 PM	SiCl4 pre valve closed
11/11/2010	9:20:35 PM	SiCl4 post valve closed
11/11/2010	9:20:35 PM	Main Vac valve closed
11/11/2010	9:20:35 PM	Bypass valve closed
11/11/2010	9:20:35 PM	H2 valve opened
11/11/2010	9:20:35 PM	Bubbler valve opened
11/11/2010	9:20:35 PM	Helium MFC set to  0.000000
11/11/2010	9:20:35 PM	H2 MFC set to  500.000000
11/11/2010	9:20:35 PM	BCl3 MFC set to  0.000000
11/11/2010	9:20:35 PM	PHl3 MFC set to  0.000000
11/11/2010	9:20:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	9:20:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	9:20:35 PM	Tube furnace set to 1000
11/11/2010	9:40:35 PM	Helium valve closed
11/11/2010	9:40:35 PM	BCl3 valve closed
11/11/2010	9:40:35 PM	Main Vac valve closed
11/11/2010	9:40:35 PM	Bypass valve closed
11/11/2010	9:40:35 PM	H2 valve opened
11/11/2010	9:40:35 PM	PH3 valve opened
11/11/2010	9:40:35 PM	SiCl4 pre valve opened
11/11/2010	9:40:35 PM	SiCl4 post valve opened
11/11/2010	9:40:35 PM	Bubbler valve opened
11/11/2010	9:40:35 PM	Helium MFC set to  0.000000
11/11/2010	9:40:35 PM	H2 MFC set to  500.000000
11/11/2010	9:40:35 PM	BCl3 MFC set to  0.000000
11/11/2010	9:40:35 PM	PHl3 MFC set to  1.000000
11/11/2010	9:40:35 PM	SiCl4 MFC set to  50.000000
11/11/2010	9:40:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	9:40:35 PM	Tube furnace set to 1000
11/11/2010	10:10:35 PM	H2 valve closed
11/11/2010	10:10:35 PM	BCl3 valve closed
11/11/2010	10:10:35 PM	PH3 valve closed
11/11/2010	10:10:35 PM	SiCl4 pre valve closed
11/11/2010	10:10:35 PM	SiCl4 post valve closed
11/11/2010	10:10:35 PM	Main Vac valve closed
11/11/2010	10:10:35 PM	Bypass valve closed
11/11/2010	10:10:35 PM	Helium valve opened
11/11/2010	10:10:35 PM	Bubbler valve opened
11/11/2010	10:10:35 PM	Helium MFC set to  500.000000
11/11/2010	10:10:35 PM	H2 MFC set to  0.000000
11/11/2010	10:10:35 PM	BCl3 MFC set to  0.000000
11/11/2010	10:10:35 PM	PHl3 MFC set to  0.000000
11/11/2010	10:10:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:10:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:10:35 PM	Tube furnace set to 0
11/11/2010	10:30:35 PM	Helium valve closed
11/11/2010	10:30:35 PM	H2 valve closed
11/11/2010	10:30:35 PM	BCl3 valve closed
11/11/2010	10:30:35 PM	PH3 valve closed
11/11/2010	10:30:35 PM	SiCl4 pre valve closed
11/11/2010	10:30:35 PM	SiCl4 post valve closed
11/11/2010	10:30:35 PM	Main Vac valve closed
11/11/2010	10:30:35 PM	Bypass valve closed
11/11/2010	10:30:35 PM	Bubbler valve closed
11/11/2010	10:30:35 PM	Helium MFC set to  0.000000
11/11/2010	10:30:35 PM	H2 MFC set to  0.000000
11/11/2010	10:30:35 PM	BCl3 MFC set to  0.000000
11/11/2010	10:30:35 PM	PHl3 MFC set to  0.000000
11/11/2010	10:30:35 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:30:35 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:30:35 PM	Tube furnace set to 0
11/11/2010	10:30:36 PM	Run finished at 10:30 PM
11/11/2010	10:33:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	10:33:36 PM	Recipe started at 10:33 PM
11/11/2010	10:33:36 PM	H2 valve closed
11/11/2010	10:33:36 PM	BCl3 valve closed
11/11/2010	10:33:36 PM	PH3 valve closed
11/11/2010	10:33:36 PM	SiCl4 pre valve closed
11/11/2010	10:33:36 PM	SiCl4 post valve closed
11/11/2010	10:33:36 PM	Main Vac valve closed
11/11/2010	10:33:36 PM	Bypass valve closed
11/11/2010	10:33:36 PM	Bubbler valve closed
11/11/2010	10:33:36 PM	Helium valve opened
11/11/2010	10:33:36 PM	Helium MFC set to  500.000000
11/11/2010	10:33:36 PM	H2 MFC set to  0.000000
11/11/2010	10:33:36 PM	BCl3 MFC set to  0.000000
11/11/2010	10:33:36 PM	PHl3 MFC set to  0.000000
11/11/2010	10:33:36 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:33:36 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:33:36 PM	Tube furnace set to 0
11/11/2010	10:33:37 PM	Helium valve closed
11/11/2010	10:33:37 PM	H2 valve closed
11/11/2010	10:33:37 PM	BCl3 valve closed
11/11/2010	10:33:37 PM	PH3 valve closed
11/11/2010	10:33:37 PM	SiCl4 pre valve closed
11/11/2010	10:33:37 PM	SiCl4 post valve closed
11/11/2010	10:33:37 PM	Main Vac valve closed
11/11/2010	10:33:37 PM	Bypass valve closed
11/11/2010	10:33:37 PM	Bubbler valve closed
11/11/2010	10:33:37 PM	Helium MFC set to  0.000000
11/11/2010	10:33:37 PM	H2 MFC set to  0.000000
11/11/2010	10:33:37 PM	BCl3 MFC set to  0.000000
11/11/2010	10:33:37 PM	PHl3 MFC set to  0.000000
11/11/2010	10:33:37 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:33:37 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:33:37 PM	Tube furnace set to 0
11/11/2010	10:33:37 PM	Run finished at 10:33 PM
11/11/2010	10:33:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/11/2010	10:41:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	10:41:47 PM	Recipe started at 10:41 PM
11/11/2010	10:41:47 PM	Helium valve closed
11/11/2010	10:41:47 PM	H2 valve closed
11/11/2010	10:41:47 PM	BCl3 valve closed
11/11/2010	10:41:47 PM	PH3 valve closed
11/11/2010	10:41:47 PM	SiCl4 pre valve closed
11/11/2010	10:41:47 PM	SiCl4 post valve closed
11/11/2010	10:41:47 PM	Main Vac valve closed
11/11/2010	10:41:47 PM	Bubbler valve closed
11/11/2010	10:41:47 PM	Bypass valve opened
11/11/2010	10:41:47 PM	Helium MFC set to  0.000000
11/11/2010	10:41:47 PM	H2 MFC set to  0.000000
11/11/2010	10:41:47 PM	BCl3 MFC set to  0.000000
11/11/2010	10:41:47 PM	PHl3 MFC set to  0.000000
11/11/2010	10:41:47 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:41:47 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:41:47 PM	Tube furnace set to 0
11/11/2010	10:42:45 PM	Helium valve closed
11/11/2010	10:42:45 PM	H2 valve closed
11/11/2010	10:42:45 PM	BCl3 valve closed
11/11/2010	10:42:45 PM	PH3 valve closed
11/11/2010	10:42:45 PM	SiCl4 pre valve closed
11/11/2010	10:42:45 PM	SiCl4 post valve closed
11/11/2010	10:42:45 PM	Bubbler valve closed
11/11/2010	10:42:45 PM	Main Vac valve opened
11/11/2010	10:42:45 PM	Bypass valve opened
11/11/2010	10:42:45 PM	Helium MFC set to  0.000000
11/11/2010	10:42:45 PM	H2 MFC set to  0.000000
11/11/2010	10:42:45 PM	BCl3 MFC set to  0.000000
11/11/2010	10:42:45 PM	PHl3 MFC set to  0.000000
11/11/2010	10:42:45 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:42:45 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:42:45 PM	Tube furnace set to 0
11/11/2010	10:42:45 PM	Run finished at 10:42 PM
11/11/2010	10:42:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	10:44:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	10:44:38 PM	Recipe started at 10:44 PM
11/11/2010	10:44:38 PM	Helium valve closed
11/11/2010	10:44:38 PM	H2 valve closed
11/11/2010	10:44:38 PM	BCl3 valve closed
11/11/2010	10:44:38 PM	PH3 valve closed
11/11/2010	10:44:38 PM	SiCl4 pre valve closed
11/11/2010	10:44:38 PM	SiCl4 post valve closed
11/11/2010	10:44:38 PM	Main Vac valve closed
11/11/2010	10:44:38 PM	Bubbler valve closed
11/11/2010	10:44:38 PM	Bypass valve opened
11/11/2010	10:44:38 PM	Helium MFC set to  0.000000
11/11/2010	10:44:38 PM	H2 MFC set to  0.000000
11/11/2010	10:44:38 PM	BCl3 MFC set to  0.000000
11/11/2010	10:44:38 PM	PHl3 MFC set to  0.000000
11/11/2010	10:44:38 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:44:38 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:44:38 PM	Tube furnace set to 0
11/11/2010	10:44:39 PM	Helium valve closed
11/11/2010	10:44:39 PM	H2 valve closed
11/11/2010	10:44:39 PM	BCl3 valve closed
11/11/2010	10:44:39 PM	PH3 valve closed
11/11/2010	10:44:39 PM	SiCl4 pre valve closed
11/11/2010	10:44:39 PM	SiCl4 post valve closed
11/11/2010	10:44:39 PM	Bubbler valve closed
11/11/2010	10:44:39 PM	Main Vac valve opened
11/11/2010	10:44:39 PM	Bypass valve opened
11/11/2010	10:44:39 PM	Helium MFC set to  0.000000
11/11/2010	10:44:39 PM	H2 MFC set to  0.000000
11/11/2010	10:44:39 PM	BCl3 MFC set to  0.000000
11/11/2010	10:44:39 PM	PHl3 MFC set to  0.000000
11/11/2010	10:44:39 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:44:39 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:44:39 PM	Tube furnace set to 0
11/11/2010	10:45:39 PM	H2 valve closed
11/11/2010	10:45:39 PM	BCl3 valve closed
11/11/2010	10:45:39 PM	PH3 valve closed
11/11/2010	10:45:39 PM	SiCl4 pre valve closed
11/11/2010	10:45:39 PM	SiCl4 post valve closed
11/11/2010	10:45:39 PM	Bubbler valve closed
11/11/2010	10:45:39 PM	Helium valve opened
11/11/2010	10:45:39 PM	Main Vac valve opened
11/11/2010	10:45:39 PM	Bypass valve opened
11/11/2010	10:45:39 PM	Helium MFC set to  100.000000
11/11/2010	10:45:39 PM	H2 MFC set to  0.000000
11/11/2010	10:45:39 PM	BCl3 MFC set to  0.000000
11/11/2010	10:45:39 PM	PHl3 MFC set to  0.000000
11/11/2010	10:45:39 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:45:39 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:45:39 PM	Tube furnace set to 0
11/11/2010	10:46:39 PM	Helium valve closed
11/11/2010	10:46:39 PM	H2 valve closed
11/11/2010	10:46:39 PM	BCl3 valve closed
11/11/2010	10:46:39 PM	PH3 valve closed
11/11/2010	10:46:39 PM	SiCl4 pre valve closed
11/11/2010	10:46:39 PM	SiCl4 post valve closed
11/11/2010	10:46:39 PM	Bubbler valve closed
11/11/2010	10:46:39 PM	Main Vac valve opened
11/11/2010	10:46:39 PM	Bypass valve opened
11/11/2010	10:46:39 PM	Helium MFC set to  0.000000
11/11/2010	10:46:39 PM	H2 MFC set to  0.000000
11/11/2010	10:46:39 PM	BCl3 MFC set to  0.000000
11/11/2010	10:46:39 PM	PHl3 MFC set to  0.000000
11/11/2010	10:46:39 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:46:39 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:46:39 PM	Tube furnace set to 0
11/11/2010	10:47:39 PM	H2 valve closed
11/11/2010	10:47:39 PM	BCl3 valve closed
11/11/2010	10:47:39 PM	PH3 valve closed
11/11/2010	10:47:39 PM	SiCl4 pre valve closed
11/11/2010	10:47:39 PM	SiCl4 post valve closed
11/11/2010	10:47:39 PM	Bubbler valve closed
11/11/2010	10:47:39 PM	Helium valve opened
11/11/2010	10:47:39 PM	Main Vac valve opened
11/11/2010	10:47:39 PM	Bypass valve opened
11/11/2010	10:47:39 PM	Helium MFC set to  100.000000
11/11/2010	10:47:39 PM	H2 MFC set to  0.000000
11/11/2010	10:47:39 PM	BCl3 MFC set to  0.000000
11/11/2010	10:47:39 PM	PHl3 MFC set to  0.000000
11/11/2010	10:47:39 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:47:39 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:47:39 PM	Tube furnace set to 0
11/11/2010	10:48:40 PM	Helium valve closed
11/11/2010	10:48:40 PM	H2 valve closed
11/11/2010	10:48:40 PM	BCl3 valve closed
11/11/2010	10:48:40 PM	PH3 valve closed
11/11/2010	10:48:40 PM	SiCl4 pre valve closed
11/11/2010	10:48:40 PM	SiCl4 post valve closed
11/11/2010	10:48:40 PM	Bubbler valve closed
11/11/2010	10:48:40 PM	Main Vac valve opened
11/11/2010	10:48:40 PM	Bypass valve opened
11/11/2010	10:48:40 PM	Helium MFC set to  0.000000
11/11/2010	10:48:40 PM	H2 MFC set to  0.000000
11/11/2010	10:48:40 PM	BCl3 MFC set to  0.000000
11/11/2010	10:48:40 PM	PHl3 MFC set to  0.000000
11/11/2010	10:48:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:48:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:48:40 PM	Tube furnace set to 0
11/11/2010	10:49:40 PM	H2 valve closed
11/11/2010	10:49:40 PM	BCl3 valve closed
11/11/2010	10:49:40 PM	PH3 valve closed
11/11/2010	10:49:40 PM	SiCl4 pre valve closed
11/11/2010	10:49:40 PM	SiCl4 post valve closed
11/11/2010	10:49:40 PM	Bubbler valve closed
11/11/2010	10:49:40 PM	Helium valve opened
11/11/2010	10:49:40 PM	Main Vac valve opened
11/11/2010	10:49:40 PM	Bypass valve opened
11/11/2010	10:49:40 PM	Helium MFC set to  100.000000
11/11/2010	10:49:40 PM	H2 MFC set to  0.000000
11/11/2010	10:49:40 PM	BCl3 MFC set to  0.000000
11/11/2010	10:49:40 PM	PHl3 MFC set to  0.000000
11/11/2010	10:49:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:49:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:49:40 PM	Tube furnace set to 0
11/11/2010	10:50:40 PM	Helium valve closed
11/11/2010	10:50:40 PM	H2 valve closed
11/11/2010	10:50:40 PM	BCl3 valve closed
11/11/2010	10:50:40 PM	PH3 valve closed
11/11/2010	10:50:40 PM	SiCl4 pre valve closed
11/11/2010	10:50:40 PM	SiCl4 post valve closed
11/11/2010	10:50:40 PM	Bubbler valve closed
11/11/2010	10:50:40 PM	Main Vac valve opened
11/11/2010	10:50:40 PM	Bypass valve opened
11/11/2010	10:50:40 PM	Helium MFC set to  0.000000
11/11/2010	10:50:40 PM	H2 MFC set to  0.000000
11/11/2010	10:50:40 PM	BCl3 MFC set to  0.000000
11/11/2010	10:50:40 PM	PHl3 MFC set to  0.000000
11/11/2010	10:50:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:50:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:50:40 PM	Tube furnace set to 0
11/11/2010	10:51:40 PM	H2 valve closed
11/11/2010	10:51:40 PM	BCl3 valve closed
11/11/2010	10:51:40 PM	PH3 valve closed
11/11/2010	10:51:40 PM	SiCl4 pre valve closed
11/11/2010	10:51:40 PM	SiCl4 post valve closed
11/11/2010	10:51:40 PM	Bubbler valve closed
11/11/2010	10:51:40 PM	Helium valve opened
11/11/2010	10:51:40 PM	Main Vac valve opened
11/11/2010	10:51:40 PM	Bypass valve opened
11/11/2010	10:51:40 PM	Helium MFC set to  100.000000
11/11/2010	10:51:40 PM	H2 MFC set to  0.000000
11/11/2010	10:51:40 PM	BCl3 MFC set to  0.000000
11/11/2010	10:51:40 PM	PHl3 MFC set to  0.000000
11/11/2010	10:51:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:51:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:51:40 PM	Tube furnace set to 0
11/11/2010	10:52:40 PM	Helium valve closed
11/11/2010	10:52:40 PM	H2 valve closed
11/11/2010	10:52:40 PM	BCl3 valve closed
11/11/2010	10:52:40 PM	PH3 valve closed
11/11/2010	10:52:40 PM	SiCl4 pre valve closed
11/11/2010	10:52:40 PM	SiCl4 post valve closed
11/11/2010	10:52:40 PM	Bubbler valve closed
11/11/2010	10:52:40 PM	Main Vac valve opened
11/11/2010	10:52:40 PM	Bypass valve opened
11/11/2010	10:52:40 PM	Helium MFC set to  0.000000
11/11/2010	10:52:40 PM	H2 MFC set to  0.000000
11/11/2010	10:52:40 PM	BCl3 MFC set to  0.000000
11/11/2010	10:52:40 PM	PHl3 MFC set to  0.000000
11/11/2010	10:52:40 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:52:40 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:52:40 PM	Tube furnace set to 0
11/11/2010	10:53:41 PM	H2 valve closed
11/11/2010	10:53:41 PM	BCl3 valve closed
11/11/2010	10:53:41 PM	PH3 valve closed
11/11/2010	10:53:41 PM	SiCl4 pre valve closed
11/11/2010	10:53:41 PM	SiCl4 post valve closed
11/11/2010	10:53:41 PM	Bubbler valve closed
11/11/2010	10:53:41 PM	Helium valve opened
11/11/2010	10:53:41 PM	Main Vac valve opened
11/11/2010	10:53:41 PM	Bypass valve opened
11/11/2010	10:53:41 PM	Helium MFC set to  100.000000
11/11/2010	10:53:41 PM	H2 MFC set to  0.000000
11/11/2010	10:53:41 PM	BCl3 MFC set to  0.000000
11/11/2010	10:53:41 PM	PHl3 MFC set to  0.000000
11/11/2010	10:53:41 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:53:41 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:53:41 PM	Tube furnace set to 0
11/11/2010	10:54:41 PM	Helium valve closed
11/11/2010	10:54:41 PM	H2 valve closed
11/11/2010	10:54:41 PM	BCl3 valve closed
11/11/2010	10:54:41 PM	PH3 valve closed
11/11/2010	10:54:41 PM	SiCl4 pre valve closed
11/11/2010	10:54:41 PM	SiCl4 post valve closed
11/11/2010	10:54:41 PM	Bubbler valve closed
11/11/2010	10:54:41 PM	Main Vac valve opened
11/11/2010	10:54:41 PM	Bypass valve opened
11/11/2010	10:54:41 PM	Helium MFC set to  0.000000
11/11/2010	10:54:41 PM	H2 MFC set to  0.000000
11/11/2010	10:54:41 PM	BCl3 MFC set to  0.000000
11/11/2010	10:54:41 PM	PHl3 MFC set to  0.000000
11/11/2010	10:54:41 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:54:41 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:54:41 PM	Tube furnace set to 0
11/11/2010	10:55:41 PM	H2 valve closed
11/11/2010	10:55:41 PM	BCl3 valve closed
11/11/2010	10:55:41 PM	PH3 valve closed
11/11/2010	10:55:41 PM	SiCl4 pre valve closed
11/11/2010	10:55:41 PM	SiCl4 post valve closed
11/11/2010	10:55:41 PM	Bubbler valve closed
11/11/2010	10:55:41 PM	Helium valve opened
11/11/2010	10:55:41 PM	Main Vac valve opened
11/11/2010	10:55:41 PM	Bypass valve opened
11/11/2010	10:55:41 PM	Helium MFC set to  100.000000
11/11/2010	10:55:41 PM	H2 MFC set to  0.000000
11/11/2010	10:55:41 PM	BCl3 MFC set to  0.000000
11/11/2010	10:55:41 PM	PHl3 MFC set to  0.000000
11/11/2010	10:55:41 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:55:41 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:55:41 PM	Tube furnace set to 0
11/11/2010	10:56:41 PM	Helium valve closed
11/11/2010	10:56:41 PM	H2 valve closed
11/11/2010	10:56:41 PM	BCl3 valve closed
11/11/2010	10:56:41 PM	PH3 valve closed
11/11/2010	10:56:41 PM	SiCl4 pre valve closed
11/11/2010	10:56:41 PM	SiCl4 post valve closed
11/11/2010	10:56:41 PM	Bubbler valve closed
11/11/2010	10:56:41 PM	Main Vac valve opened
11/11/2010	10:56:41 PM	Bypass valve opened
11/11/2010	10:56:41 PM	Helium MFC set to  0.000000
11/11/2010	10:56:41 PM	H2 MFC set to  0.000000
11/11/2010	10:56:41 PM	BCl3 MFC set to  0.000000
11/11/2010	10:56:41 PM	PHl3 MFC set to  0.000000
11/11/2010	10:56:41 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:56:41 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:56:41 PM	Tube furnace set to 0
11/11/2010	10:57:41 PM	H2 valve closed
11/11/2010	10:57:41 PM	BCl3 valve closed
11/11/2010	10:57:41 PM	PH3 valve closed
11/11/2010	10:57:41 PM	SiCl4 pre valve closed
11/11/2010	10:57:41 PM	SiCl4 post valve closed
11/11/2010	10:57:41 PM	Bubbler valve closed
11/11/2010	10:57:41 PM	Helium valve opened
11/11/2010	10:57:41 PM	Main Vac valve opened
11/11/2010	10:57:41 PM	Bypass valve opened
11/11/2010	10:57:41 PM	Helium MFC set to  100.000000
11/11/2010	10:57:41 PM	H2 MFC set to  0.000000
11/11/2010	10:57:41 PM	BCl3 MFC set to  0.000000
11/11/2010	10:57:41 PM	PHl3 MFC set to  0.000000
11/11/2010	10:57:41 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:57:41 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:57:41 PM	Tube furnace set to 0
11/11/2010	10:58:41 PM	Helium valve closed
11/11/2010	10:58:41 PM	H2 valve closed
11/11/2010	10:58:42 PM	BCl3 valve closed
11/11/2010	10:58:42 PM	PH3 valve closed
11/11/2010	10:58:42 PM	SiCl4 pre valve closed
11/11/2010	10:58:42 PM	SiCl4 post valve closed
11/11/2010	10:58:42 PM	Bubbler valve closed
11/11/2010	10:58:42 PM	Main Vac valve opened
11/11/2010	10:58:42 PM	Bypass valve opened
11/11/2010	10:58:42 PM	Helium MFC set to  0.000000
11/11/2010	10:58:42 PM	H2 MFC set to  0.000000
11/11/2010	10:58:42 PM	BCl3 MFC set to  0.000000
11/11/2010	10:58:42 PM	PHl3 MFC set to  0.000000
11/11/2010	10:58:42 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:58:42 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:58:42 PM	Tube furnace set to 0
11/11/2010	10:59:42 PM	H2 valve closed
11/11/2010	10:59:42 PM	BCl3 valve closed
11/11/2010	10:59:42 PM	PH3 valve closed
11/11/2010	10:59:42 PM	SiCl4 pre valve closed
11/11/2010	10:59:42 PM	SiCl4 post valve closed
11/11/2010	10:59:42 PM	Bubbler valve closed
11/11/2010	10:59:42 PM	Helium valve opened
11/11/2010	10:59:42 PM	Main Vac valve opened
11/11/2010	10:59:42 PM	Bypass valve opened
11/11/2010	10:59:42 PM	Helium MFC set to  100.000000
11/11/2010	10:59:42 PM	H2 MFC set to  0.000000
11/11/2010	10:59:42 PM	BCl3 MFC set to  0.000000
11/11/2010	10:59:42 PM	PHl3 MFC set to  0.000000
11/11/2010	10:59:42 PM	SiCl4 MFC set to  0.000000
11/11/2010	10:59:42 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	10:59:42 PM	Tube furnace set to 0
11/11/2010	11:00:42 PM	Helium valve closed
11/11/2010	11:00:42 PM	H2 valve closed
11/11/2010	11:00:42 PM	BCl3 valve closed
11/11/2010	11:00:42 PM	PH3 valve closed
11/11/2010	11:00:42 PM	SiCl4 pre valve closed
11/11/2010	11:00:42 PM	SiCl4 post valve closed
11/11/2010	11:00:42 PM	Bubbler valve closed
11/11/2010	11:00:42 PM	Main Vac valve opened
11/11/2010	11:00:42 PM	Bypass valve opened
11/11/2010	11:00:42 PM	Helium MFC set to  0.000000
11/11/2010	11:00:42 PM	H2 MFC set to  0.000000
11/11/2010	11:00:42 PM	BCl3 MFC set to  0.000000
11/11/2010	11:00:42 PM	PHl3 MFC set to  0.000000
11/11/2010	11:00:42 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:00:42 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:00:42 PM	Tube furnace set to 0
11/11/2010	11:01:42 PM	H2 valve closed
11/11/2010	11:01:42 PM	BCl3 valve closed
11/11/2010	11:01:42 PM	PH3 valve closed
11/11/2010	11:01:42 PM	SiCl4 pre valve closed
11/11/2010	11:01:42 PM	SiCl4 post valve closed
11/11/2010	11:01:42 PM	Bubbler valve closed
11/11/2010	11:01:42 PM	Helium valve opened
11/11/2010	11:01:42 PM	Main Vac valve opened
11/11/2010	11:01:42 PM	Bypass valve opened
11/11/2010	11:01:42 PM	Helium MFC set to  100.000000
11/11/2010	11:01:42 PM	H2 MFC set to  0.000000
11/11/2010	11:01:42 PM	BCl3 MFC set to  0.000000
11/11/2010	11:01:42 PM	PHl3 MFC set to  0.000000
11/11/2010	11:01:42 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:01:42 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:01:42 PM	Tube furnace set to 0
11/11/2010	11:02:42 PM	Helium valve closed
11/11/2010	11:02:42 PM	H2 valve closed
11/11/2010	11:02:42 PM	BCl3 valve closed
11/11/2010	11:02:42 PM	PH3 valve closed
11/11/2010	11:02:42 PM	SiCl4 pre valve closed
11/11/2010	11:02:42 PM	SiCl4 post valve closed
11/11/2010	11:02:42 PM	Bubbler valve closed
11/11/2010	11:02:42 PM	Main Vac valve opened
11/11/2010	11:02:42 PM	Bypass valve opened
11/11/2010	11:02:42 PM	Helium MFC set to  0.000000
11/11/2010	11:02:42 PM	H2 MFC set to  0.000000
11/11/2010	11:02:42 PM	BCl3 MFC set to  0.000000
11/11/2010	11:02:42 PM	PHl3 MFC set to  0.000000
11/11/2010	11:02:42 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:02:42 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:02:42 PM	Tube furnace set to 0
11/11/2010	11:03:42 PM	H2 valve closed
11/11/2010	11:03:42 PM	BCl3 valve closed
11/11/2010	11:03:42 PM	PH3 valve closed
11/11/2010	11:03:42 PM	SiCl4 pre valve closed
11/11/2010	11:03:42 PM	SiCl4 post valve closed
11/11/2010	11:03:42 PM	Bubbler valve closed
11/11/2010	11:03:42 PM	Helium valve opened
11/11/2010	11:03:42 PM	Main Vac valve opened
11/11/2010	11:03:42 PM	Bypass valve opened
11/11/2010	11:03:42 PM	Helium MFC set to  100.000000
11/11/2010	11:03:42 PM	H2 MFC set to  0.000000
11/11/2010	11:03:42 PM	BCl3 MFC set to  0.000000
11/11/2010	11:03:42 PM	PHl3 MFC set to  0.000000
11/11/2010	11:03:43 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:03:43 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:03:43 PM	Tube furnace set to 0
11/11/2010	11:04:43 PM	Helium valve closed
11/11/2010	11:04:43 PM	H2 valve closed
11/11/2010	11:04:43 PM	BCl3 valve closed
11/11/2010	11:04:43 PM	PH3 valve closed
11/11/2010	11:04:43 PM	SiCl4 pre valve closed
11/11/2010	11:04:43 PM	SiCl4 post valve closed
11/11/2010	11:04:43 PM	Bubbler valve closed
11/11/2010	11:04:43 PM	Main Vac valve opened
11/11/2010	11:04:43 PM	Bypass valve opened
11/11/2010	11:04:43 PM	Helium MFC set to  0.000000
11/11/2010	11:04:43 PM	H2 MFC set to  0.000000
11/11/2010	11:04:43 PM	BCl3 MFC set to  0.000000
11/11/2010	11:04:43 PM	PHl3 MFC set to  0.000000
11/11/2010	11:04:43 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:04:43 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:04:43 PM	Tube furnace set to 0
11/11/2010	11:04:44 PM	Run finished at 11:04 PM
11/11/2010	11:04:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:14:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:14:16 PM	Recipe started at 11:14 PM
11/11/2010	11:14:16 PM	Helium valve closed
11/11/2010	11:14:16 PM	H2 valve closed
11/11/2010	11:14:16 PM	BCl3 valve closed
11/11/2010	11:14:16 PM	PH3 valve closed
11/11/2010	11:14:16 PM	SiCl4 pre valve closed
11/11/2010	11:14:16 PM	SiCl4 post valve closed
11/11/2010	11:14:16 PM	Main Vac valve closed
11/11/2010	11:14:16 PM	Bubbler valve closed
11/11/2010	11:14:16 PM	Bypass valve opened
11/11/2010	11:14:16 PM	Helium MFC set to  0.000000
11/11/2010	11:14:16 PM	H2 MFC set to  0.000000
11/11/2010	11:14:16 PM	BCl3 MFC set to  0.000000
11/11/2010	11:14:16 PM	PHl3 MFC set to  0.000000
11/11/2010	11:14:16 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:14:16 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:14:16 PM	Tube furnace set to 0
11/11/2010	11:14:16 PM	Helium valve closed
11/11/2010	11:14:16 PM	H2 valve closed
11/11/2010	11:14:16 PM	BCl3 valve closed
11/11/2010	11:14:16 PM	PH3 valve closed
11/11/2010	11:14:16 PM	SiCl4 pre valve closed
11/11/2010	11:14:16 PM	SiCl4 post valve closed
11/11/2010	11:14:16 PM	Bubbler valve closed
11/11/2010	11:14:16 PM	Main Vac valve opened
11/11/2010	11:14:16 PM	Bypass valve opened
11/11/2010	11:14:16 PM	Helium MFC set to  0.000000
11/11/2010	11:14:16 PM	H2 MFC set to  0.000000
11/11/2010	11:14:16 PM	BCl3 MFC set to  0.000000
11/11/2010	11:14:16 PM	PHl3 MFC set to  0.000000
11/11/2010	11:14:16 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:14:16 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:14:16 PM	Tube furnace set to 0
11/11/2010	11:15:16 PM	H2 valve closed
11/11/2010	11:15:16 PM	BCl3 valve closed
11/11/2010	11:15:16 PM	PH3 valve closed
11/11/2010	11:15:16 PM	SiCl4 pre valve closed
11/11/2010	11:15:16 PM	SiCl4 post valve closed
11/11/2010	11:15:16 PM	Bubbler valve closed
11/11/2010	11:15:16 PM	Helium valve opened
11/11/2010	11:15:16 PM	Main Vac valve opened
11/11/2010	11:15:16 PM	Bypass valve opened
11/11/2010	11:15:16 PM	Helium MFC set to  100.000000
11/11/2010	11:15:16 PM	H2 MFC set to  0.000000
11/11/2010	11:15:16 PM	BCl3 MFC set to  0.000000
11/11/2010	11:15:16 PM	PHl3 MFC set to  0.000000
11/11/2010	11:15:16 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:15:16 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:15:16 PM	Tube furnace set to 0
11/11/2010	11:16:16 PM	Helium valve closed
11/11/2010	11:16:16 PM	H2 valve closed
11/11/2010	11:16:16 PM	BCl3 valve closed
11/11/2010	11:16:16 PM	PH3 valve closed
11/11/2010	11:16:16 PM	SiCl4 pre valve closed
11/11/2010	11:16:16 PM	SiCl4 post valve closed
11/11/2010	11:16:16 PM	Bubbler valve closed
11/11/2010	11:16:16 PM	Main Vac valve opened
11/11/2010	11:16:16 PM	Bypass valve opened
11/11/2010	11:16:16 PM	Helium MFC set to  0.000000
11/11/2010	11:16:16 PM	H2 MFC set to  0.000000
11/11/2010	11:16:16 PM	BCl3 MFC set to  0.000000
11/11/2010	11:16:16 PM	PHl3 MFC set to  0.000000
11/11/2010	11:16:16 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:16:16 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:16:17 PM	Tube furnace set to 0
11/11/2010	11:17:17 PM	H2 valve closed
11/11/2010	11:17:17 PM	BCl3 valve closed
11/11/2010	11:17:17 PM	PH3 valve closed
11/11/2010	11:17:17 PM	SiCl4 pre valve closed
11/11/2010	11:17:17 PM	SiCl4 post valve closed
11/11/2010	11:17:17 PM	Bubbler valve closed
11/11/2010	11:17:17 PM	Helium valve opened
11/11/2010	11:17:17 PM	Main Vac valve opened
11/11/2010	11:17:17 PM	Bypass valve opened
11/11/2010	11:17:17 PM	Helium MFC set to  100.000000
11/11/2010	11:17:17 PM	H2 MFC set to  0.000000
11/11/2010	11:17:17 PM	BCl3 MFC set to  0.000000
11/11/2010	11:17:17 PM	PHl3 MFC set to  0.000000
11/11/2010	11:17:17 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:17:17 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:17:17 PM	Tube furnace set to 0
11/11/2010	11:18:17 PM	Helium valve closed
11/11/2010	11:18:17 PM	H2 valve closed
11/11/2010	11:18:17 PM	BCl3 valve closed
11/11/2010	11:18:17 PM	PH3 valve closed
11/11/2010	11:18:17 PM	SiCl4 pre valve closed
11/11/2010	11:18:17 PM	SiCl4 post valve closed
11/11/2010	11:18:17 PM	Bubbler valve closed
11/11/2010	11:18:17 PM	Main Vac valve opened
11/11/2010	11:18:17 PM	Bypass valve opened
11/11/2010	11:18:17 PM	Helium MFC set to  0.000000
11/11/2010	11:18:17 PM	H2 MFC set to  0.000000
11/11/2010	11:18:17 PM	BCl3 MFC set to  0.000000
11/11/2010	11:18:17 PM	PHl3 MFC set to  0.000000
11/11/2010	11:18:17 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:18:17 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:18:17 PM	Tube furnace set to 0
11/11/2010	11:19:17 PM	H2 valve closed
11/11/2010	11:19:17 PM	BCl3 valve closed
11/11/2010	11:19:17 PM	PH3 valve closed
11/11/2010	11:19:17 PM	SiCl4 pre valve closed
11/11/2010	11:19:17 PM	SiCl4 post valve closed
11/11/2010	11:19:17 PM	Bubbler valve closed
11/11/2010	11:19:17 PM	Helium valve opened
11/11/2010	11:19:17 PM	Main Vac valve opened
11/11/2010	11:19:17 PM	Bypass valve opened
11/11/2010	11:19:17 PM	Helium MFC set to  100.000000
11/11/2010	11:19:17 PM	H2 MFC set to  0.000000
11/11/2010	11:19:17 PM	BCl3 MFC set to  0.000000
11/11/2010	11:19:17 PM	PHl3 MFC set to  0.000000
11/11/2010	11:19:17 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:19:17 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:19:17 PM	Tube furnace set to 0
11/11/2010	11:20:17 PM	Helium valve closed
11/11/2010	11:20:17 PM	H2 valve closed
11/11/2010	11:20:17 PM	BCl3 valve closed
11/11/2010	11:20:17 PM	PH3 valve closed
11/11/2010	11:20:17 PM	SiCl4 pre valve closed
11/11/2010	11:20:17 PM	SiCl4 post valve closed
11/11/2010	11:20:17 PM	Bubbler valve closed
11/11/2010	11:20:17 PM	Main Vac valve opened
11/11/2010	11:20:17 PM	Bypass valve opened
11/11/2010	11:20:17 PM	Helium MFC set to  0.000000
11/11/2010	11:20:17 PM	H2 MFC set to  0.000000
11/11/2010	11:20:17 PM	BCl3 MFC set to  0.000000
11/11/2010	11:20:17 PM	PHl3 MFC set to  0.000000
11/11/2010	11:20:17 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:20:17 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:20:17 PM	Tube furnace set to 0
11/11/2010	11:21:17 PM	H2 valve closed
11/11/2010	11:21:17 PM	BCl3 valve closed
11/11/2010	11:21:17 PM	PH3 valve closed
11/11/2010	11:21:17 PM	SiCl4 pre valve closed
11/11/2010	11:21:17 PM	SiCl4 post valve closed
11/11/2010	11:21:17 PM	Bubbler valve closed
11/11/2010	11:21:17 PM	Helium valve opened
11/11/2010	11:21:17 PM	Main Vac valve opened
11/11/2010	11:21:17 PM	Bypass valve opened
11/11/2010	11:21:17 PM	Helium MFC set to  100.000000
11/11/2010	11:21:17 PM	H2 MFC set to  0.000000
11/11/2010	11:21:17 PM	BCl3 MFC set to  0.000000
11/11/2010	11:21:17 PM	PHl3 MFC set to  0.000000
11/11/2010	11:21:17 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:21:17 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:21:18 PM	Tube furnace set to 0
11/11/2010	11:22:18 PM	Helium valve closed
11/11/2010	11:22:18 PM	H2 valve closed
11/11/2010	11:22:18 PM	BCl3 valve closed
11/11/2010	11:22:18 PM	PH3 valve closed
11/11/2010	11:22:18 PM	SiCl4 pre valve closed
11/11/2010	11:22:18 PM	SiCl4 post valve closed
11/11/2010	11:22:18 PM	Bubbler valve closed
11/11/2010	11:22:18 PM	Main Vac valve opened
11/11/2010	11:22:18 PM	Bypass valve opened
11/11/2010	11:22:18 PM	Helium MFC set to  0.000000
11/11/2010	11:22:18 PM	H2 MFC set to  0.000000
11/11/2010	11:22:18 PM	BCl3 MFC set to  0.000000
11/11/2010	11:22:18 PM	PHl3 MFC set to  0.000000
11/11/2010	11:22:18 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:22:18 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:22:18 PM	Tube furnace set to 0
11/11/2010	11:23:18 PM	H2 valve closed
11/11/2010	11:23:18 PM	BCl3 valve closed
11/11/2010	11:23:18 PM	PH3 valve closed
11/11/2010	11:23:18 PM	SiCl4 pre valve closed
11/11/2010	11:23:18 PM	SiCl4 post valve closed
11/11/2010	11:23:18 PM	Bubbler valve closed
11/11/2010	11:23:18 PM	Helium valve opened
11/11/2010	11:23:18 PM	Main Vac valve opened
11/11/2010	11:23:18 PM	Bypass valve opened
11/11/2010	11:23:18 PM	Helium MFC set to  100.000000
11/11/2010	11:23:18 PM	H2 MFC set to  0.000000
11/11/2010	11:23:18 PM	BCl3 MFC set to  0.000000
11/11/2010	11:23:18 PM	PHl3 MFC set to  0.000000
11/11/2010	11:23:18 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:23:18 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:23:18 PM	Tube furnace set to 0
11/11/2010	11:24:18 PM	Helium valve closed
11/11/2010	11:24:18 PM	H2 valve closed
11/11/2010	11:24:18 PM	BCl3 valve closed
11/11/2010	11:24:18 PM	PH3 valve closed
11/11/2010	11:24:18 PM	SiCl4 pre valve closed
11/11/2010	11:24:18 PM	SiCl4 post valve closed
11/11/2010	11:24:18 PM	Bubbler valve closed
11/11/2010	11:24:18 PM	Main Vac valve opened
11/11/2010	11:24:18 PM	Bypass valve opened
11/11/2010	11:24:18 PM	Helium MFC set to  0.000000
11/11/2010	11:24:18 PM	H2 MFC set to  0.000000
11/11/2010	11:24:18 PM	BCl3 MFC set to  0.000000
11/11/2010	11:24:18 PM	PHl3 MFC set to  0.000000
11/11/2010	11:24:18 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:24:18 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:24:18 PM	Tube furnace set to 0
11/11/2010	11:25:18 PM	H2 valve closed
11/11/2010	11:25:18 PM	BCl3 valve closed
11/11/2010	11:25:18 PM	PH3 valve closed
11/11/2010	11:25:18 PM	SiCl4 pre valve closed
11/11/2010	11:25:18 PM	SiCl4 post valve closed
11/11/2010	11:25:18 PM	Bubbler valve closed
11/11/2010	11:25:18 PM	Helium valve opened
11/11/2010	11:25:18 PM	Main Vac valve opened
11/11/2010	11:25:18 PM	Bypass valve opened
11/11/2010	11:25:18 PM	Helium MFC set to  100.000000
11/11/2010	11:25:18 PM	H2 MFC set to  0.000000
11/11/2010	11:25:18 PM	BCl3 MFC set to  0.000000
11/11/2010	11:25:18 PM	PHl3 MFC set to  0.000000
11/11/2010	11:25:18 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:25:18 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:25:18 PM	Tube furnace set to 0
11/11/2010	11:26:18 PM	Helium valve closed
11/11/2010	11:26:18 PM	H2 valve closed
11/11/2010	11:26:18 PM	BCl3 valve closed
11/11/2010	11:26:18 PM	PH3 valve closed
11/11/2010	11:26:18 PM	SiCl4 pre valve closed
11/11/2010	11:26:18 PM	SiCl4 post valve closed
11/11/2010	11:26:18 PM	Bubbler valve closed
11/11/2010	11:26:18 PM	Main Vac valve opened
11/11/2010	11:26:18 PM	Bypass valve opened
11/11/2010	11:26:18 PM	Helium MFC set to  0.000000
11/11/2010	11:26:18 PM	H2 MFC set to  0.000000
11/11/2010	11:26:18 PM	BCl3 MFC set to  0.000000
11/11/2010	11:26:18 PM	PHl3 MFC set to  0.000000
11/11/2010	11:26:18 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:26:18 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:26:19 PM	Tube furnace set to 0
11/11/2010	11:27:19 PM	H2 valve closed
11/11/2010	11:27:19 PM	BCl3 valve closed
11/11/2010	11:27:19 PM	PH3 valve closed
11/11/2010	11:27:19 PM	SiCl4 pre valve closed
11/11/2010	11:27:19 PM	SiCl4 post valve closed
11/11/2010	11:27:19 PM	Bubbler valve closed
11/11/2010	11:27:19 PM	Helium valve opened
11/11/2010	11:27:19 PM	Main Vac valve opened
11/11/2010	11:27:19 PM	Bypass valve opened
11/11/2010	11:27:19 PM	Helium MFC set to  100.000000
11/11/2010	11:27:19 PM	H2 MFC set to  0.000000
11/11/2010	11:27:19 PM	BCl3 MFC set to  0.000000
11/11/2010	11:27:19 PM	PHl3 MFC set to  0.000000
11/11/2010	11:27:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:27:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:27:19 PM	Tube furnace set to 0
11/11/2010	11:28:19 PM	Helium valve closed
11/11/2010	11:28:19 PM	H2 valve closed
11/11/2010	11:28:19 PM	BCl3 valve closed
11/11/2010	11:28:19 PM	PH3 valve closed
11/11/2010	11:28:19 PM	SiCl4 pre valve closed
11/11/2010	11:28:19 PM	SiCl4 post valve closed
11/11/2010	11:28:19 PM	Bubbler valve closed
11/11/2010	11:28:19 PM	Main Vac valve opened
11/11/2010	11:28:19 PM	Bypass valve opened
11/11/2010	11:28:19 PM	Helium MFC set to  0.000000
11/11/2010	11:28:19 PM	H2 MFC set to  0.000000
11/11/2010	11:28:19 PM	BCl3 MFC set to  0.000000
11/11/2010	11:28:19 PM	PHl3 MFC set to  0.000000
11/11/2010	11:28:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:28:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:28:19 PM	Tube furnace set to 0
11/11/2010	11:29:19 PM	H2 valve closed
11/11/2010	11:29:19 PM	BCl3 valve closed
11/11/2010	11:29:19 PM	PH3 valve closed
11/11/2010	11:29:19 PM	SiCl4 pre valve closed
11/11/2010	11:29:19 PM	SiCl4 post valve closed
11/11/2010	11:29:19 PM	Bubbler valve closed
11/11/2010	11:29:19 PM	Helium valve opened
11/11/2010	11:29:19 PM	Main Vac valve opened
11/11/2010	11:29:19 PM	Bypass valve opened
11/11/2010	11:29:19 PM	Helium MFC set to  100.000000
11/11/2010	11:29:19 PM	H2 MFC set to  0.000000
11/11/2010	11:29:19 PM	BCl3 MFC set to  0.000000
11/11/2010	11:29:19 PM	PHl3 MFC set to  0.000000
11/11/2010	11:29:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:29:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:29:19 PM	Tube furnace set to 0
11/11/2010	11:30:19 PM	Helium valve closed
11/11/2010	11:30:19 PM	H2 valve closed
11/11/2010	11:30:19 PM	BCl3 valve closed
11/11/2010	11:30:19 PM	PH3 valve closed
11/11/2010	11:30:19 PM	SiCl4 pre valve closed
11/11/2010	11:30:19 PM	SiCl4 post valve closed
11/11/2010	11:30:19 PM	Bubbler valve closed
11/11/2010	11:30:19 PM	Main Vac valve opened
11/11/2010	11:30:19 PM	Bypass valve opened
11/11/2010	11:30:19 PM	Helium MFC set to  0.000000
11/11/2010	11:30:19 PM	H2 MFC set to  0.000000
11/11/2010	11:30:19 PM	BCl3 MFC set to  0.000000
11/11/2010	11:30:19 PM	PHl3 MFC set to  0.000000
11/11/2010	11:30:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:30:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:30:19 PM	Tube furnace set to 0
11/11/2010	11:31:19 PM	H2 valve closed
11/11/2010	11:31:19 PM	BCl3 valve closed
11/11/2010	11:31:19 PM	PH3 valve closed
11/11/2010	11:31:19 PM	SiCl4 pre valve closed
11/11/2010	11:31:19 PM	SiCl4 post valve closed
11/11/2010	11:31:19 PM	Bubbler valve closed
11/11/2010	11:31:19 PM	Helium valve opened
11/11/2010	11:31:19 PM	Main Vac valve opened
11/11/2010	11:31:19 PM	Bypass valve opened
11/11/2010	11:31:19 PM	Helium MFC set to  100.000000
11/11/2010	11:31:19 PM	H2 MFC set to  0.000000
11/11/2010	11:31:19 PM	BCl3 MFC set to  0.000000
11/11/2010	11:31:19 PM	PHl3 MFC set to  0.000000
11/11/2010	11:31:19 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:31:19 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:31:20 PM	Tube furnace set to 0
11/11/2010	11:31:48 PM	Run aborted at 11:31 PM
11/11/2010	11:31:48 PM	Helium valve closed
11/11/2010	11:31:48 PM	H2 valve closed
11/11/2010	11:31:48 PM	BCl3 valve closed
11/11/2010	11:31:48 PM	PH3 valve closed
11/11/2010	11:31:48 PM	SiCl4 pre valve closed
11/11/2010	11:31:48 PM	SiCl4 post valve closed
11/11/2010	11:31:48 PM	Bypass valve closed
11/11/2010	11:31:48 PM	Main Vac valve closed
11/11/2010	11:31:48 PM	Bubbler valve closed
11/11/2010	11:31:48 PM	Helium MFC set to  0.000000
11/11/2010	11:31:48 PM	H2 MFC set to  0.000000
11/11/2010	11:31:48 PM	BCl3 MFC set to  0.000000
11/11/2010	11:31:48 PM	PHl3 MFC set to  0.000000
11/11/2010	11:31:48 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:31:48 PM	Tube furnace set to 0
11/11/2010	11:31:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:32:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	11:32:04 PM	Recipe started at 11:32 PM
11/11/2010	11:32:04 PM	Helium valve closed
11/11/2010	11:32:04 PM	H2 valve closed
11/11/2010	11:32:04 PM	BCl3 valve closed
11/11/2010	11:32:04 PM	PH3 valve closed
11/11/2010	11:32:04 PM	SiCl4 pre valve closed
11/11/2010	11:32:04 PM	SiCl4 post valve closed
11/11/2010	11:32:04 PM	Main Vac valve closed
11/11/2010	11:32:04 PM	Bubbler valve closed
11/11/2010	11:32:05 PM	Bypass valve opened
11/11/2010	11:32:05 PM	Helium MFC set to  0.000000
11/11/2010	11:32:05 PM	H2 MFC set to  0.000000
11/11/2010	11:32:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:32:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:32:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:32:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:32:05 PM	Tube furnace set to 0
11/11/2010	11:32:05 PM	Helium valve closed
11/11/2010	11:32:05 PM	H2 valve closed
11/11/2010	11:32:05 PM	BCl3 valve closed
11/11/2010	11:32:05 PM	PH3 valve closed
11/11/2010	11:32:05 PM	SiCl4 pre valve closed
11/11/2010	11:32:05 PM	SiCl4 post valve closed
11/11/2010	11:32:05 PM	Bubbler valve closed
11/11/2010	11:32:05 PM	Main Vac valve opened
11/11/2010	11:32:05 PM	Bypass valve opened
11/11/2010	11:32:05 PM	Helium MFC set to  0.000000
11/11/2010	11:32:05 PM	H2 MFC set to  0.000000
11/11/2010	11:32:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:32:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:32:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:32:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:32:05 PM	Tube furnace set to 0
11/11/2010	11:32:05 PM	Run finished at 11:32 PM
11/11/2010	11:32:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/11/2010	11:32:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:33:02 PM	Recipe started at 11:32 PM
11/11/2010	11:33:02 PM	Helium valve closed
11/11/2010	11:33:02 PM	H2 valve closed
11/11/2010	11:33:02 PM	BCl3 valve closed
11/11/2010	11:33:02 PM	PH3 valve closed
11/11/2010	11:33:02 PM	SiCl4 pre valve closed
11/11/2010	11:33:02 PM	SiCl4 post valve closed
11/11/2010	11:33:02 PM	Main Vac valve closed
11/11/2010	11:33:02 PM	Bubbler valve closed
11/11/2010	11:33:02 PM	Bypass valve opened
11/11/2010	11:33:02 PM	Helium MFC set to  0.000000
11/11/2010	11:33:02 PM	H2 MFC set to  0.000000
11/11/2010	11:33:02 PM	BCl3 MFC set to  0.000000
11/11/2010	11:33:02 PM	PHl3 MFC set to  0.000000
11/11/2010	11:33:02 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:33:02 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:33:02 PM	Tube furnace set to 0
11/11/2010	11:33:03 PM	Helium valve closed
11/11/2010	11:33:03 PM	H2 valve closed
11/11/2010	11:33:03 PM	BCl3 valve closed
11/11/2010	11:33:03 PM	PH3 valve closed
11/11/2010	11:33:03 PM	SiCl4 pre valve closed
11/11/2010	11:33:03 PM	SiCl4 post valve closed
11/11/2010	11:33:03 PM	Bubbler valve closed
11/11/2010	11:33:03 PM	Main Vac valve opened
11/11/2010	11:33:03 PM	Bypass valve opened
11/11/2010	11:33:03 PM	Helium MFC set to  0.000000
11/11/2010	11:33:03 PM	H2 MFC set to  0.000000
11/11/2010	11:33:03 PM	BCl3 MFC set to  0.000000
11/11/2010	11:33:03 PM	PHl3 MFC set to  0.000000
11/11/2010	11:33:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:33:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:33:03 PM	Tube furnace set to 0
11/11/2010	11:34:03 PM	H2 valve closed
11/11/2010	11:34:03 PM	BCl3 valve closed
11/11/2010	11:34:03 PM	PH3 valve closed
11/11/2010	11:34:03 PM	SiCl4 pre valve closed
11/11/2010	11:34:03 PM	SiCl4 post valve closed
11/11/2010	11:34:03 PM	Bubbler valve closed
11/11/2010	11:34:03 PM	Helium valve opened
11/11/2010	11:34:03 PM	Main Vac valve opened
11/11/2010	11:34:03 PM	Bypass valve opened
11/11/2010	11:34:03 PM	Helium MFC set to  100.000000
11/11/2010	11:34:03 PM	H2 MFC set to  0.000000
11/11/2010	11:34:03 PM	BCl3 MFC set to  0.000000
11/11/2010	11:34:03 PM	PHl3 MFC set to  0.000000
11/11/2010	11:34:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:34:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:34:03 PM	Tube furnace set to 0
11/11/2010	11:35:03 PM	Helium valve closed
11/11/2010	11:35:03 PM	H2 valve closed
11/11/2010	11:35:03 PM	BCl3 valve closed
11/11/2010	11:35:03 PM	PH3 valve closed
11/11/2010	11:35:03 PM	SiCl4 pre valve closed
11/11/2010	11:35:03 PM	SiCl4 post valve closed
11/11/2010	11:35:03 PM	Bubbler valve closed
11/11/2010	11:35:03 PM	Main Vac valve opened
11/11/2010	11:35:03 PM	Bypass valve opened
11/11/2010	11:35:03 PM	Helium MFC set to  0.000000
11/11/2010	11:35:03 PM	H2 MFC set to  0.000000
11/11/2010	11:35:03 PM	BCl3 MFC set to  0.000000
11/11/2010	11:35:03 PM	PHl3 MFC set to  0.000000
11/11/2010	11:35:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:35:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:35:03 PM	Tube furnace set to 0
11/11/2010	11:36:03 PM	H2 valve closed
11/11/2010	11:36:03 PM	BCl3 valve closed
11/11/2010	11:36:03 PM	PH3 valve closed
11/11/2010	11:36:03 PM	SiCl4 pre valve closed
11/11/2010	11:36:03 PM	SiCl4 post valve closed
11/11/2010	11:36:03 PM	Bubbler valve closed
11/11/2010	11:36:03 PM	Helium valve opened
11/11/2010	11:36:03 PM	Main Vac valve opened
11/11/2010	11:36:03 PM	Bypass valve opened
11/11/2010	11:36:03 PM	Helium MFC set to  100.000000
11/11/2010	11:36:03 PM	H2 MFC set to  0.000000
11/11/2010	11:36:03 PM	BCl3 MFC set to  0.000000
11/11/2010	11:36:03 PM	PHl3 MFC set to  0.000000
11/11/2010	11:36:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:36:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:36:03 PM	Tube furnace set to 0
11/11/2010	11:37:03 PM	Helium valve closed
11/11/2010	11:37:03 PM	H2 valve closed
11/11/2010	11:37:03 PM	BCl3 valve closed
11/11/2010	11:37:03 PM	PH3 valve closed
11/11/2010	11:37:03 PM	SiCl4 pre valve closed
11/11/2010	11:37:03 PM	SiCl4 post valve closed
11/11/2010	11:37:03 PM	Bubbler valve closed
11/11/2010	11:37:03 PM	Main Vac valve opened
11/11/2010	11:37:03 PM	Bypass valve opened
11/11/2010	11:37:03 PM	Helium MFC set to  0.000000
11/11/2010	11:37:03 PM	H2 MFC set to  0.000000
11/11/2010	11:37:03 PM	BCl3 MFC set to  0.000000
11/11/2010	11:37:03 PM	PHl3 MFC set to  0.000000
11/11/2010	11:37:03 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:37:03 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:37:04 PM	Tube furnace set to 0
11/11/2010	11:38:04 PM	H2 valve closed
11/11/2010	11:38:04 PM	BCl3 valve closed
11/11/2010	11:38:04 PM	PH3 valve closed
11/11/2010	11:38:04 PM	SiCl4 pre valve closed
11/11/2010	11:38:04 PM	SiCl4 post valve closed
11/11/2010	11:38:04 PM	Bubbler valve closed
11/11/2010	11:38:04 PM	Helium valve opened
11/11/2010	11:38:04 PM	Main Vac valve opened
11/11/2010	11:38:04 PM	Bypass valve opened
11/11/2010	11:38:04 PM	Helium MFC set to  100.000000
11/11/2010	11:38:04 PM	H2 MFC set to  0.000000
11/11/2010	11:38:04 PM	BCl3 MFC set to  0.000000
11/11/2010	11:38:04 PM	PHl3 MFC set to  0.000000
11/11/2010	11:38:04 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:38:04 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:38:04 PM	Tube furnace set to 0
11/11/2010	11:39:04 PM	Helium valve closed
11/11/2010	11:39:04 PM	H2 valve closed
11/11/2010	11:39:04 PM	BCl3 valve closed
11/11/2010	11:39:04 PM	PH3 valve closed
11/11/2010	11:39:04 PM	SiCl4 pre valve closed
11/11/2010	11:39:04 PM	SiCl4 post valve closed
11/11/2010	11:39:04 PM	Bubbler valve closed
11/11/2010	11:39:04 PM	Main Vac valve opened
11/11/2010	11:39:04 PM	Bypass valve opened
11/11/2010	11:39:04 PM	Helium MFC set to  0.000000
11/11/2010	11:39:04 PM	H2 MFC set to  0.000000
11/11/2010	11:39:04 PM	BCl3 MFC set to  0.000000
11/11/2010	11:39:04 PM	PHl3 MFC set to  0.000000
11/11/2010	11:39:04 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:39:04 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:39:04 PM	Tube furnace set to 0
11/11/2010	11:40:04 PM	H2 valve closed
11/11/2010	11:40:04 PM	BCl3 valve closed
11/11/2010	11:40:04 PM	PH3 valve closed
11/11/2010	11:40:04 PM	SiCl4 pre valve closed
11/11/2010	11:40:04 PM	SiCl4 post valve closed
11/11/2010	11:40:04 PM	Bubbler valve closed
11/11/2010	11:40:04 PM	Helium valve opened
11/11/2010	11:40:04 PM	Main Vac valve opened
11/11/2010	11:40:04 PM	Bypass valve opened
11/11/2010	11:40:04 PM	Helium MFC set to  100.000000
11/11/2010	11:40:04 PM	H2 MFC set to  0.000000
11/11/2010	11:40:04 PM	BCl3 MFC set to  0.000000
11/11/2010	11:40:04 PM	PHl3 MFC set to  0.000000
11/11/2010	11:40:04 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:40:04 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:40:04 PM	Tube furnace set to 0
11/11/2010	11:41:04 PM	Helium valve closed
11/11/2010	11:41:04 PM	H2 valve closed
11/11/2010	11:41:04 PM	BCl3 valve closed
11/11/2010	11:41:04 PM	PH3 valve closed
11/11/2010	11:41:04 PM	SiCl4 pre valve closed
11/11/2010	11:41:04 PM	SiCl4 post valve closed
11/11/2010	11:41:04 PM	Bubbler valve closed
11/11/2010	11:41:04 PM	Main Vac valve opened
11/11/2010	11:41:04 PM	Bypass valve opened
11/11/2010	11:41:04 PM	Helium MFC set to  0.000000
11/11/2010	11:41:04 PM	H2 MFC set to  0.000000
11/11/2010	11:41:04 PM	BCl3 MFC set to  0.000000
11/11/2010	11:41:04 PM	PHl3 MFC set to  0.000000
11/11/2010	11:41:04 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:41:04 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:41:04 PM	Tube furnace set to 0
11/11/2010	11:42:04 PM	H2 valve closed
11/11/2010	11:42:04 PM	BCl3 valve closed
11/11/2010	11:42:04 PM	PH3 valve closed
11/11/2010	11:42:04 PM	SiCl4 pre valve closed
11/11/2010	11:42:04 PM	SiCl4 post valve closed
11/11/2010	11:42:04 PM	Bubbler valve closed
11/11/2010	11:42:04 PM	Helium valve opened
11/11/2010	11:42:04 PM	Main Vac valve opened
11/11/2010	11:42:04 PM	Bypass valve opened
11/11/2010	11:42:04 PM	Helium MFC set to  100.000000
11/11/2010	11:42:04 PM	H2 MFC set to  0.000000
11/11/2010	11:42:04 PM	BCl3 MFC set to  0.000000
11/11/2010	11:42:04 PM	PHl3 MFC set to  0.000000
11/11/2010	11:42:04 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:42:04 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:42:05 PM	Tube furnace set to 0
11/11/2010	11:43:05 PM	Helium valve closed
11/11/2010	11:43:05 PM	H2 valve closed
11/11/2010	11:43:05 PM	BCl3 valve closed
11/11/2010	11:43:05 PM	PH3 valve closed
11/11/2010	11:43:05 PM	SiCl4 pre valve closed
11/11/2010	11:43:05 PM	SiCl4 post valve closed
11/11/2010	11:43:05 PM	Bubbler valve closed
11/11/2010	11:43:05 PM	Main Vac valve opened
11/11/2010	11:43:05 PM	Bypass valve opened
11/11/2010	11:43:05 PM	Helium MFC set to  0.000000
11/11/2010	11:43:05 PM	H2 MFC set to  0.000000
11/11/2010	11:43:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:43:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:43:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:43:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:43:05 PM	Tube furnace set to 0
11/11/2010	11:44:05 PM	H2 valve closed
11/11/2010	11:44:05 PM	BCl3 valve closed
11/11/2010	11:44:05 PM	PH3 valve closed
11/11/2010	11:44:05 PM	SiCl4 pre valve closed
11/11/2010	11:44:05 PM	SiCl4 post valve closed
11/11/2010	11:44:05 PM	Bubbler valve closed
11/11/2010	11:44:05 PM	Helium valve opened
11/11/2010	11:44:05 PM	Main Vac valve opened
11/11/2010	11:44:05 PM	Bypass valve opened
11/11/2010	11:44:05 PM	Helium MFC set to  100.000000
11/11/2010	11:44:05 PM	H2 MFC set to  0.000000
11/11/2010	11:44:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:44:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:44:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:44:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:44:05 PM	Tube furnace set to 0
11/11/2010	11:45:05 PM	Helium valve closed
11/11/2010	11:45:05 PM	H2 valve closed
11/11/2010	11:45:05 PM	BCl3 valve closed
11/11/2010	11:45:05 PM	PH3 valve closed
11/11/2010	11:45:05 PM	SiCl4 pre valve closed
11/11/2010	11:45:05 PM	SiCl4 post valve closed
11/11/2010	11:45:05 PM	Bubbler valve closed
11/11/2010	11:45:05 PM	Main Vac valve opened
11/11/2010	11:45:05 PM	Bypass valve opened
11/11/2010	11:45:05 PM	Helium MFC set to  0.000000
11/11/2010	11:45:05 PM	H2 MFC set to  0.000000
11/11/2010	11:45:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:45:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:45:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:45:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:45:05 PM	Tube furnace set to 0
11/11/2010	11:46:05 PM	H2 valve closed
11/11/2010	11:46:05 PM	BCl3 valve closed
11/11/2010	11:46:05 PM	PH3 valve closed
11/11/2010	11:46:05 PM	SiCl4 pre valve closed
11/11/2010	11:46:05 PM	SiCl4 post valve closed
11/11/2010	11:46:05 PM	Bubbler valve closed
11/11/2010	11:46:05 PM	Helium valve opened
11/11/2010	11:46:05 PM	Main Vac valve opened
11/11/2010	11:46:05 PM	Bypass valve opened
11/11/2010	11:46:05 PM	Helium MFC set to  100.000000
11/11/2010	11:46:05 PM	H2 MFC set to  0.000000
11/11/2010	11:46:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:46:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:46:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:46:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:46:05 PM	Tube furnace set to 0
11/11/2010	11:47:05 PM	Helium valve closed
11/11/2010	11:47:05 PM	H2 valve closed
11/11/2010	11:47:05 PM	BCl3 valve closed
11/11/2010	11:47:05 PM	PH3 valve closed
11/11/2010	11:47:05 PM	SiCl4 pre valve closed
11/11/2010	11:47:05 PM	SiCl4 post valve closed
11/11/2010	11:47:05 PM	Bubbler valve closed
11/11/2010	11:47:05 PM	Main Vac valve opened
11/11/2010	11:47:05 PM	Bypass valve opened
11/11/2010	11:47:05 PM	Helium MFC set to  0.000000
11/11/2010	11:47:05 PM	H2 MFC set to  0.000000
11/11/2010	11:47:05 PM	BCl3 MFC set to  0.000000
11/11/2010	11:47:05 PM	PHl3 MFC set to  0.000000
11/11/2010	11:47:05 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:47:05 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:47:06 PM	Tube furnace set to 0
11/11/2010	11:48:06 PM	H2 valve closed
11/11/2010	11:48:06 PM	BCl3 valve closed
11/11/2010	11:48:06 PM	PH3 valve closed
11/11/2010	11:48:06 PM	SiCl4 pre valve closed
11/11/2010	11:48:06 PM	SiCl4 post valve closed
11/11/2010	11:48:06 PM	Bubbler valve closed
11/11/2010	11:48:06 PM	Helium valve opened
11/11/2010	11:48:06 PM	Main Vac valve opened
11/11/2010	11:48:06 PM	Bypass valve opened
11/11/2010	11:48:06 PM	Helium MFC set to  100.000000
11/11/2010	11:48:06 PM	H2 MFC set to  0.000000
11/11/2010	11:48:06 PM	BCl3 MFC set to  0.000000
11/11/2010	11:48:06 PM	PHl3 MFC set to  0.000000
11/11/2010	11:48:06 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:48:06 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:48:06 PM	Tube furnace set to 0
11/11/2010	11:49:06 PM	Helium valve closed
11/11/2010	11:49:06 PM	H2 valve closed
11/11/2010	11:49:06 PM	BCl3 valve closed
11/11/2010	11:49:06 PM	PH3 valve closed
11/11/2010	11:49:06 PM	SiCl4 pre valve closed
11/11/2010	11:49:06 PM	SiCl4 post valve closed
11/11/2010	11:49:06 PM	Bubbler valve closed
11/11/2010	11:49:06 PM	Main Vac valve opened
11/11/2010	11:49:06 PM	Bypass valve opened
11/11/2010	11:49:06 PM	Helium MFC set to  0.000000
11/11/2010	11:49:06 PM	H2 MFC set to  0.000000
11/11/2010	11:49:06 PM	BCl3 MFC set to  0.000000
11/11/2010	11:49:06 PM	PHl3 MFC set to  0.000000
11/11/2010	11:49:06 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:49:06 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:49:06 PM	Tube furnace set to 0
11/11/2010	11:50:06 PM	H2 valve closed
11/11/2010	11:50:06 PM	BCl3 valve closed
11/11/2010	11:50:06 PM	PH3 valve closed
11/11/2010	11:50:06 PM	SiCl4 pre valve closed
11/11/2010	11:50:06 PM	SiCl4 post valve closed
11/11/2010	11:50:06 PM	Bubbler valve closed
11/11/2010	11:50:06 PM	Helium valve opened
11/11/2010	11:50:06 PM	Main Vac valve opened
11/11/2010	11:50:06 PM	Bypass valve opened
11/11/2010	11:50:06 PM	Helium MFC set to  100.000000
11/11/2010	11:50:06 PM	H2 MFC set to  0.000000
11/11/2010	11:50:06 PM	BCl3 MFC set to  0.000000
11/11/2010	11:50:06 PM	PHl3 MFC set to  0.000000
11/11/2010	11:50:06 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:50:06 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:50:06 PM	Tube furnace set to 0
11/11/2010	11:50:09 PM	Run aborted at 11:50 PM
11/11/2010	11:50:09 PM	Helium valve closed
11/11/2010	11:50:09 PM	H2 valve closed
11/11/2010	11:50:09 PM	BCl3 valve closed
11/11/2010	11:50:09 PM	PH3 valve closed
11/11/2010	11:50:09 PM	SiCl4 pre valve closed
11/11/2010	11:50:09 PM	SiCl4 post valve closed
11/11/2010	11:50:09 PM	Bypass valve closed
11/11/2010	11:50:09 PM	Main Vac valve closed
11/11/2010	11:50:09 PM	Bubbler valve closed
11/11/2010	11:50:09 PM	Helium MFC set to  0.000000
11/11/2010	11:50:09 PM	H2 MFC set to  0.000000
11/11/2010	11:50:09 PM	BCl3 MFC set to  0.000000
11/11/2010	11:50:09 PM	PHl3 MFC set to  0.000000
11/11/2010	11:50:09 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:50:09 PM	Tube furnace set to 0
11/11/2010	11:50:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:50:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/11/2010	11:50:24 PM	Recipe started at 11:50 PM
11/11/2010	11:50:24 PM	Helium valve closed
11/11/2010	11:50:24 PM	H2 valve closed
11/11/2010	11:50:24 PM	BCl3 valve closed
11/11/2010	11:50:24 PM	PH3 valve closed
11/11/2010	11:50:24 PM	SiCl4 pre valve closed
11/11/2010	11:50:24 PM	SiCl4 post valve closed
11/11/2010	11:50:24 PM	Main Vac valve closed
11/11/2010	11:50:24 PM	Bubbler valve closed
11/11/2010	11:50:24 PM	Bypass valve opened
11/11/2010	11:50:24 PM	Helium MFC set to  0.000000
11/11/2010	11:50:24 PM	H2 MFC set to  0.000000
11/11/2010	11:50:24 PM	BCl3 MFC set to  0.000000
11/11/2010	11:50:24 PM	PHl3 MFC set to  0.000000
11/11/2010	11:50:24 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:50:24 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:50:24 PM	Tube furnace set to 0
11/11/2010	11:50:25 PM	Helium valve closed
11/11/2010	11:50:25 PM	H2 valve closed
11/11/2010	11:50:25 PM	BCl3 valve closed
11/11/2010	11:50:25 PM	PH3 valve closed
11/11/2010	11:50:25 PM	SiCl4 pre valve closed
11/11/2010	11:50:25 PM	SiCl4 post valve closed
11/11/2010	11:50:25 PM	Bubbler valve closed
11/11/2010	11:50:25 PM	Main Vac valve opened
11/11/2010	11:50:25 PM	Bypass valve opened
11/11/2010	11:50:25 PM	Helium MFC set to  0.000000
11/11/2010	11:50:25 PM	H2 MFC set to  0.000000
11/11/2010	11:50:25 PM	BCl3 MFC set to  0.000000
11/11/2010	11:50:25 PM	PHl3 MFC set to  0.000000
11/11/2010	11:50:25 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:50:25 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:50:25 PM	Tube furnace set to 0
11/11/2010	11:51:25 PM	H2 valve closed
11/11/2010	11:51:25 PM	BCl3 valve closed
11/11/2010	11:51:25 PM	PH3 valve closed
11/11/2010	11:51:25 PM	SiCl4 pre valve closed
11/11/2010	11:51:25 PM	SiCl4 post valve closed
11/11/2010	11:51:25 PM	Bubbler valve closed
11/11/2010	11:51:25 PM	Helium valve opened
11/11/2010	11:51:25 PM	Main Vac valve opened
11/11/2010	11:51:25 PM	Bypass valve opened
11/11/2010	11:51:25 PM	Helium MFC set to  100.000000
11/11/2010	11:51:25 PM	H2 MFC set to  0.000000
11/11/2010	11:51:25 PM	BCl3 MFC set to  0.000000
11/11/2010	11:51:25 PM	PHl3 MFC set to  0.000000
11/11/2010	11:51:25 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:51:25 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:51:25 PM	Tube furnace set to 0
11/11/2010	11:52:25 PM	Helium valve closed
11/11/2010	11:52:25 PM	H2 valve closed
11/11/2010	11:52:25 PM	BCl3 valve closed
11/11/2010	11:52:25 PM	PH3 valve closed
11/11/2010	11:52:25 PM	SiCl4 pre valve closed
11/11/2010	11:52:25 PM	SiCl4 post valve closed
11/11/2010	11:52:25 PM	Bubbler valve closed
11/11/2010	11:52:25 PM	Main Vac valve opened
11/11/2010	11:52:25 PM	Bypass valve opened
11/11/2010	11:52:25 PM	Helium MFC set to  0.000000
11/11/2010	11:52:25 PM	H2 MFC set to  0.000000
11/11/2010	11:52:25 PM	BCl3 MFC set to  0.000000
11/11/2010	11:52:25 PM	PHl3 MFC set to  0.000000
11/11/2010	11:52:25 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:52:25 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:52:25 PM	Tube furnace set to 0
11/11/2010	11:53:25 PM	H2 valve closed
11/11/2010	11:53:25 PM	BCl3 valve closed
11/11/2010	11:53:25 PM	PH3 valve closed
11/11/2010	11:53:25 PM	SiCl4 pre valve closed
11/11/2010	11:53:25 PM	SiCl4 post valve closed
11/11/2010	11:53:25 PM	Bubbler valve closed
11/11/2010	11:53:25 PM	Helium valve opened
11/11/2010	11:53:25 PM	Main Vac valve opened
11/11/2010	11:53:25 PM	Bypass valve opened
11/11/2010	11:53:25 PM	Helium MFC set to  100.000000
11/11/2010	11:53:25 PM	H2 MFC set to  0.000000
11/11/2010	11:53:25 PM	BCl3 MFC set to  0.000000
11/11/2010	11:53:25 PM	PHl3 MFC set to  0.000000
11/11/2010	11:53:25 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:53:25 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:53:25 PM	Tube furnace set to 0
11/11/2010	11:54:25 PM	Helium valve closed
11/11/2010	11:54:25 PM	H2 valve closed
11/11/2010	11:54:25 PM	BCl3 valve closed
11/11/2010	11:54:25 PM	PH3 valve closed
11/11/2010	11:54:25 PM	SiCl4 pre valve closed
11/11/2010	11:54:25 PM	SiCl4 post valve closed
11/11/2010	11:54:25 PM	Bubbler valve closed
11/11/2010	11:54:25 PM	Main Vac valve opened
11/11/2010	11:54:25 PM	Bypass valve opened
11/11/2010	11:54:25 PM	Helium MFC set to  0.000000
11/11/2010	11:54:25 PM	H2 MFC set to  0.000000
11/11/2010	11:54:25 PM	BCl3 MFC set to  0.000000
11/11/2010	11:54:25 PM	PHl3 MFC set to  0.000000
11/11/2010	11:54:25 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:54:25 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:54:26 PM	Tube furnace set to 0
11/11/2010	11:55:26 PM	H2 valve closed
11/11/2010	11:55:26 PM	BCl3 valve closed
11/11/2010	11:55:26 PM	PH3 valve closed
11/11/2010	11:55:26 PM	SiCl4 pre valve closed
11/11/2010	11:55:26 PM	SiCl4 post valve closed
11/11/2010	11:55:26 PM	Bubbler valve closed
11/11/2010	11:55:26 PM	Helium valve opened
11/11/2010	11:55:26 PM	Main Vac valve opened
11/11/2010	11:55:26 PM	Bypass valve opened
11/11/2010	11:55:26 PM	Helium MFC set to  100.000000
11/11/2010	11:55:26 PM	H2 MFC set to  0.000000
11/11/2010	11:55:26 PM	BCl3 MFC set to  0.000000
11/11/2010	11:55:26 PM	PHl3 MFC set to  0.000000
11/11/2010	11:55:26 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:55:26 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:55:26 PM	Tube furnace set to 0
11/11/2010	11:56:26 PM	Helium valve closed
11/11/2010	11:56:26 PM	H2 valve closed
11/11/2010	11:56:26 PM	BCl3 valve closed
11/11/2010	11:56:26 PM	PH3 valve closed
11/11/2010	11:56:26 PM	SiCl4 pre valve closed
11/11/2010	11:56:26 PM	SiCl4 post valve closed
11/11/2010	11:56:26 PM	Bubbler valve closed
11/11/2010	11:56:26 PM	Main Vac valve opened
11/11/2010	11:56:26 PM	Bypass valve opened
11/11/2010	11:56:26 PM	Helium MFC set to  0.000000
11/11/2010	11:56:26 PM	H2 MFC set to  0.000000
11/11/2010	11:56:26 PM	BCl3 MFC set to  0.000000
11/11/2010	11:56:26 PM	PHl3 MFC set to  0.000000
11/11/2010	11:56:26 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:56:26 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:56:26 PM	Tube furnace set to 0
11/11/2010	11:57:26 PM	H2 valve closed
11/11/2010	11:57:26 PM	BCl3 valve closed
11/11/2010	11:57:26 PM	PH3 valve closed
11/11/2010	11:57:26 PM	SiCl4 pre valve closed
11/11/2010	11:57:26 PM	SiCl4 post valve closed
11/11/2010	11:57:26 PM	Bubbler valve closed
11/11/2010	11:57:26 PM	Helium valve opened
11/11/2010	11:57:26 PM	Main Vac valve opened
11/11/2010	11:57:26 PM	Bypass valve opened
11/11/2010	11:57:26 PM	Helium MFC set to  100.000000
11/11/2010	11:57:26 PM	H2 MFC set to  0.000000
11/11/2010	11:57:26 PM	BCl3 MFC set to  0.000000
11/11/2010	11:57:26 PM	PHl3 MFC set to  0.000000
11/11/2010	11:57:26 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:57:26 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:57:26 PM	Tube furnace set to 0
11/11/2010	11:58:26 PM	Helium valve closed
11/11/2010	11:58:26 PM	H2 valve closed
11/11/2010	11:58:26 PM	BCl3 valve closed
11/11/2010	11:58:26 PM	PH3 valve closed
11/11/2010	11:58:26 PM	SiCl4 pre valve closed
11/11/2010	11:58:26 PM	SiCl4 post valve closed
11/11/2010	11:58:26 PM	Bubbler valve closed
11/11/2010	11:58:26 PM	Main Vac valve opened
11/11/2010	11:58:26 PM	Bypass valve opened
11/11/2010	11:58:26 PM	Helium MFC set to  0.000000
11/11/2010	11:58:26 PM	H2 MFC set to  0.000000
11/11/2010	11:58:26 PM	BCl3 MFC set to  0.000000
11/11/2010	11:58:26 PM	PHl3 MFC set to  0.000000
11/11/2010	11:58:26 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:58:26 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:58:26 PM	Tube furnace set to 0
11/11/2010	11:59:26 PM	H2 valve closed
11/11/2010	11:59:26 PM	BCl3 valve closed
11/11/2010	11:59:26 PM	PH3 valve closed
11/11/2010	11:59:26 PM	SiCl4 pre valve closed
11/11/2010	11:59:26 PM	SiCl4 post valve closed
11/11/2010	11:59:26 PM	Bubbler valve closed
11/11/2010	11:59:26 PM	Helium valve opened
11/11/2010	11:59:26 PM	Main Vac valve opened
11/11/2010	11:59:26 PM	Bypass valve opened
11/11/2010	11:59:26 PM	Helium MFC set to  100.000000
11/11/2010	11:59:26 PM	H2 MFC set to  0.000000
11/11/2010	11:59:26 PM	BCl3 MFC set to  0.000000
11/11/2010	11:59:26 PM	PHl3 MFC set to  0.000000
11/11/2010	11:59:26 PM	SiCl4 MFC set to  0.000000
11/11/2010	11:59:26 PM	Bypass solenoid MFC set to  0.000000
11/11/2010	11:59:27 PM	Tube furnace set to 0
